• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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• pp.781-784
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• 2002

Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.

• 대한금속재료학회지
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• 제48권2호
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• pp.169-174
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• 2010

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

• 한국항공우주학회지
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• 제36권1호
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• pp.7-13
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• 2008

본 논문에서는 유한요소법을 기반으로 한 소프트웨어 COMSOL Multiphysics를 이용하여 압전 복합재료 작동기를 이용하여 제작한 무밸브 마이크로펌프의 성능을 연구하였다. 압전 마이크로펌프는 4층의 경량 압전 복합재료 작동기, PDMS으로 된 챔버와 2개의 디퓨저로 이루어졌다. 시뮬레이션에서는 압전 재료 영역, 구조 영역과 유체 영역을 완전 연성하여 해를 계산하였다. 물을 유체로 사용하였으며, 유량을 마이크로펌프의 구조적 파라미터에 대하여 계산하였다. 이 연구에 기초하여 보다 성능이 좋은 마이크로펌프를 제시하였다.

• 한국항해항만학회지
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• 제37권6호
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• pp.575-580
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• 2013

IMU(Inertial Measurement Unit)는 선박, 잠수함, 항공기 및 군용장비 응용분야에서 적용되어 자세 측정 영역에 주로 사용되고 있지만, 이런 IMU는 고가의 장비이기 때문에 특수 분야에서만 한정적으로 이용되어 왔다. 그러나 MEMS AHRS(MEMS : Micro Electro Mechanical System, AHRS : Attitude and Heading Reference System)의 현 기술 상황은 지능형 MEMS AHRS가 채택된 응용분야에서 가격이 높은 IMU를 대체 할 수 있는 수준에 이르고 있다. 본 논문에서는 자이로 센서, 가속도 센서, 지자기 센서를 사용한 AHRS를 이용하여 선박의 주요 운동 요소인 횡동요, 종동요, 선수동요 값을 측정할 수 있는 무선 선체 운동 측정 시스템을 개발하였다. 또한 AHRS 센서가 발생시키는 오차인 순간 가속도, 지자기의 영향 및 진동에 대응하기 위하여 칼만 필터링 기능이 탑재된 센서를 적용함으로서 최적의 성능을 실현하고자 하였다. 본 연구에서 구현한 AHRS 센서를 이용한 무선 선체 운동 측정 시스템을 이용하여 실선 실험을 실행하였으며, 선박의 제한적인 설치 상황에서도 편리하게 적용할 수 있을 것으로 보여진다. 향후 이 시스템이 선박에서 INS(Integrated Navigation System) 및 VDR(Voyage Data Recorder)과 같은 선박 장비와 호환되어 활용될 경우 항해 안전과 해양사고 분석에 유용하게 사용될 수 있을 것으로 판단된다.

• 센서학회지
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• 제20권6호
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• Journal of Information Processing Systems
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• 제1권1호
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• pp.49-54
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• 2005

With the recent advances in Micro Electro Mechanical System (MEMS) technology, low cost and low power consumption wireless micro sensor nodes have become available. However, energy-efficient routing is one of the most important key technologies in wireless sensor networks as sensor nodes are highly energy-constrained. Therefore, many researchers have proposed routing protocols for sensor networks, especially cluster-based routing protocols, which have many advantages such as reduced control messages, bandwidth re-usability, and improved power control. Some protocols use information on the locations of sensor nodes to construct clusters efficiently. However, it is rare that all sensor nodes know their positions. In this article, we propose another cluster-based routing protocol for sensor networks. This protocol does not use information concerning the locations of sensor nodes, but uses the remaining energy of sensor networks and the desirable number of cluster heads according to the circumstances of the sensor networks. From performance simulation, we found that the proposed protocol shows better performance than the low-energy adaptive clustering hierarchy (LEACH).

• 한국지구과학회지
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• 제34권6호
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• pp.588-601
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• 2013

최근 지구물리 물리탐사 분야에서 경사각과 방위각 정보는 시추공 물리검층 및 물리탐사 자료보정을 위한 시추공 편차검층, 이동형 실시간 자료획득 시스템, 기타 지구물리 모니터링 시스템 등 다양하게 활용되면서 그 중요성이 높아지고 있다. 특히 최근 셰일가스의 개발이 가능하게 한 방향시추 기술에서도 경사각과 방위각 정보는 필수일 정도로 그 응용범위가 매우 넓다. 따라서 여러 분야에 응용될 수 있는 경사각과 방위각 측정 시스템의 초소형 옥외 저전력 운용이 절실해졌다. 본 논문에서는 최신 CMOS 저전력, 고성능 MCU 및 멤스(MEMS) 자세방위기준장치(AHRS)를 도입하여 초소형, 저전력으로 제작된 다용도 야외시험용 실시간 경사각과 방위각 연속 측정 시스템 개발 연구의 결과를 제시하고자 한다. 시스템은 최소 지름 42 mm의 존데 내에 설치될 수 있도록 초슬림 형태로 제작되었으며 실시간 데이터 획득이 가능할 뿐만 아니라 엔코더, DGPS 연동으로 운용 확장이 가능하여 다양한 응용이 기대된다.

• 대한임베디드공학회논문지
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• 제17권4호
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• pp.239-247
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• 2022

The existing studies on the localization in the GNSS (Global Navigation Satellite System) denied environment usually exploit low-cost MEMS IMU (Micro Electro Mechanical Systems Inertial Measurement Unit) sensors to replace the GNSS signals. However, the navigation system still requires GNSS signals for the normal environment. This paper presents an integrated GNSS/INS (Inertial Navigation System) navigation system which combines GNSS and multiple IMU sensors using extended Kalman filter in partially GNSS-denied environments. The position and velocity of the INS and GNSS are used as the inputs to the integrated navigation system. The Mahalanobis distance is used for novelty detection to detect the outlier of GNSS measurements. When the abnormality is detected in GNSS signals, GNSS data is excluded from the fusion process. The performance of the proposed method is evaluated using MATLAB/Simulink. The simulation results show that the proposed algorithm can achieve a higher degree of positioning accuracy in the partially GNSS-denied environment.

• 소성∙가공
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• 제14권5호
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• 한국전기전자재료학회논문지
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• 제24권6호
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• pp.433-439
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• 2011

Poly Si TFTs (poly silicon thin film transistors) with p channel those are annealed HT (high temperature) with gate poly crystalline silicon and LT (low temperature) with metal gate electrode were fabricated on quartz substrate using the analyzed data and compared according to the activated grade silicon thin films and the size of device channel. The electrical characteristics of HT poly-Si TFTs increased those are the on current, electron mobility and decrease threshold voltage by the quality of particles of active thin films annealed at high temperature. But the on/off current ratio reduced by increase of the off current depend on the hot carrier applied to high gate voltage. Even though the size of the particles annealed at low temperature are bigger than HT poly-Si TFTs due to defect in the activated grade poly crystal silicon and the grain boundary, the characteristics of LT poly-Si TFTs were investigated deterioration phenomena those are decrease the electric off current, electron mobility and increase threshold voltage. The results of transconductance show that slope depend on the quality of particles and the amplitude depend on the size of the active silicon particles.