• Tribology and Lubricants
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• v.33 no.6
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• pp.282-287
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• 2017

SU-8 is an epoxy-type photoresist widely used for the fabrication of high-aspect-ratio (HAR) micro-structures in micro-electro-mechanical systems (MEMS). To fabricate highly integrated structures, chemical mechanical polishing (CMP) has emerged as the preferred manufacturing process for planarizing the MEMS structure. In SU-8 CMP, an oxidizer decomposes organic impurities and particles in the CMP slurry remove the chemically reacted surface of SU-8. To fabricate HAR microstructures using the CMP process, the adhesion between SU-8 and substrate material is important to avoid the delamination of the SU-8 film caused by the mechanical-dominant material removal characteristic. In this study, the friction force during the CMP process is measured with a CMP monitoring system to detect the delamination phenomenon and investigate the delamination of the SU-8 film from the silicon substrate under various pressure conditions. The increase in applied pressure causes an increase in the frictional force and wafer-edge stress concentration. The frictional force measurement shows that the friction force changes according to the delamination phenomenon of the SU-8 film, and that it is possible to monitor the delamination phenomenon during the SU-8 CMP process. The delamination at a high applied pressure is explained by the effect of stress distribution and pad deformation. Consequently, it is necessary to control the pressure of polishing, which can avoid the delamination in SU-8 CMP.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.449-450
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• 2006

Development of a feed drive system with high speed, positioning accuracy and thrust has been an important issue in modern automation systems and machine tools. Linear motors can be used as an efficient system to achieve such technical demands. By eliminating mechanical transmission mechanisms such as ball screw or rack-pinion, much higher speeds and greater acceleration can be achieved without backlash or excessive friction. However, an important disadvantage of linear motor system is its high power loss and heating up of motor and neighboring machine components on operation. For the application of the linear motors to precision machine tools an effective cooling method and thermal optimizing measures are required. In this paper presents an investigation into a thermal behavior of linear motor cooling plate. FVM employed to analyze the thermal behavior of the linear motor cooling plate, using the ANSYS-CFX.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.6
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• pp.533-541
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• 2017

Recently, with the adoption of modern computing and communication technologies, manufacturing systems have become more autonomous and intelligent. Thus, as the number of field devices with smart sensors also increase, the need for an integrated management of such devices becomes essential. This paper proposes a smart encoder architecture that integrates the position sensing function with CANopen connectivity. In addition, an integrated system is proposed to simultaneously control and monitor multiple encoders over the Controller Area Network (CAN) fieldbus network. We evaluated the performance and functionalities of the proposed system by comparative experiments with commercial CANopen smart encoders using a CANopen conformance test.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.6
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• pp.634-640
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• 2009

Helmholtz resonator has been used, especially in intake and exhaust systems of vehicles, due to its good noise reduction characteristics at low frequencies. Many approaches have been developed to predict the acoustic behavior of the resonator with the assumption that there is no leakage from the resonator. However, its behavior may be affected by leakage which may exist in manufacturing processes or on purpose. This study investigates the effect of leakage on the noise reduction characteristics of Helmholtz resonator with two practical examples. One is a resonator with a gap between baffle and housing of the resonator and the other one is a resonator with two drain holes on the baffle. The measured transmission loss shows that the resonance frequencies are considerably shifted to higher frequency due to the leakage. The Boundary Element Method was applied to predict the transmission loss of the Helmholtz resonator with drain holes. The comparison between the measured and predicted transmission loss shows that the acoustic impedance of the holes is essential for accurate predictions of the transmission loss.

• International Journal of Aeronautical and Space Sciences
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• v.9 no.2
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• pp.18-33
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• 2008

This paper presents design optimization of a new Active Twist Rotor (ATR) blade and conducts its aeroelastic analysis in forward flight condition. In order to improve a twist actuation performance, the present ATR blade utilizes a single crystal piezoelectric fiber composite actuator and the blade cross-sectional layout is designed through an optimization procedure. The single crystal piezoelectric fiber composite actuator has excellent piezoelectric strain performance when compared with the previous piezoelectric fiber composites such as Active Fiber Composites (AFC) and Macro Fiber Composites (MFC). Further design optimization gives a cross-sectional layout that maximizes the static twist actuation while satisfying various blade design requirements. After the design optimization is completed successfully, an aeroelastic analysis of the present ATR blade in forward flight is conducted to confirm the efficiency in reducing the vibratory loads at both fixed- and rotating-systems. Numerical simulation shows that the present ATR blade utilizing single crystal piezoelectric fiber composites may reduce the vibratory loads significantly even with much lower input-voltage when compared with that used in the previous ATR blade. However, for an application of the present single crystal piezoelectric actuator to a full scaled rotor blade, several issues exist. Difficulty of manufacturing in a large size and severe brittleness in its material characteristics will need to be examined.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.140-146
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• 1998

Methods and systems to remove static electricity are requested necessarily because the static electricity causes a flammable gas explosion, a fire, reduction of production rate in manufacturing VLSI semiconductor device and so on. In this paper, abrasion and dust contaminant of needle electrode are studied experimentally. And, frequencies and pulse durations of a high frequency pulse source were controlled effectively to minimize the abrasion of needle electrode and control generated numbers of ions. As a result, it is verified experimentally that the ion generation of charge neutralizer increases by using a high frequency pulse source.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.43 no.1
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• pp.79-86
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• 2020

The effects of R&D investment on innovation such as patents and intangible assets, and the effect on the corporate performance such as revenue and profit growth, were analyzed using path analysis. In particular, this study compared and analyzed the performances of non-cooperative R&D and cooperative R&D. The results of this study are summarized as follows. First, R&D investment has a significant impact on innovation performance. This supports the existing research results. Second, patents have a significant impact on intangible asset growth. Third, in the case of corporate groups carrying out cooperative R&D, intangible asset growth forms a significant causal relationship with revenue growth. Fourth, in case of cooperative R&D, intangible asset growth has a significant mediating effect between patent and revenue growth. Like the existing research, the results of this research support the innovation performance of R&D investment. It also supports the existing argument that the results of cooperative R&D are more favorable to increase corporate value. However, unlike the existing research, we found a path leading to increased revenue through patents and intangible assets, and confirmed that such a path is likely to be achieved through cooperative R & D rather than internal R&D.

• Corrosion Science and Technology
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• v.7 no.3
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• pp.145-151
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• 2008

Material degradation such as high temperature oxidation of metallic material is a severe problem in energy generation systems or manufacturing industries. The metallic materials are oxidized to form oxide films in high temperature environments. The oxide films act as diffusion barriers of oxygen and metal ions and thereafter decrease oxidation rates of metals. The metal oxidation is, however, accelerated by mechanical fracture and spalling of the oxide films caused by thermal stresses by repetition of temperature change, vibration and by the impact of solid particles. It is therefore very important to investigate mechanical properties and adhesion of oxide films in high temperature environments, as well as the properties in a room temperature environment. The oxidation tests were conducted for Ni and Ni-Co alloy under high temperature corrosive environments. The hardness distributions against the indentation depth from the top surface were examined at room temperature. Dynamic indentation tests were performed on Ni oxide films formed on Ni surfaces at room and high temperature to observe fractures or cracks generated around impact craters. As a result, it was found that the mechanical property as hardness of the oxide films were different between Ni and Ni-Co alloy, and between room and high temperatures, and that the adhesion of Ni oxide films was relatively stronger than that of Co oxide films.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.389-394
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• 2014

In this paper, we report a new manufacturing method for friction reduction using micro-AAJ (abrasive air-jet) machining. AAJ machining employs compressed air to accelerate a jet of high-speed particles to mechanically machine features, including micro-channels and micro-holes, into glass, metal, or polymer substrates for use in microfluidics, MEMS (micro electromechanical systems). And we introduce the micro-AAJ machining system, which consists of a micro-AAJ nozzle and a five-axis positioning system. Various micro-AAJ nozzles can be used, depending on the required surface structure, and three-dimensional machining is possible. We machined samples under six different conditions and describe machining results obtained while using it. We also measured the coefficient of friction of micro-textured surfaces. We report the coefficient of friction of micro-textured surfaces patterned using micro-AAJ machining for engine piston ring.