• 한국구조물진단유지관리공학회 논문집
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• 제18권1호
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• pp.160-165
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• 2014

본 연구에서는 MEMS 기반 3축 가속도 센서 모듈을 제작하여 성능 시험을 수행하였고, 지진 모니터링 시스템을 구성하였다. 3축 가속도 센서 모듈의 성능 향상을 위하여 데이터 수집장치를 24bit ADC (Analog to Digital Converter)가 내장된 NI-9239를 사용하였고, 잡음을 줄이기 위해 100Hz LPF (Low Pass Filter)를 통과시킨 데이터를 사용하였다. 또한 지진 모니터링 소프트웨어를 개발하여 구조물에 유의한 진동을 감지하는데 초점을 맞추었다. 진동을 감지하기 위한 방법으로 각 축의 가속도 크기 뿐만 아니라 3축 가속도의 벡터 합을 구하여 이 벡터 합이 미리 설정한 값을 초과할 때의 수치를 별도로 표시하고 이를 파일로 저장하는 알고리즘을 사용하였다.

• 폴리머
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• 제28권1호
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• pp.3-9
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• 2004

미세전자-기계계 (MEMS)의 윤활 막으로 적용되는 자체조립 단일막 (SAMs) 형성을 위하여 실란 변성 퍼플루오로폴리에테르 (SPFPE)를 합성하고 이를 실리콘 표면에 코팅하여, 형성된 SAMs에 의한 표면 특성 변화를 기존의 퍼플루오로폴리에테르 (PFPE), 옥타데실트리클로로실란 (OTS), 그리고 퍼플루오로옥틸트리클로로실란 (FOTS) SAMs와 비교 검토하였다. SPFPE에 의해 형성된 SAMs는 실리콘 표면과의 느린 반응성에 의하여 OTS와 FOTS와 비교하여 상대적으로 낮은 소수성을 가지나 열처리에 의하여 이들과 비슷한 소수성을 보였다. SPFPE에 의하여 형성된 SAMs 표면은 OTS와 FOTS와 유사한 0.3 nm의 표면 거칠기를 가지나 상대적으로 유연한 PFPE 주사슬의 움직임으로 인하여 OTS에 비하여 50% 정도 마찰력이 줄어드는 우수한 마찰 특성을 보였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.387-390
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• 2002

SiC direct bonding technology is very attractive for both SiCOI(SiC-on-insulator) electric devices and SiC-MEMS(micro electro mechanical system) fields because of its application possibility in harsh environments. This paper presents pre-bonding techniques with variation of HF pre-treatment conditions for 2 inch SiC wafer direct bonding using PECVD(plasma enhanced chemical vapor deposition) oxide. The PECVD oxide was characterized by XPS(X-ray photoelectron spectrometer) and AFM(atomic force microscopy). The characteristics of the bonded sample were measured under different bonding conditions of HF concentration and an applied pressure. The bonding strength was evaluated by the tensile strength method. The bonded interface was analyzed by using IR camera and SEM(scanning electron microscope). Components existed in the interlayer were analyzed by using FT-IR(fourier transform infrared spectroscopy). The bonding strength was varied with HF pre-treatment conditions before the pre-bonding in the range of $5.3 kgf/cm^2$ to $15.5 kgf/cm^2$

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.467-470
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• 2004

Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

• 센서학회지
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• 제21권3호
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• pp.217-222
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• 2012

Optical coherence tomography(OCT) is a noninvasive optical imaging tool for biomedical applications. OCT can provide depth resolved two/three dimensional morphological images on biological samples. In this paper, we integrated an OCT system that was composed of an SLED(Superluminescent Light Emitting Diode, ${\lambda}_0$=1305 nm bandwith= 141 nm), a reference arm adopting a rapid scanning optical delay line(RSOD) to get high speed imaging, and a sample arm that used a micro electro mechanical systems(MEMS) scanning mirror. The sample arm contained a compact probe for imaging dental structures. The performance of the system was evaluated by imaging in-vivo human teeth with dental calculus, and the results indicated distinct appearance of dental calculus from enamel, gum or decayed teeth. The developed probe and system could successfully confirm the presence of dental calculus with a very high spatial resolution($6{\mu}m$).

• Smart Structures and Systems
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• 제11권5호
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• pp.453-476
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• 2013

DuraMote is a remote sensing system developed for the "NIST TIP project: next generation SCADA for prevention and mitigation of water system infrastructure disaster". It is designed for supervisory control and data acquisition (SCADA) of ruptures in water pipes. Micro-electro mechanical (MEMS) accelerometers, which record the vibration of the pipe wall, are used detect the ruptures. However, the performance of Duramote cannot be verified directly on a water distribution system because it lacks an acceptable recordable level of ambient vibration. Instead, a long-span cable-stayed bridge is an ideal test-bed to validate the accuracy, the reliability, and the robustness of DuraMote because the bridge has an acceptable level of ambient vibration. The acceleration data recorded on the bridge were used to identify the modal properties of the structure and to verify the performance of DuraMote. During the test period, the bridge was subjected to heavy rain, wind, and a typhoon but the system demonstrates its robustness and durability.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 한국소음진동공학회논문집
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• 제20권2호
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• pp.166-171
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• 2010

Wired monitoring systems have been used for damage detection and dynamic analysis of large structures(bridges, dams, plants, etc.). However, the real-world applications still remain limited, mainly due to time and cost issues inherent to wired systems. In recent years, an increasing number of researchers have adopted WSN(wireless sensor network) technologies to the field of SHM(structural health monitoring). Accurate time synchronization is most critical for the wireless approach to be feasible for SHM purpose, along with sufficient wireless bandwidth and highly precise measuring resolution. To satisfy technical criteria stated above, a wireless vibration monitoring system that uses high-precision MEMS(micro-electro-mechanical system) sensors and A/D convertor is discussed in detail. It was found experimentally that the level of time synchronization fell within $200\;{\mu}sec$.

• Smart Structures and Systems
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• 제6권5_6호
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• pp.545-559
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• 2010

This paper presents the results of a pilot study and verification of a concept of a novel methodology for damage detection and assessment of water distribution system. The unique feature of the proposed noninvasive methodology is the use of accelerometers installed on the pipe surface, instead of pressure sensors that are traditionally installed invasively. Experimental observations show that a sharp change in pressure is always accompanied by a sharp change of pipe surface acceleration at the corresponding locations along the pipe length. Therefore, water pressure-monitoring can be transformed into acceleration-monitoring of the pipe surface. The latter is a significantly more economical alternative due to the use of less expensive sensors such as MEMS (Micro-Electro-Mechanical Systems) or other acceleration sensors. In this scenario, monitoring is made for Maximum Pipe Acceleration Gradient (MPAG) rather than Maximum Water Head Gradient (MWHG). This paper presents the results of a small-scale laboratory experiment that serves as the proof of concept of the proposed technology. The ultimate goal of this study is to improve upon the existing SCADA (Supervisory Control And Data Acquisition) by integrating the proposed non-invasive monitoring techniques to ultimately develop the next generation SCADA system for water distribution systems.

• Journal of Electrical Engineering and Technology
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• 제9권3호
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• pp.950-956
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• 2014

Special purpose sensor design using MEMS (Micro-Electro-Mechanical Systems) technique is commonly used in Nondestructive Testing (NDT) research for the evaluation of existing structures and for the safety control and requirements. Various sensors and network have been developed for general infrastructures as well as safety-critical applications, e.g., aerospace, defense, and nuclear system, etc. In this paper, one of sensor technique using Fiber Bragg Gratings (FBG) and Finite Element Method (FEM) evaluation is discussed. The experimental setup and data collection technique is also demonstrated. The factors influencing test result and the advantages/limitations of this technique are also reviewed using various methods.