• Title/Summary/Keyword: MEMS(Micro-Electro-Mechanical System)

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An Efficient Key management for Wireless Sensor Network (무선센서 네트워크를 위한 효율적인 키 관리 연구)

  • Park, Sung-Kon
    • Journal of Digital Contents Society
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    • v.13 no.1
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    • pp.129-139
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    • 2012
  • Recently, the smart sensor technologies are rapidly developing in accordance with the technology of implementation in small-size, low-cost, and low power consumption. With these sensor technologies, especially with MEMS and NEMS, the researches on the WSN are actively performing. For the WSN, a network security function is essential even it requires high physical resource level. But the WSN with the smart sensor technologies could not be provided with enough resources for the function because of limited size, computing-power, low-power, and etc. In this paper, we introduce security and key-management protocols of WSN.

Solutions of the Navier-Stokes equation in slip flow region (Slip flow 영역에서 Navier Stokes 방정식의 해석 연구)

  • Park, W.H.;Kim, T.K.
    • Proceedings of the KSME Conference
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    • 2000.11b
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    • pp.597-602
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    • 2000
  • In a MEMS(micro-electro mechanical system), the fluid may slip near the surface of a solid and have a discontinuous temperature profile. A numerical prediction in this slip flow region can provide a reasonable guide for the design and fabrication of micro devices. The compressible Navier-Stokes equation with Maxwell/smoluchowski boundary condition is solved for two simple systems; couette flow and pressure driven flow in a long channel. We found that the couette flow could be regarded as an incompressible system in low speed regions. For the pressure driven flow system, we observed nonlinear distribution of pressure in the long channel and numerical results showed a good agreement with the experimental results.

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Large Displacement Bimorph Actuator Using MEMS Technology (멤스 기술을 이용한 대변형 바이모프 구동기)

  • 정원규;최석문;김용준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1286-1289
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    • 2004
  • A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene(PVDF-TrFE). The large difference of coefficient of thermal expansion(CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS(micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens.

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Studies on MEMS Inertial Switch Applicable to the Ignition SAU(Safe-Arm-Unit) of Propulsion System (추진기관 점화안전장치에 적용 가능한 MEMS 관성 스위치 연구)

  • Jang, Seung-Gyo;Jung, Hyung-Gyun
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2010.11a
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    • pp.126-129
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    • 2010
  • MEMS(micro electro-mechanical systems) inertial switch which is applicable to the ignition Safe-Arm- Unit of propulsion system is devised. The MEMS inertial switch is designed according to the general design procedure for conventional mechanical elements. Unlikely conventional MEMS accelerometer, threshold inertial switching mechanism is adopted which makes a MEMS element an abrupt switching in a certain acceleration level. By comparing the design data and test results of the specimen a small discrepancy in switching acceleration level is found which is presumably due to the nonlinear characteristics of the beam spring and the flexure hinge which are the main parts of the MEMS inertial switch.

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Fatigue Life Analysis on Multi-Stacked Film Under Thermal and Residual Stresses (열응력과 잔류응력하의 다층박막의 피로수명 해석)

  • Park Jun-Hyub
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.4 s.235
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    • pp.526-533
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    • 2005
  • Reliability problem in inkjet printhead, one of MEMS devices, is also very important. To eject an ink drop, the temperature of heater must be high so that ink contacting with surface reaches above $280^{o}C$ on the instant. Its heater is embedded in the thin multi-layer in which several materials are deposited. MEMS processes are the main sources of residual stresses development. Residual stress is one of the factors reducing the reliability of MEMS devices. We measured residual stresses of single layers that consist of multilayer. FE analysis is performed using design of experiment(DOE). Transient analysis for heat transfer is performed to get a temperature distribution. And then static analysis is performed with the temperature distribution obtained by heat transfer analysis and the measured residual stresses to get a stress distribution in the structure. Although the residual stress is bigger than thermal stress, thermal stress is more influential on fatigue life.

Nano-bending method for the measurement of the Poisson's ratio of MEMS thin films (MEMS 박막의 푸와송 비 측정을 위한 미소굽힘기법)

  • 김종훈;김정길;연순창;전윤광;한준희;이호영;김용협
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.31 no.2
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    • pp.57-62
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    • 2003
  • Nano-bending method is presented to measure the Poisson's ratio of thinfilms for MEMS (Micro-Electro-Mechanical Systems) applicaiton. The douvle-ring specimen is designed and fabricated based on the surface micromachining process to facilitate the measurement of the Poisson's ratio. The Poisson's ratio can be obtained through analyzing the linear load-displacement relationship of the double ring specimen subjected to nano-indenter loading. The Present nano-bending mehod is an in-situ measurement approach due to the compatibility to the surface micromachining process. The Poisson's ratio is locally obtained at the location of the double ring specimen with micro dimension. To validate the nano-bending method, the Poisson's ratio of LPCVD (Low Pressure Chemical Vapor Deposition) poly-silicon with thickness of 2.3㎛ is investigated. Experimental results reveal that the Poisson's ratio of the poly-silicon film is 0.2569. The standard deviation of the nano-bending measurement for the stiffness of double ring specimens is 2.66%.

Fabrication and Electro-Mechanical Characteristic Analysis of Piezoelectric Micro-transformers (마이크로 압전변압기 제작 및 전기-기계적 특성 분석)

  • Kim, Seong-Kon;Seo, Young-Ho;Whang, Kyung-Hyun;Choi, Doo-Sun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.32 no.3
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    • pp.231-234
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    • 2008
  • For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

Fatigue Test of MEMS Device: a Monolithic Inkjet Print

  • Park, Jun-Hyub;Oh, Yong-Soo
    • Journal of Mechanical Science and Technology
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    • v.18 no.5
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    • pp.798-807
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    • 2004
  • A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

Fabrication of Micro-fluidic Channels using a Flexible and Rapid Surface Micro-machining Technique (유연하고 신속한 표면미세가공기술을 이용한 Micro-fluidic Channel 제작)

  • 김진산;성인하;김대은
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.11 no.4
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    • pp.97-101
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    • 2002
  • Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

A Study on Improving Speech Recognition Rate (H/W, S/W) of Speech Impairment by Neurological Injury (신경학적 손상에 의한 언어장애인 음성 인식률 개선(H/W, S/W)에 관한 연구)

  • Lee, Hyung-keun;Kim, Soon-hub;Yang, Ki-Woong
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.23 no.11
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    • pp.1397-1406
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    • 2019
  • In everyday mobile phone calls between the disabled and non-disabled people due to neurological impairment, the communication accuracy is often hindered by combining the accuracy of pronunciation due to the neurological impairment and the pronunciation features of the disabled. In order to improve this problem, the limiting method is MEMS (micro electro mechanical systems), which includes an induction line that artificially corrects difficult vocalization according to the oral characteristics of the language impaired by improving the word of out of vocabulary. mechanical System) Microphone device improvement. S/W improvement is decision tree with invert function, and improved matrix-vector rnn method is proposed considering continuous word characteristics. Considering the characteristics of H/W and S/W, a similar dictionary was created, contributing to the improvement of speech intelligibility for smooth communication.