• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.1
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• pp.1-5
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• 2011

To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

• Journal of the Korean Society for Precision Engineering
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• v.15 no.2
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• pp.75-80
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• 1998

Process information is known to have the continuous distribution in many manufacturing processes. Generalized p-chart has been developed for controlling processes by classifying the information characteristics into several groups. But it is improper to describe continuous processes with the classified process informal ion, which is based on the classical set concept. Fuzzy control chart, has been developed for the control of linguistic data, but it is also based on the dichotomous notion of classical set theory. In this paper, fuzzy sampling method is studied in order to process the uncertain data properly. The method is incorporated with the fuzzy control chart. Statistical characteristics of the fuzzy representative value are utilized to device the fuzzy-statistical control chart. The fuzzy-statistical control chart is compared with the generalized p-chart and both the sensitivity to the process information distribution change pared robustiness against the noise on the process information of the fuzzy-statistical control chart are shown to be superior.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.5
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• pp.134-140
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• 2015

A control program of an engine control module (ECM) was developed, and its control performance was verified on a 750Ps marine diesel engine. The control method was designed for an engine rotational speed control system. For ECM hardware, the commercial rapid control prototype (RCP) ECM was used. The programming tool for control algorithm development was the MatLab/Simulink. The main control algorithm assembled many control models as engine cranking, run, and stall. Each model has sub-models to input/output control signals. The target engine speed was input signal from a speed control lever, and control output signal of the ECM was sent to the unit-injectors for fuel injection. The engine test was performed under various conditions of engine rotational speeds and dynamometer loads. The test results show that the control function of the ECM is suitable for electrical marine diesel engines.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.326-330
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• 2020

Small-scale production control systems for smart manufacturing are becoming increasingly necessary as the manufacturing industry seeks to maximize manufacturing efficiency as the demand for customized product production increases. Correspondingly, the development of an embedded system to realize this capability is becoming important. In this study, we developed an embedded system based on an open source system that is cheaper than a widely applied programmable logic controller (PLC)-based production control system that is easier to install, configure, and process than a conventional relay control panel. This embedded system is system is based on a low-power, high-performance Cortex M4 processor and can be applied to smart manufacturing. It is designed to improve the development environment and compatibility of existing PLCs, control small-scale production systems, and enable data collection through heterogeneous communication. The real-time response characteristics were confirmed through an operation test for input/output control and data collection, and it was confirmed that they can be used in industrial sites.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.39 no.10
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• pp.1108-1120
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• 1990

The present study is to develop an intelligent control system for flexible manufacturing system, which is suitable for a variety of manufacturing types with smaller production rates. The controller is designed to integrate heuristic rules with optimization techniques for loading as well as flow rate of parts and ultimately meeting performance indices. The control function implemented by an optimization technique is to calculate short term production rates of parts. The heuristic control determined by production rules requires knowledge base to evaluate selected loading alternatives according to short term production rate and current process information, and also to determine final decision pertaining to loading. In this case, the knowledge base is constructed using the rules for evaluating alternatives, decision criteria, and flow control of parts in manufacturing system. The database is formulated by means of managing and updating current process information. A graphic system to monitor current status of the function and operation of manufacturing system is developed, and computer simulation is carried out to evaluate the performance of the proposed controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.719-720
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• 2011

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.1
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.5
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• pp.137-142
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• 2018

With the development of the electronic-materials industry, multi-functional metal-composite materials with high thermal conductivity and low thermal expansion must be developed for high reliability and high life expectancy. This paper is a preliminary study on the manufacturing technology of gas reaction control composite material, focusing on the prediction of the equivalent thermal properties of Al-AlN composite materials. Numerical equivalent property values are obtained by using finite element analysis and compared with theoretical formulas. Al-AlN composite materials should become the optimal composite material when the proportion of the reinforcing phase is less than 0.5.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.4
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• pp.41-47
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• 2019

The advent of highly integrated, high-power electronics requires low a coefficient of thermal expansion performance to prevent delamination between the heat dissipation material and substrate. This paper reports a preliminary study on the manufacturing technology of gas reaction control composite material, focusing on the prediction of the thermal expansion coefficients of Al-AlN composite materials. We obtained numerical equivalent property values by using finite element analysis and compared the values with theoretical formulas. Al-AlN should become the optimal composite material when the proportion of the reinforcing phase is approximately 0.45.

• Journal of Korean Institute of Industrial Engineers
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• v.28 no.4
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• pp.415-424
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• 2002

Semiconductor manufacturing has been emerged as a highly competitive but profitable business. Accordingly it becomes very important for semiconductor manufacturing companies to meet customer demands at the right time, in order to keep the leading edge in the world market. However, due-date oriented production is very difficult task because of the complex job flows with highly resource conflicts in fabrication shop called FAB. Due to its cyclic manufacturing feature of products, to be completed, a semiconductor product is processed repeatedly as many times as the number of the product manufacturing cycles in FAB, and FAB processes of individual manufacturing cycles are composed with similar but not identical unit processes. In this paper, we propose a production scheduling and control scheme that is designed specifically for semiconductor scheduling environment (FAB). The proposed scheme consists of three modules: simulation module, cycle due-date estimation module, and dispatching module. The fundamental idea of the scheduler is to introduce the due-date for each cycle of job, with which the complex job flows in FAB can be controlled through a simple scheduling rule such as the minimum slack rule, such that the customer due-dates are maximally satisfied. Through detailed simulation, the performance of a cycle due-date based scheduler has been verified.