• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.1066-1068
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• 1999

Magnetic field is commonly used in low temperature processing plasmas in order to obtain high density. E $\times$ B magnetron or surface multipole configuration were most popular. However, the properties of capacitively coupled rf plasma confined by axially applied static magnetic fields have rarely been studied. In this paper, the effects of magnetic field on the characteristics of 13.56MHz/40KHz argon plasma will be reported. Ion saturation current, electron temperature and plasma potential were measured by Langmuir probe and omissive probe. At low pressure region ($\sim$10mTorr), ion current was increased by a factor of 3 - 4 due to reduction of diffusion loss of charged particles to the wall. It was observed that magnetic field induces large time variation of the plasma potential. The experimental result was compared with particle-in-cell simulation. It was also observed that electron temperature tend to decrease with increasing magnetic induction level for 40KHz discharge.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.217-217
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• 2011

플라즈마를 이용하는 식각 및 증착등의 반도체공정에 있어서 최근에는 기판의 크기가 점차 증가하는 추세에 있다. 이러한 대면적 플라즈마 발생장치 내에서 플라즈마 밀도와 라디칼 농도의 공간적인 특성을 이해하는 것에 대한 중요성이 더해지고 있다. 이를 위해 Langmuir probe와 같은 전기적 접근법에 의한 진단방법이나 광학적 접근법에 의한 진단방법에 대한 연구가 이루어 졌다. 전기적 접근법에 의한 플라즈마의 진단방법은 원리가 간단하고 정확도가 높다는 장점이 있지만 진단 장치에 의한 플라즈마의 간섭이 크고 식각가스의 경우 진단이 어렵다는 단점이 있다. 그에 비해 광학적 진단방법은 플라즈마에 간섭이 많지 않은 방법으로 알려져 있고 레이저 형광법(LIF), 원적외선 레이저 흡수 분광법(IR laser Absorption Spectroscopy), 광량측정법(Actinometry)등이 있다. 이 중 레이저 형광법, 원적외선 레이저 흡수 분광법의 경우, 진단장치가 매우 복잡하고 가격이 비싸다는 단점을 가지고 있다. 반면 광량측정법의 경우 다른 광학적 접근법에 의한 진단방법에 비해 원리와 실험장치가 간단하고 공간적인 라디칼 분포의 진단이 쉽다는 점에서 장점을 가지고 있다. Actinometry는 Ar과 같은 불활성 기체를 작은 비율을 넣어서 여기 된 불활성 기체의 파장세기와 여기 된 측정 라디칼의 파장세기의 비교를 통해 상대밀도를 측정하는 방법이다. 이 측정 방법에 Abel's inversion equation을 적용함으로 해서 대면적 M-ICP(Magnetized - Induced Coupled Plasma)에서 식각가스인 $CF_4$플라즈마에서 F 라디칼 농도의 공간적인 분포를 측정하고 분석하였다. 또한 플라즈마의 압력, 소스 전력 값과 기판 전력 값등의 조건의 변화에 따라 F 라디칼 농도의 분포가 어떻게 달라지는지에 대해 측정 분석하여 다루었다.

• 한국초전도ㆍ저온공학회논문지
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• 제14권3호
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• pp.60-64
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• 2012

In this paper, an investigation of a room temperature active magnetic regenerative refrigerator is carried out. Experimental apparatus includes two active magnetic regenerators containing 186 g of Gd spheres. Four E-type thermocouples are installed inside the Active magnetic regenerator(AMR) to observe the instantaneous temperature variation of AMR. Both warm and cold heat exchangers are designed for large temperature span. The cold heat exchanger, which separates the two AMRs, employs a copper tube with length of 80 mm and diameter of 6.35 mm. In order to minimize dead volume between the warm heat exchanger and AMRs, the warm heat exchangers are located close to the AMRs. The deionized water is used as a heat transfer fluid, and maximum 1.4 T magnetic field is supplied by Halbach array of permanent magnets. The AMR plate, which contains the warm and the cold heat exchangers and the AMRs, has reciprocating motion using a linear actuator and each AMR is alternatively magnetized and demagnetized by a Halbach array of permanent magnet. Since the gap of the Halbach array of permanent magnets is 25 mm and two warm heat exchangers have the motion through it, a compact printed circuit heat exchanger (PCHE) is used as a warm heat exchanger. A maximum no-load temperature span of 26.8 K and a maximum cooling power of 33 W are obtained from the fabricated Active Magnetic Regenerative Refrigerator (AMRR).

• 천문학회지
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• 제34권4호
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• pp.285-287
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• 2001

We have studied the nonlinear evolution of a magnetized disk of isothermal gas, which is sustained by its self-gravity. Our objective is to investigate how the Jeans, Parker, and convective instabilities compete with each other in structuring/de-structuring large scale condensations in such disk. The Poisson equation for the self-gravity has been solved with a fourth-order accurate Fourier method along with the Green function, and the MHD part has been handled by an isothermal TVD code. When large wavelength perturbations are applied, the combined action of the Jeans and Parker instabilities suppresses the development of the convection and forms a dense core of prolate shape in the mid-plane. Peripheral structures around it are filamentary. The low density filaments connect the dense core to the diffuse upper region. On the other hand, when small wavelength perturbations are applied, the disk develops into an equilibrium state which is reminiscent of the Mouschovias's 2-D non-linear equilibrium of the classical Parker instability under an externally given gravity.

• 천문학회지
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• 제37권4호
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• pp.249-255
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• 2004

Here we present a linear stability analysis and an MHD 2D model for the Parker-Jeans instability in the Galactic gaseous disk. The magnetic field is assumed parallel to a Galactic spiral arm, and the gaseous disk is modelled as a multi-component, magnetized, and isothermal gas layer. The model employs the observed vertical stratifications for the gas density and the gravitational acceleration in the Solar neighborhood, and the self-gravity of the gas is also included. By solving Poisson's equation for the gas density stratification, we determine the vertical acceleration due to self-gravity as a function of z. Subtracting it from the observed gravitational acceleration, we separate the total acceleration into self and external gravities. The linear stability analysis provides the corresponding dispersion relations. The time and length scales of the fastest growing mode of the Parker-Jeans instability are about 40 Myr and 3.3 kpc, respectively. In order to confirm the linear stability analysis, we have performed two-dimensional MHD simulations. These show that the Parker-Jeans instability under the self and external gravities evolves into a quasi-equilibrium state, creating condensations on the northern and southern sides of the plane, in an alternate manner.

• 천문학회보
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• 제36권2호
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• pp.107.2-107.2
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• 2011

Most astrophysical systems are turbulent and magnetized. Magnetic field plays an important role in the dynamics of astrophysical system and influence all of properties of astrophysical system. Therefore, information of magnetic field is very important to understand properties of astrophysical system. One way to obtain information of magnetic field is to use rotation measure. Mean strength of the magnetic field along the line of sight can be estimated from RM/DM, where RM is rotation measure and DM is dispersion measure. For the estimation of magnetic field strength using RM/DM, the correlation between density and magnetic field. When there is no correlation between density and magnetic field the relation gives exact mean magnetic strength. But if the positive correlation, it overestimates the magnetic field strength, while if the correlation is negative, it underestimate the magnetic field strength. In general, the ICM (intracluter medium) and the ISM (interstellar medium) cases, viscosity has a value greater than magnetic diffusion. We performed compressible MHD turbulence simulations and we studied correlation between density and magnetic field in different values of viscosity and magnetic diffusion. In most cases, we found weak or negative relations between the density and magnetic fields. We discuss implication of our results.

• 천문학회보
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• 제36권2호
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• pp.82.2-82.2
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• 2011

Major solar eruptive events, consisting of both a large flare and a near simultaneous fast coronal mass ejection (CME), are the most powerful explosions in the solar system, releasing $10^{32}-10^{33}$ ergs in ${\sim}10^{3-4}\;s$. They are also the most powerful and energetic particle accelerators, producing ions up to tens of GeV and electrons up to hundreds of MeV. For flares, the accelerated particles often contain up to ~50% of the total energy released, a remarkable efficiency that indicates the particle acceleration is intimately related to the energy release process. Similar transient energy release/particle acceleration processes appear to occur elsewhere in the universe, in stellar flares, magnetars, etc. Escaping solar energetic particles (SEPs) appear to be accelerated by the shock wave driven by the fast CME at altitudes of ~1 40 $R_s$, with an efficiency of ~10%, about what is required for supernova shock waves to produce galactic cosmic rays. Thus, large solar eruptive events are our most accessible laboratory for understanding the fundamental physics of transient energy release and particle acceleration in cosmic magnetized plasmas. They also produce the most extreme space weather - the escaping SEPs are a major radiation hazard for spacecraft and humans in space, the intense flare photon emissions disrupt GPS and communications on the Earth, while the fast CME restructures the interplanetary medium with severe effects on the magnetospheres and atmospheres of the Earth and other planets. Here I review present observations of large solar eruptive events, and future space and ground-based measurements needed to understand the fundamental processes involved.

• KIEE International Transactions on Electrophysics and Applications
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• 제3C권5호
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• pp.182-188
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• 2003

We have demonstrated a fluidic technique for self-assembly of microfabricated parts onto substrate using patterned shapes of magnetic force self-assembled monolayers (SAMs). The metal particles and the array were fabricated using the micromachining technique. The metal particles were in a multilayer structure (Au, Ti, and Ni). Sidewalls of patterned Ni dots on the array were covered by thick negative photoresist (SU-8), and the array was magnetized. The array and the particles were mixed in buffer solution, and were arranged by magnetic force interaction. Binding direction of the metal particle onto Ni dots was controlled by multilayer structure and direction of magnetization. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost even with the Au surface on top. The particles were successfully arranged on the array.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제50권7호
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• pp.315-322
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• 2001

High speed brushless permanent magnet(PM) machines need a key technology to minimize the iron core losses in stator and the eddy current losses in the retained sleeve and magnets caused by slotting harmonics. Thus, slotless or iron-coreless brushless PM machines have been applied for a very high rotational speed and/or the ripple-free torque. Unfortunately, slotless or coreless PM machines have lower open-circuit field than slotted and/or iron-cored types, which cause to reduce power density. Fortunately, Halbach array can generate the strong magnetic field systems without additional magnetic materials. In this paper, the 4-pole Halbach array is applied to the high speed machine and is compared with the radial magnetized PM array in field system. The iron-/air-cored stator of PM machine is constructed with/without winding slots. Open circuit magnetic fields of each type are presented from the analytical method and finite element method. Consequently, it is confirmed that the Halbach array field system with slotless stator is more suitable to the high speed motor because it has high flux density, sinusoidal flux distribution than others.

• 한국자기학회지
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• 제16권3호
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• pp.173-177
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• 2006

수직자기이방성을 갖는 [Pd/Co] 다층박막으로 구성된 스핀밸브 구조에서 비자성층(space layer, SL) Pd 또는 Cu의 두께와 다층박막의 반복층수 N에 따른 자기저항효과의 의존성을 연구하였다. 비자성층을 Pd보다 Cu로 사용하였을 때 더 큰 자기저항비를 얻었다. 그리고 Cu층과 고정층 사이에 Co층을 삽입하는 경우 약 3배가량 자기저항비가 증가하는 것을 관찰하였다. $Ta_{(2.1nm)}/[Pd_{(0.61)}/Co_{(0.23)}]_4/Cu_{(2.37)}/Co_{(t)}/[Pd_{(0.61)}/Co_{(0.23)}]_2/FeMn_{(10.6)}/Ta_{(2.1)}$ 구조에서 삽입된 Co층의 두께가 0.62nm 또는 1.01nm에서 최대의 자기저항비 7.4%를 얻었다.