• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.11a
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• pp.126-129
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• 2010

MEMS(micro electro-mechanical systems) inertial switch which is applicable to the ignition Safe-Arm- Unit of propulsion system is devised. The MEMS inertial switch is designed according to the general design procedure for conventional mechanical elements. Unlikely conventional MEMS accelerometer, threshold inertial switching mechanism is adopted which makes a MEMS element an abrupt switching in a certain acceleration level. By comparing the design data and test results of the specimen a small discrepancy in switching acceleration level is found which is presumably due to the nonlinear characteristics of the beam spring and the flexure hinge which are the main parts of the MEMS inertial switch.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.10
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• pp.499-503
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• 2006

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method with respect to the offset voltage and sensitivity of a accelerometer. Experimental results on the developed clinometer show that the proposed clinometer can provide useful information on the tilt angle and direction of an inclined plane.

• Journal of the Korea institute for structural maintenance and inspection
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• v.19 no.4
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• pp.43-48
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• 2015

In this study, a method to enhance the dynamic range of seismic sensor is proposed. The low frequency noise included in the measurement of seismic sensor is modelled as an ARMA(Auto Regressive Moving Average) model and the order and parameters of the model are identified through system identification method. The identified noise model is augmented into Kalmman filter which estimate seismic signal from sensor measurement. The proposed method is applied to a newly developed seismic sensor which is MEMS based 3-axis accelerometer type. The experiment show that the proposed method can enhance the dynamic range compared to the simple low pass filtering.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.58-66
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• 2005

Inertial-grade vertical-type and lateral-type differential resonant accelerometers (DRXLs) are designed, fabricated using one process and tested for navigational applications. The accelerometers consist of an out-of-plane (for z-axis) accelerometer and in-plane (for x, y-axes) accelerometers. The sensing principle of the accelerometer is based on gap-sensitive electrostatic stiffness changing effect. It says that the natural frequency of the accelerometer can be changed according to an electrostatic force on the proof mass of the accelerometer. The out-of-plane resonant accelerometer shows bias stability of $2.5{\mu}g$, sensitivity of 70 Hz/g and bandwidth of 100 Hz at resonant frequency of 12 kHz. The in-plane resonant accelerometer shows bias stability of $5.2{\mu}g$, sensitivity of 128 Hz/g and bandwidth of 110 Hz at resonant frequency of 23.4 kHz. The measured performances of two accelerometers are suitable for an application of inertial navigation.

• International Journal of Control, Automation, and Systems
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• v.5 no.1
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• pp.35-42
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• 2007

This paper presents an INS(Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer(DRXL) manufactured by an epitaxially grown thick poly silicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 Hz/g and its long term bias stability is about 2 mg($1{\sigma}$) with dynamic range of ${\sigma}70g$.

• Journal of the Korean Society of Mechanical Technology
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• v.13 no.4
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• pp.93-99
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• 2011

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

• Journal of Positioning, Navigation, and Timing
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• v.8 no.3
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• pp.107-117
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• 2019

When a vehicle moves with a high rotation rate, it is not easy to measure the angular velocity using an off-the-shelf gyroscope. If the angular velocity is estimated using the extended Kalman filter in the gyro-free inertial navigation system, the effect of the accelerometer error and initial angular velocity error can be reduced. In this paper, in order to improve the navigation performance of the gyro-free inertial navigation system, an angular velocity estimation method is proposed based on an extended Kalman filter with an accelerometer random bias error model. In order to show the validity of the proposed estimation method, angular velocities and navigation outputs of a vehicle with 3 rev/s rotation rate are estimated. The results are compared with estimates by other methods such as the integration and an extended Kalman filter without an accelerometer random bias error model. The proposed method gives better estimation results than other methods.

• Journal of Korea Society of Digital Industry and Information Management
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• v.18 no.4
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• pp.47-54
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• 2022

In this paper, MEMS embedded system design implemented the sensor events via analyzing the characteristics that dynamically happened to an abnormal status in power IoT environments in order to guarantee a maintainable operation. We used three kinds of tools in this paper, at first Bluetooth Low Energy (BLE) technology which is a suitable protocol that provides a low data rate, low power consumption, and low-cost sensor applications. Secondly LSM6DSOX, a system-in-module containing a 3-axis digital accelerometer and gyroscope with low-power features for optimal motion. Thirdly BM1422AGMV Digital Magnetometer IC, a 3-axis magnetic sensor with an I2C interface and a magnetic measurable range of ±120 uT, which incorporates magneto-impedance elements to detect the magnetic field when the current flowed in the power devices. The proposed MEMS system was developed based on an nRF5340 System on Chip (SoC), previously compared to the standalone embedded system without bluetooth technology via mobile App. And also, MEMS embedded system with BLE 5.0 technology broadcasted the MEMS system status to Android mobile server. The experiment results enhanced the performance of MEMS system design by combination of sensors, BLE technology and mobile application.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.79-79
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• 2000

In this Paper, the PC input device using MEMS gyros and accelerometer is newly developed, so that it can measure rotation rate and linear acceleration of the human body in space. In General, the human motion has 6 degree of freedom but 2 degree of freedom is enough PC monitor with 2D display. Therefore the simple method is proposed to achieve minimum degree of freedom. It is also applied to the PC mouse. This method can be expanded to the input device for internet set-top box or internet TV.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.91.6-91
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• 2002

$\textbullet$ Simulation of the effect of external vibration on optical disk pickups.$\textbullet$ Vibration effect is cancelled with aceeleration feedforward. $\textbullet$ MEMS accelerometers are small enough not to require any mechanical design modification. $\textbullet$ LQR, LQG, and SMC type controllers are designed. $\textbullet$ With the feedforward, transmissibility is reduced significantly. $\textbullet$ Time domain simulation confirms the performance enhancement. $\textbullet$ The resultant system shows excellent command following characteristics as well.