• 제목/요약/키워드: Manufacturing defect

검색결과 410건 처리시간 0.032초

Deep Learning-Based Defect Detection in Cu-Cu Bonding Processes

  • DaBin Na;JiMin Gu;JiMin Park;YunSeok Song;JiHun Moon;Sangyul Ha;SangJeen Hong
    • 반도체디스플레이기술학회지
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    • 제23권2호
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    • pp.135-142
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    • 2024
  • Cu-Cu bonding, one of the key technologies in advanced packaging, enhances semiconductor chip performance, miniaturization, and energy efficiency by facilitating rapid data transfer and low power consumption. However, the quality of the interface bonding can significantly impact overall bond quality, necessitating strategies to quickly detect and classify in-process defects. This study presents a methodology for detecting defects in wafer junction areas from Scanning Acoustic Microscopy images using a ResNet-50 based deep learning model. Additionally, the use of the defect map is proposed to rapidly inspect and categorize defects occurring during the Cu-Cu bonding process, thereby improving yield and productivity in semiconductor manufacturing.

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명암도 분포 및 형태 분석을 이용한 효과적인 TFT-LCD 필름 결함 영상 분류 기법 (An effective classification method for TFT-LCD film defect images using intensity distribution and shape analysis)

  • 노충호;이석룡;조문신
    • 한국멀티미디어학회논문지
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    • 제13권8호
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    • pp.1115-1127
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    • 2010
  • TFT-LCD 생산 과정에서 발생하는 결함을 정확하게 분류하여 결함 유형에 따라 폐기, 사용가능 등의 의사결정을 적절하게 내리는 것은 수율 증가 및 생산성 향상에 필수적인 요소이다. 본 논문에서는 TFT-LCD 생산 라인에서 획득한 결함 영상에 대하여 명암도 분포(intensity distribution) 및 결함 영상의 형태 특징(shape feature)을 분석하여 효과적으로 필름 결함 유형을 분류하는 기법을 제시한다. 본 연구에서는 먼저 필름 결함 영상을 결함 영역과 결함이 아닌 배경 영역으로 이진화하고, 결함 영역에서 결함의 선형성(linearity), 명암도 분포를 고려한 형태 특징 등의 여러 가지 특징을 분석하여 기준 영상(referential image) 데이터베이스를 구축하였으며, 분류하고자 하는 결함 영상과 데이터베이스에 저장된 기준 영상과의 매칭 비용 함수(matching cost function)를 정의하여 적절히 매칭시킴으로써 결함의 유형을 결정하였다. 제시한 기법의 성능을 검증하기 위하여 실제 TFT-LCD 생산 라인에서 획득한 결함 영상들을 대상으로 분류 실험을 수행하였으며, 실험 결과 생산 라인에서 이용할 수 있을 정도의 상당한 수준의 분류 정확도를 달성하였음을 보여주었다.

후육 Al 주조재의 기포결함 최소화를 위한 임계냉각속도의 영향 (Effect of Critical Cooling Rate for Minimization of Porosity in the Thick Aluminum Casting)

  • 곽시영;조인성;김용현;이희권
    • 한국주조공학회지
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    • 제37권6호
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    • pp.181-185
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    • 2017
  • In the present study, the effect of cooling rate on the formation of the porosity in the thick aluminum sand casting was investigated. Nowadays, due to considerations of weight and cost reduction, large scale thick aluminum casting has replaces steel frames for vacuum chambers for semiconductor production. Several thick aluminum castings were manufactured using chill with temperature measurements. The castings were inspected using 3D computed tomography in order to quantify the porosity defect density in the castings. Effects of the thickness of the chill on the porosity defect density were discussed.

AE 신호 및 신경회로망을 이용한 공작기계 주축용 베어링 결함검출 (Detection of Main Spindle Bearing Defects in Machine Tool by Acoustic Emission Signal via Neural Network Methodology)

  • 정의식
    • 한국생산제조학회지
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    • 제6권4호
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    • pp.46-53
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    • 1997
  • This paper presents a method of detection localized defects on tapered roller bearing in main spindle of machine tool system. The feature vectors, i.e. statistical parameters, in time-domain analysis technique have been calculated to extract useful features from acoustic emission signals. These feature vectors are used as the input feature of an neural network to classify and detect bearing defects. As a results, the detection of bearing defect conditions could be sucessfully performed by using an neural network with statistical parameters of acoustic emission signals.

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품질전략과 경영성과간의 관계에서 통제시스템의 매개효과 (The intermediate Effects of Control System on the Relationship between Quality Strategy and Performance)

  • 김달곤
    • 품질경영학회지
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    • 제30권3호
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    • pp.150-167
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    • 2002
  • Normative theory suggests that control systems should be designed to complement management's objectives and strategies. However, few empirical studies have focused on how control systems have been modified to complement new manufacturing techniques, such as zero-defect strategy. The major purpose of this study is to examine the effects of the attributes of quality strategy and control system on performance. The previous studies have subdivided quality strategy into the ECL(economic conformance level) and ZD(zero-defect) strategy. To accomplish the purpose, this study empirically analysed the data based on the questionnaires from manufacturing department personnel of 67 Korean companies. The major results are as follows. The companies that had implemented the ZD strategy and its control system outperformed the companies that had implemented ECL strategy. Also, the ZD strategy differs from ECL strategy in control system, the criteria of performance evaluation and feedback frequence variable. There is no difference in quality performance monitoring and communication variable. From this results, although many companies have strived for continuous improvement of quality, it was restricted in improvement activities that dont's required much investment cost, quality performance monitoring and communication.

SEM/EDX를 이용한 OPC 드럼용 Al 튜브의 표면결함 분석에 관한 연구 (On the Surface Defect Analysis of an Aluminum Tube for an OPC Drum using n SEM and EDX)

  • 김청균
    • Tribology and Lubricants
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    • 제23권4호
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    • pp.143-148
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    • 2007
  • The surface defects of an aluminum tube for an OPC drum have been analyzed using a scanning microscopy(SEM) and an energy dispersive X-ray analyze.(EDX). The SEM/EDX system, which may provide good information on the surface defects and their distributions, provides an optical diameter of an impurity and a chemical composition. These are strongly related on the coated film thickness and quality of an OPC drum, which is a key element of a toner cartridge for a laser printer. The experimental results show that the local deformations, scratch wear, and flaws are produce the non-uniform coating layers, which may be removed by a manufacturing process of an aluminum tube. The major parameters on the coating quality of an OPC drum are the impurities of an aluminum tube such as silicon, oxygen, calcium, carbon, sulphur, chlorine, and others. These impurities may be removed by an ingot molding, extrusion and drawing, quality control, and packing processes with a strict manufacturing technology.

전자재료 표면의 무결함 연마를 위한 화학기계적 균형 (Chemical and Mechanical Balance in Polishing of Electronic Materials for Defect-Free Surfaces)

  • 정해도;이창석;김지윤
    • 한국기계가공학회지
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    • 제11권1호
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    • pp.7-12
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    • 2012
  • Chemical mechanical polishing(CMP) technology is faced with the challenge of processing new electronic materials. This paper focuses on the balance between chemical and mechanical reactions in the CMP process that is required to cope with a variety of electronic materials. The material properties were classified into the following categories: easy to abrade(ETA), difficult to abrade(DTA), easy to react(ETR) and difficult to react(DTR). The chemical and mechanical balance for the representative ETA-ETR, DTA-ETR, ETA-DTR and DTA-DTR materials was considered for defect-free surfaces. This paper suggests the suitable polishing methods and examples for each electronic material.

태양광 웨이퍼의 결함검출을 위한 자동 정밀검사 시스템 개발 (Development of Automatic Precision Inspection System for Defect Detection of Photovoltaic Wafer)

  • 백승엽
    • 한국생산제조학회지
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    • 제20권5호
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    • pp.666-672
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    • 2011
  • In this paper, we describes the development of automatic inspection system for detecting the defects on photovoltaic wafer by using machine vision. Until now, The defect inspection process was manually performed by operators. So these processes caused the produce of poorly-made articles and inaccuracy results. To improve the inspection accuracy, the inspection system is not only configured, but the image processing algorithm is also developed. The inspection system includes dimensional verification and pattern matching which compares a 2-D image of an object to a pattern image the method proves to be computationally efficient and accurate for real time application and we confirmed the applicability of the proposed method though the experience in a complex environment.

대형 주강품의 제조기술 개발과 실용화 (Development and Utilization of Manufacturing Technique for Large Steel Casting)

  • 율촌치;길본일부;산반무
    • 한국주조공학회지
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    • 제24권2호
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    • pp.63-70
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    • 2004
  • Foundry techniquews for large steel casting depends on the skills of foundrymen considerably. Especially, the problem of reducing casring surface defects is difficult to clear numerically. Statistical analysis by using wuantification theory for hot tear and sand inclusion, and multiple regression analysis for dimensional defects have been shown to be examples of solving this difficulty. Many causes of surface defects can be evaluated by these analyses. These evaluations serve as the base data of defect reduction and contribute to the constant improvement of casting quality and quality enhancement activity. The system to perform quality enhancement activity was developed and it proved very useful for transfering foundry techniques and skills from the old to young generations.

가속열화시험에 의한 폴리머애자의 신뢰성 평가 (Reliability Assessment of Polymer Insulators by Accelerated Aging Test)

  • 한채홍;이병성;정종욱
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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    • pp.10-14
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    • 2001
  • In order to assess the long-tenn reliability of polymer insulators for distribution power systems, we have developed the accelerated aging test method which can simulate the operation conditions. In this study, 3000 hours aging test for 4 kinds of polymer insulators has been completed by the developed accelerated aging test. After 3000 hours aging test, visual inspection and electrical tests were carried for identifying a change of characteristics. Some specimens showed the surface erosion and the manufacturing defect. In the electrical tests, the wet flashover voltage was significant1y decreased by the accelerated aging test. In comparison with the field-aged polymer insulators, it can be concluded that the developed test method can evaluate the long-tenn reliability within short time and screen the manufacturing defect.

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