• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.226-233
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• 2003

There are many researches going on to develop the information storage devices using Blue-ray disc and DVD as a demand for high-density information storage devices is highly increasing. This high-density information storage device requires a short-wave laser and objective lens of high numerical aperture set in fer its operation. And, that brings out rapid decrease of tilt tolerance. Therefore, it is necessary that an actuator should control tilt motions to get a stable signal. In this paper, a new mathematical form of 3-D.O.F coupled model is formulated and magnetic circuit in constraints is most effectively designed with the use of the moving coil type actuator in higher sensitivity. Further, this paper presents a tilt coil whose rotational center point is put on that of the lens through the variation of tilt coil and proposes a 3-axis actuator with high sensitivity improved in its dynamic property through its structure analysis.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.153-158
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• 2007

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.6
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• pp.547-554
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• 2014

CVD SiC is a perfect material used for molds/dies in hot press molding of glass lens. In its fabrication process, nano-precision polishing is essential finally. For this purpose, a novel polishing method using MCF (Magnetic Compound Fluid) slurry is proposed. In this method, MCF slurry is supplied into a given gap between the workpiece and a MCF slurry carrier, and constrained within the polishing zone by magnetic forces from permanent magnet. In this paper, after an experimental rig used to actually realize the proposed method has been constructed, the fundamental polishing characteristics of CVD SiC such as the effects of process parameters including MCF slurry composition on work-surface roughness were experimentally investigated. As a result, nano-precision surface finish of CVD SiC was successfully attained with MCF slurry and the optimum process parameters for obtaining the smoothest work-surface were determined.

• Journal of Mechanical Science and Technology
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• v.20 no.12
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• pp.2087-2093
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• 2006

In this paper, auto focus actuator, which is used to move a lens module in the mobile phone having a camera module, is developed. Camera module containing auto focus actuator requires to minimize total size because of characteristics of the application area such as mobile phone, digital camera, and personal digital assistant. There are stepping motor, voice coil motor, and piezoelectric motor as auto focus actuator. In this paper, voice coil motor having new electromagnetic configuration is proposed. And actuator using proposed voice coil motor is developed by optimal design method using magnetic circuit analysis. The sectional area of the developed actuator is reduced to 32.4% compared with actuator using general electromagnetic configuration. From the performance test, the developed actuator has moving stroke of 0.64 mm for 2.1 volt, hysteresis of 40 $\mu$m, full stroke current of 54 mA, and unit step motion of 3 $\mu$m.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.149-154
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• 2004

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the relationship of transporting speed according to the change of flexural beam shape and the effect of transporting speed according to the change of weight and amplification voltage are verified. The vibration behavior of flexural beam in the ultrasonic transport system is experimented using Laser Scanning Vibrometer.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.155-158
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the vibration behavior of flexural beam in the ultrasonic transport system is verified using Laser Scanning Vibrometer. The experiments for verifying vibration are performed in three conditions such as in the maximum transport speed, in the zero speed, and in the change of transport direction.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.25-29
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified and the system performance for practical use is evaluated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1170-1173
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches, the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. the experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of amplification voltage is verified. In addition, the system performance for actual use is evaluated

• Journal of the Korean Society for Precision Engineering
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• v.22 no.8 s.173
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• pp.151-158
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• 2005

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding systems is required. The sliding systems are driven by the magnetic field and conveyer belts. The magnetic field nay damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, an object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal progressive frequency and the phase-differences between two ultrasonic wave generators are performed. The relationships between transportation speed and the excitation frequency, flexural beam shapes and amplification voltage are investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1840-1843
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• 2003

The Magnetorheological fluid has the properties that its viscosity has drastic changed under some magnetic fields therefore, Magnetorheological fluids has been used for micro polishing of the micro part( for example, a aspherical surface in a micro lens). The polishing process may appears as follows. A part rotating on the spindle is brought into contact with an Magnetorheological finishing(MRF) fluids which is set in motion by the moving wall. In the region where the part and the MRF fluid ate brought into contact, the applied magnetic field creates the conditions necessary for the material removal from the part surface. The material removal takes place in a certain region contacting the surface of the part which can be called the polishing spot or zone. The polishing mechanism of the material removal in the contact zone is considered as a process governed by the particularities of the Bingham flow in the contact zone. Resonable calculated and experimental magnitudes of the material removal rate for glass polishing lends support the validity of the approach.