• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.282-283
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• 2007

본 논문에서는 저전압에서 구동 할 수 있는 압전구동 방식의 RF MEMS 스위치를 설계하였다. 설계는 유한요소기법(FEM)을 지원하는 시뮬레이터 (ConventorWare)를 사용하여 수행하였고, 이를 바탕으로 deflection, contact force, stress 등 기계적인 해석을 함으로써 최적화된 설계를 할 수 있었다. 이번 설계에서는 적절한 contact force를 유지하면서 hinge에서 받는 stress를 최소화하기 위하여 구동기를 2개 사용한 듀얼형식의 모델을 제안하였고, hinge의 모양은 'ㄷ'로 하여 deflection을 향상시켰다. 이 듀얼형식의 최적화된 모델은 signal line과 contact pad 간의 gap이 3.4${\mu}m$일 때, 최초 2.8V에서 contact이 이루어졌으며, 5V에서 12.4${\mu}N$의 contact force와 116MPa의 stress를 얻었고, 차후, SP4T나 SP6T 등의 설계시 공간 효율이 높은 다양한 형태의 구조를 설계할 수 있다.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1969-1971
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• 2002

This paper presents the design and performance of low pull-in voltage MEMS switches for commercial cellular/PCS applications. The switches have all-metal (3 ${\mu}m$ thick Au) movable plates over CPW(Coplanar Waveguide) transmission line. The stress gradient in a movable plate is considered in mechanical design to obtain an accurate pull-in voltage. Series metal-to-metal contact switches are fabricated and evaluated. Those switches exhibit the low loss(<0.2 dB @1.9 GHz) with good isolation(55 dB @1.9 GHz).

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1511_1512
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• 2009

This paper presents a polarization switching antenna integrated with silicon RF MEMS SPDT switches in the form of a package. A low-loss quartz substrate made of SoQ (silicon-on-quartz) bonding is used as a dielectric material of the patch antenna, as well as a packaging lid substrate of RF MEMS switches. The packaging/antenna substrate is bonded with the bottom substrate including feeding lines and RF MEMS switches by BCB adhesive bonding, and RF energy is transmitted from signal lines to antenna by slot coupling. Through this approach, fabrication complexity and degradation of RF performances of the antenna due to the parasitic effects, which are all caused from the packaging methods, can be reduced. This structure is expected to be used as a platform for reconfigurable antennas with RF MEMS tunable components. A linear polarization switching antenna operating at 19 GHz is manufactured based on the proposed method, and the fabrication process is carefully described. The s-parameters of the fabricated antenna at each state are measured to evaluate the antenna performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.613-614
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.511-512
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• 2012

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.163-170
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• 2006

By removing sacrificial layer through ashing process, movable MEMS structure on substrate can be fabricated in surface micromachining. However, MEMS structure includes, during the ashing process, the warping or buckling effects due to stress gradient along the vertical direction of thin film. In this study, we presented method for counteracting the unwanted deflection of MEMS structure and designed using character of deposit process to overcome limited design conditions. Unit cell patterns were designed with character of deposit shape, and their final shapes were adopted using Finite Element Method. Finally, RF MEMS switch was fabricated by surface micro machining as test vehicles. We checked out that alleviation effect for deformation of switch improved by 35%.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.203-209
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• 2004

Compliant bi-stable mechanism allows two stable states within its operation range staying at one of the local minimum states of the potential energy. Energy storage characteristics of the bi-stable mechanism offer two distinct and repeatable stable states, which require no power input to maintain it at each stable state. This paper suggests an equivalent model of the chevron-type bi-stable microactuator using the equivalent spring stiffness in the rectilinear and the rotational directions. From this model the range of spring stiffness where the bi-stable mechanism can be operated is analyzed and compared with the results of the FEA (Finite Element Analysis) using ANSYS for the buckling analysis, both of which show a good agreement. Based on the analysis, a newly designed chevron-type bi-stable MEMS actuator using hinges is suggested for the latch-up operation. It is found that the experimental response characteristics of around 36V for the bi-stable actuation for the 60$mu extrm{m}$ stroke correspond very well to the results of the equivalent model analysis after the change in cross-sectional area by the fabrication process is taken into account. Together with the resonance frequency experiment where 1760Hz is measured, it is shown that the chevron-type bi-stable MEMS actuator using hinges is applicable to the optical switch as an actuator.

• Electrical & Electronic Materials
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• v.21 no.8
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• pp.3-10
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• 2008

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2002.11a
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• pp.34-38
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• 2002

기존에 제안된 도파관 스위치의 경우, 도파관의 E-plane에 PBG 기판을 내장하게 되는데, 이 경우 PBG 기판의 저항값을 조절해주는 MEMS 스위치의 바이어스 라인에 대한 문제점이 발생한다 본 논문에서는 PBG 기판을 도파관의 H-plane에 놓음으로써 바이어스 라인을 RF로부터 쉽게 분리하고, 또한 단일 공진 주파수를 갖는 PBG의 경우에 제한된 기판의 길이로 인하여 bandwidth가 좁아지는 문제점을 서로 다른 공진 주파수를 갖는 PBG 기판의 연결을 통해서 bandwidth를 약 80%이상 증가시킬 수 있음을 보였다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.11a
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• pp.282-285
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• 2009

Ignition Safe-Arm-Unit using micro-electromechanical systems(MEMS) for propulsion system was designed and manufactured. MEMS was designed according to the design schemes for conventional mechanical elements. By comparing the design results and the test data of the prototype, small discrepancy was found, which is due to the nonlinear characteristic of the structure and the machining accuracy. The applicability of MEMS for Safe-Arm-Unit was proved by testing MEMS which is assembled into SAU.