Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Low Pull-in Voltage MEMS Switches for Wireless Applications

저전압구동 무선통신용 MEMS 스위치

  • Shim, Dong-Ha (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Lee, Moon-Chul (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Lee, Eun-Sung (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Park, Sun-Hee (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Kim, Young-Il (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Song, In-Sang (MEMS Lab., Samsung Advanced Institute of Technology)
  • 심동하 (삼성종합기술원 MEMS Lab.) ;
  • 이문철 (삼성종합기술원 MEMS Lab.) ;
  • 이은성 (삼성종합기술원 MEMS Lab.) ;
  • 박선희 (삼성종합기술원 MEMS Lab.) ;
  • 김영일 (삼성종합기술원 MEMS Lab.) ;
  • 송인상 (삼성종합기술원 MEMS Lab.)
  • Published : 2002.07.10
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Abstract

This paper presents the design and performance of low pull-in voltage MEMS switches for commercial cellular/PCS applications. The switches have all-metal (3 ${\mu}m$ thick Au) movable plates over CPW(Coplanar Waveguide) transmission line. The stress gradient in a movable plate is considered in mechanical design to obtain an accurate pull-in voltage. Series metal-to-metal contact switches are fabricated and evaluated. Those switches exhibit the low loss(<0.2 dB @1.9 GHz) with good isolation(55 dB @1.9 GHz).

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