• Tribology and Lubricants
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• 제17권5호
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• pp.386-390
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• 2001

Monolayers such as self-assembled monolayer (SAM) have received considerable attention to reduce stiction and friction in micro-devices and microelectromechanical systems (MEMS). Various organic molecular films were investigated to obtain better understanding of their tribological behaviors and adhesion property. The organic molecular films studied in this work are: epoxysilane SAMs, octadecyltricholosilane (OST), multi-layers composed of epoxysilane SAMs, poly[styrene-b-(ethylene-co-butylene)-b-styrene](SEBS) and compound of epoxy resin and poly (paraphenylene)(EP/PPP). The pull-off forces of these films were also obtained from force-distance curves measured in static mode of operation of atomic force microscope(AFM). Tribological tests were conducted with a ball-on-flat reciprocating friction tester. The OST showed the lowest pull-off force, indicating its low adhesion property. It was revealed that, the OST, EP/PPP and the multi-layer of epoxysilane SAMs, SEBS and EP/PPP exhibited good tribological properties at the lower load (0.3 N) whereas the OST showed best performance at the higher load (1.8 N).

• 비파괴검사학회지
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• 제32권2호
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• pp.115-121
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• 2012

Exploration in microelectromechanical systems(MEMS) and nanotechnology requires evaluation techniques suitable for sub-micron length scale so that thermal and mechanical properties of novel materials can be investigated for optimal design of miro/nanostructures. The ultrafast optical pump-probe technique provides a contact-free and non-destructive way to characterize nanoscale thin-films, and its ultrahigh temporal resolution enables the study of heat-transport phenomena down to a sub-picosecond regime. This paper reviews the principle of optical pump-probe technique and introduces its application to the area of micro/nano-NDE.

• 로봇학회논문지
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• 제9권4호
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• pp.216-224
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• 2014

This paper compares methods for attitude estimation of a UUV(Unmanned Underwater Vehicle). Attitude estimation plays a key role in underwater navigation using DVL(Doppler Velocity Log). The paper proposes attitude estimation methods using EKF(Extended Kalman Filter), UKF(Unscented Kalman Filter), and CF(Complementary Filter). It derives methods using the measurements from MEMS-AHRS(Microelectromechanical Systems-Attitude Heading Reference System) and DVL. The methods are used for navigation in a test pool and their navigation performance is compared. The results suggest that even if there is no measurement relative to some absolute landmarks, DVL-only navigation can be useful for navigation in a limited time and range.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2006년도 제27회 추계학술대회논문집
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• pp.15-18
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• 2006

최근 미소기전시스템(MEMS)를 개발함에 있어 마이크로 크기의 유동가시화는 중요한 문제이다. 특히 유체와 고체표면의 상호작용에 있어 표면의 친수성과 소수성의 성질은 미소유체를 조절 가능케 하는 핵심적인 역할이다. 본 연구에서는 마이크로 채널 내 표면을 개질하여 친수성 및 소수성의 벽면 경계조건 습윤도를 측정하였고, 또한 micro-PIV를 이용하여 벽면 근처에서의 속도 분포를 분석하였다.

• Structural Engineering and Mechanics
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• 제22권4호
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• pp.433-447
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• 2006

The problem of very large deflection of a circular cantilever arc device subjected to inward or outward polar force is studied. An exact elliptic integral solution is derived for the two cases and the results are checked using large displacement finite element analysis via the ANSYS package by performing a new novel modeling simulation technique for this problem. Excellent agreements have been obtained between the exact analytical solution and the numerical approach. From this study, a design chart for engineers is developed to predict the required value for the inward polar force for the device to switch on for a given angle forming the circular arc (${\theta}_o$). This study has several interesting applications in mechanical engineering, integrated circuit technology, nanotechnology and especially in microelectromechanical systems (MEMs) such as a MEM circular device switch subjected to attractive or repulsive magnetic forces due to the attachments of two magnetic poles at the fixed and at the free end of the circular cantilever arc switch device.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.49-54
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• 2001

Monolayers such as self-assembled monolayer (SAM) have received considerable attention to reduce stiction and friction in micro-devices and microelectromechanical systems (MEMS). Various organic molecular films were investigated to obtain better understanding of their tribological behaviors and adhesion property. The organic molecular films studied in this work are: epoxysilane SAMs, octadecyltricholosilane (OST), multi-layers composed of epoxysilane SAMs, poly〔styrene-b-(ethylene-co-butylene)-b-styrene〕(SEBS) and compound of epoxy resin and poly (paraphenylene) (EP/PPP). The pull-off forces of these films were also obtained from force-distance curves measured in static mode of operation of atomic force microscope (AFM). Tribological tests were conducted with a ball-on-flat reciprocating friction tester. The OST showed the lowest pull-off force, indicating its low adhesion property. It was revealed that, the OST, EP/PPP and the multi-layer of epoxysilane SAMs, SEBS and EP/PPP exhibited good tribological properties at the lower load (0.3 N) whereas the OST showed best performance at the higher load (1.8 N).

• Computers and Concrete
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• 제30권3호
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• pp.185-196
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• 2022

In this paper, the dynamic characteristics of a composite cylindrical beam made of a mechanism of carbon dioxide absorption coated on the tube core are investigated based on the classical beam theory coupled with the modified couple stress theory. The composite tube structures are assumed to be uniform along the tube length, and the energy method regarding the Hamilton principle is utilized for generating the governing equations. A powerful numerical solution, the generalized differential quadrature method (GDQM), is employed to solve the differential equations. The carbon dioxide trapping mechanism is a composite consisting of a polyacrylonitrile substrate and a cross-link polydimethylsiloxane gutter layer. Methacrylate, poly (ethylene glycol), methyl ether methacrylate, and three pedant methacrylates are all taken into account as potential mechanisms for capturing carbon dioxide. The application of the present study is helpful in the design and production of microelectromechanical systems (MEMS) and the different valuable parameters, such as the length-scale parameter, rate of section change, aspect ratio, etc., are presented in detail.

• 대한기계학회논문집A
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• 제38권5호
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• pp.567-573
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• 2014

최근에, 의학 분야의 MEMS 기술이 발전하면서 다양한 미세 유체 이송 시스템이 연구되고 있다. 본 논문에서는 기존의 펌프와는 다른, 두 개의 분리된 압전 판을 이용해 위장의 연동 운동을 모방한 마이크로 압전 펌프를 제안한다. 본 펌프는 진행파를 이용해 연동 운동을 일으켜 작동된다. 특히, 압전판에서 인가된 입력 전압에 의해 발생된 변위에 의해 동작된다. 이에 두 판 사이에서 진행파가 일어나며 유체는 진행파에 의해 생성된 압력차에 의해 이동된다. 압전 소자, 탄성체, 유체가 복합된 시스템을 이해하기 위해서 유한 요소 해석을 사용하였다. 챔버의 높이, 세라믹 개수 등의 설계 변수들을 변화시켜 유체의 유량을 확인하였다.

• 한국재료학회지
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• 제21권8호
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• pp.456-460
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• 2011

Microelectromechanical systems (MEMS)-fabricated suspended devices were used to measure the in-plane electrical conductivity, Seebeck coefficient, and thermal conductivity of 304 nm and 516 nm thick InGaAlAs films with 0.3% ErAs nanoparticle inclusions by volume. The suspended device allows comprehensive thermoelectric property measurements from a single thin film or nanowire sample. Both thin film samples have identical material compositions and the sole difference is in the sample thickness. The measured Seebeck coefficient, electrical conductivity, and thermal conductivity were all larger in magnitude for the thicker sample. While the relative change in values was dependent on the temperature, the thermal conductivity demonstrated the largest decrease for the thinner sample in the measurement temperature range of 325 K to 425 K. This could be a result of the increased phonon scattering due to the surface defects and included ErAs nanoparticles. Similar to the results from other material systems, the combination of the measured data resulted in higher values of the thermoelectric figure of merit (ZT) for the thinner sample; this result supports the theory that the reduced dimensionality, such as in twodimensional thin films or one-dimensional nanowires, can enhance the thermoelectric figure of merit compared with bulk threedimensional materials. The results strengthen and provide a possible direction in locating and optimizing thermoelectric materials for energy applications.

• International Journal of Precision Engineering and Manufacturing
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• 제1권1호
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• pp.98-105
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• 2000

The projectors using liquid crystal display(LCD) have faults such as low optical efficiency, low brightness and even heat generation. To solve these problems reflective-type spatial light modulators based on MEMS (Microelectromechanical Systems) technology have emerged. Digital Micromirror DeviceTM(DMDTM), which was already developed by Texas Instruments Inc., and Thin-film Micromirror ArrayTM(TMATM), which has been recently developed by Daewoo Electronics Co., are the representative examples. The display using TMATM has particularly much higher optical efficiency than other projectors. But the micromirrors manufactured by semiconductor processes have inevitable distortion because of the limitations of the manufacturing processes, so that the distortions of their surfaces have great influence on the optical efficiency of the projector. This study investigated the effects of mirror flatness on the optical performance, including the optical efficiency, of the TMATM projector. That is to say, as a part of the efforts to enhance the performance of the TMATM projector, how much influence the form errors of a micromirror surface exert on the optical efficiency and the modulation of gray scale of the projector were analyzed through a pertinent modeling and simulations.