• Journal of the Korean Society for Precision Engineering
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• v.17 no.8
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• pp.106-112
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• 2000

Cognition and control of grinding trouble occurring during the grinding process are classified into a quantitative knowledge which depends on experimental data and qualitative knowledge which relies on skiful engineers. grinding operations include a large number of functional parameters since there are several ways of coping with ginding trouble. One is the qualitative method which depends on empirical knowledge utilizing the skilful experts from the workshop the other is the quantitative method which utilizes the experimental data obtained by sensor. But they are all difficult to accomplish from the grinding trouble-shooting system The reason is that grinding troubles are not accomplish from the grinding trouble-shooting system,. The rason is that grinding troubles are not easily controlled in the quantitative method and therefore trouble-shooting has mainly relied on the knoledge of skiful engineers. Thus there is an important issue of how a grinding touble-shooting system can be designed and what knowledge is utilized among the large amount of grinding trouble information. In this paper basic strategy to develop the grinding database by taking rule-based model which is strongly depended upon experience and intuition is described.

• The Journal of the Korea institute of electronic communication sciences
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• v.16 no.3
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• pp.451-456
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• 2021

In order to improve the cell capacitance and scale down in capacitors of semiconductor memory devices, a stacked ONO structure has been introduced as a dielectric layer and thinning of these layers has been attempted continuously. However, many problems have emerged in the manufacturing process. In this study, L/L LPCVD system was used to suppress the growth of natural oxide film of about 10 Å, which was able to secure the capacitance of 3fF / cell. In addition, we investigated the effect of thinning of the dielectric film on the abnormal oxidation of the nitride film, and proposed a stable process control method for forming the dielectric film to ensure oxidation resistance.

• Journal of Powder Materials
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• v.28 no.5
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• pp.410-416
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• 2021

Ti-6Al-4V alloy has a wide range of applications, ranging from turbine blades that require smooth surfaces for aerodynamic purposes to biomedical implants, where a certain surface roughness promotes biomedical compatibility. Therefore, it would be advantageous if the high volumetric density is maintained while controlling the surface roughness during the LPBF of Ti-6Al-4V. In this study, the volumetric energy density is varied by independently changing the laser power and scan speed to document the changes in the relative sample density and surface roughness. The results where the energy density is similar but the process parameters are different are compared. For comparable energy density but higher laser power and scan speed, the relative density remained similar at approximately 99%. However, the surface roughness varies, and the maximum increase rate is approximately 172%. To investigate the cause of the increased surface roughness, a nonlinear finite element heat transfer analysis is performed to compare the maximum temperature, cooling rate, and lifetime of the melt pool with different process parameters.

• Journal of Ocean Engineering and Technology
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• v.21 no.2 s.75
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• pp.67-74
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• 2007

Maritime and Ocean Engineering Research Institute (MOERI), a branch of KORDI, has designed and manufactured a model of an autonomous underwater vehicle (AUV) named ISiMI (Integrated Submergible for Intelligent Mission Implementation). ISiMI is an AUV platform to satisfy the various needs of experimental test required for development of challenging technologies newly investigated in the field of underwater robot; control and navigational algorithms and software architectures. The main design goal of ISiMI AUV is downsizing which will reduce substantially the operating cost compared to other vehicles previously developed in KORDI such as VORAM or DUSAUV. As a result of design and manufacturing process, ISiMI is implemented to be 1.2 m in length, 0.17 m in diameter and weigh 20 kg in air. A series of tank test is conducted to verify the basic functions of ISiMI in the Ocean Engineering Basin of MOERI, which includes manual control with R/F link, auto depth, auto heading control and a final approach control for underwater docking. This paper describes the implementation of ISiMI system and the experimental results to verify the function of ISiMI as a test-bed AUV platform.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2006.11a
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• pp.347-350
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• 2006

Maritime and Ocean Engineering Research Institute (MOERI), a branch of KORDI, has designed and manufactured a model of an autonomous underwater vehicle (AUV) named ISiMI(Integrated Submergible for Intelligent Mission Implementation). ISiMI is an AUV platform to satisfy the various needs of experimental test required for development of challenging technologies newly investigated in the field of underwater robot; control and navigational algorithms and software architectures. The main design goal of ISiMI AUV is downsizing which will reduce substantially the operating cost compared to other vehicles previously developed in KORDI such as VORAM or DUSAUV. As a result of design and manufacturing process, ISiMI is implemented to be 1.2m in length, 0.17m in diameter and weigh 20 kg in air. A series of tank test is conducted to verify the basic functions of ISiMI in the Ocean Engineering Basin of MOERI, which includes manual control with R/F link, auto depth, auto heading control and a final approach control for underwater docking. This paper describes the implementation of ISiMI system and the experimental results to verify the function of ISiMi as a test-bed AUV platform.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.2
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• pp.261-269
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• 2020

This paper introduces a facility simulation system for efficient error detection of smart factories. The facility simulation system, which can infer and solve errors autonomously when analyzing the relationship between plant facilities, is one of the important technologies for constructing a smart factory with high productivity. In order to implement this autonomic control system, it is necessary to be able to identify the status of facilities and analyze the relationship between facilities through the data of factory facilities. Therefore, in this paper, we design and develop a simulation program that can detect the equipment that causes the process error when an error occurs based on the process scenario using the defined equipment status. The simulation shows that the error inference process based on the process map and facility status is more efficient than the general error inference process. This simulation program provides an intuitive view of the reasoning and resolution of facility failures.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.193-193
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• 2012

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.9
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• pp.92-100
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• 2017

The Helicopter MRA Control Rod System has the important function of controlling the speed, height, and direction of helicoptersby adjusting the main rotor disc. However, the ingress of water into the inner control rod can cause ice damage in the rod during winter operation and also corrosion;these defects need to be rectified. The water flowed into the control rod through the upper side space, and the rod was cracked during icing expansion occurring at low temperature. The corrosion occurred due to the lack of coating process during the manufacturing process. To resolve these problems, the upper rod was sealed to prevent water inflow and a coating process was added to prevent corrosion. These solutions were verified by awaterproof test and a salt fog test. The phenomena, causes and measures were reviewed and the methods of improvement were established and proven. This proposed technology to prevent water infiltration and corrosion will contribute to the safety of rotary wing aircraft.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.777-782
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• 2011

Micro features on the surface are well-known to have significant effects on optical or mechanical properties such as the optical interference, reflectance at the surface, contact angle, interfacial friction, etc. These surface micro features are increasingly employed to enhance the functionality of the applications in various application areas such as optical components for LCD or solar panel. Diverse surface features have been proposed and some of them are showing excellent efficiency or functionality, especially in optical applications. Most applications employing the micro features need manufacturing process for mass production and the injection molding and roll-to-roll forming, which are typical processes for mass production adopting polymeric materials, may be also preferred for micro patterned plastic product. Since the functionality or efficiency of the surface structures generally depends on the shape and the size of the structure itself or the array of the structures on the surface, it would be very important to replicate the features very precisely as being designed during the molding the micro pattern applications. In this paper, a series of research activities is introduced for roll-to-roll forming of micro patterned film including filling of patterns with UV curable resin, demolding of surface structures from the roll tool, control of surface energy and cure shrinkage of resin and dispose time and intensity of the UV light for curing of UV curable resin.