References
- Wensink, H., Berenshot, U. W., Jan seu, H. V. Elwenspoek, M. C., 'High Resolution Powder Blast Micromachining,' Pro.of the IEEE Micro Electro Mechanical Systems (MEMS) 2000, pp. 769-774, 2000 https://doi.org/10.1109/MEMSYS.2000.838615
- Belloy, E., Thurre, S., Walckiers, E., Sayah, A., Gijs, M.A.M., 'The introduction of powder blasting for sensor and microsystem applications,' Sensor and Actuators 84, pp. 330-337, 2000 https://doi.org/10.1016/S0924-4247(00)00390-3
- Solignac, D., Sayah, A., Constantin, S.. Freitag, R. Gijs, M.A.M., 'Powder blasting for the realization of microchips for bio-analytic applications,' Sensor and Actuators A 3003, pp. 1-6, 2001 https://doi.org/10.1016/S0924-4247(01)00577-5
- Choi, J. S., Park, K. H., Park, D. S., 'Micro Grooving of Glass Using Micro Abrasive Jet Machining,' J. of the Korean Society of Precision Engineering, Vol. 18, No. 10, pp. 178-183, 2001
- Kruusing, A., Lappavuori, S., Uusimaki, A., Uusimaki, M., 'Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining,' Part of the Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, Paris, France, SPIE, Vol. 3680, pp. 870-878, 1999 https://doi.org/10.1117/12.341285
- Ligthart, H. J., Slikkerveer, P. J., Verd, F.H.I., Swinkels, P.H.W., Zonneveld, M. H., 'Glass and Glass Machining in Zeus Panels,' Philips J. Res., Vol. 50, No. 3/4, pp. 475-499, 1996 https://doi.org/10.1016/S0165-5817(97)84687-6
- Lawn, B. R., Fracture of Blittle Solids, 2nd edn., Cambridge Univ., Cambridge, UK, pp. 302-304, 1993
- Bouzid, S., Bouaouadja, N., 'Effect of impact angle on glass surfaces eroded by sand blasting,' J. of the European Ceramics Society, 20, pp. 481-488, 2000 https://doi.org/10.1016/S0955-2219(99)00140-5
- Belloy ,E., Sayah, A., Gijs, M.A.M., 'Oblique powder blasting for three-dimensional micromachining of brittle materials,' Sensor and Actuators A 2998, pp. 1-6, 2001 https://doi.org/10.1016/S0924-4247(01)00572-6
- Evans, A. G., Gulden, M. E., Rosenblatt, M., 'Impact Damage in Brittle Materials in the Elastic=plastic Response Regime,' Proc. R. Soc. London A 361, pp. 343-365, 1978 https://doi.org/10.1098/rspa.1978.0106
- Verma, A. P., Lal, G. K., 'A Theoretical Study of Erosion Phenomenon in Abrasive Jet Mcahining,' Transactions of the ASME, Vol. 118, pp. 564-570, 1996 https://doi.org/10.1115/1.2831575
- Slikkerveer, P. J., Bouten, P.C.P., Veld, F.H.I., Scholten, H., 'Erosion and damage by sharp particles,' Wear, 217, pp. 237-250, 1998 https://doi.org/10.1016/S0043-1648(98)00187-2
- Kim, K. H., Choi, J. S., Park, D. S., 'Effect of Nozzle Scanning in Micro Grooving of Glass by Powder Blasting,' J. of the Korean Society of Mechanical Engineering, Vol. 26, No. 7, pp. 1280-1287, 2002 https://doi.org/10.3795/KSME-A.2002.26.7.1280
- Park, K. H., Oh, Y. T., Park, D. S., 'Mechanical Etching of Micro Pocket by Powder Blasting,' J. of the Korean Society of Precision Engineering, Vol. 19, No. 1, pp. 219-226, 2002
- Park, D. S., Micromachining of the injection mold for TFT-LCD LGP with dot pattern and diffusion function, KOSEF Report No. R05-2002-000-00421-0, 2002