• 대한기계학회논문집B
• /
• 제32권3호
• /
• pp.231-234
• /
• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• 한국기계가공학회지
• /
• 제10권1호
• /
• pp.1-7
• /
• 2011

Micromachining is gaining popularity due to recent advancements in MEMS(Micro Electro Mechanical Systems). Using conventional micromachining, it is relatively difficult to produce moving components in the order of microns. Photolithography for silicon material has high accuracy machining, but it has low aspect ratio. X-ray lithography has ultra high accuracy machining, but it has expensive cost. Micro-EDM(electro discharge machining) has been gaining popularity as a new alternative method to fabricate micro-structures. In this study, Micro-EDM machine is developed available for fabricate micro-structures and two processes such as side cut EDM and milling EDM is proposed. Several sets of experiment results have been performed to study the characteristics of the machining process.

• 한국항공우주학회지
• /
• 제31권2호
• /
• pp.57-62
• /
• 2003

MEMS(미소전기기계시스템) 박막의 푸와송비 측정을 위한 미소굽힙기법이 제안되었다. 푸와송비 측정에 민감한 쌍원시편(두 개의 원모양)을 설계하고 표면미세가공 공정을 사용하여 제작하였다. 미소압입기로 하중을 가한 쌍원시편의 하중-변위 곡선을 분석하여 푸와송비를 측정할 수 있었다. 제안도니 미소굽힘기법은 표면미세가공에 적합하여 소자제작과정에서의 동시측정이 가능하고(in-situ measurement), 소자가 위치해 있는 작은 영영에서의 물성을 국부적으로 측정할 수 있는 장점이 있다. 제안된 기법을 검증하기 위하여 저압화학기상증착법에 의하여 증착된 2.3㎛ 다결정실리콘(Poly-silicon)의 푸와송비를 측정하였다. 실험에 사용된 다결정실리콘막의 푸와송비는 0.2569 이고 쌍원시편의 강성에 대한 측정표준편차는 2.66% 이었다.

• 한국인터넷방송통신학회논문지
• /
• 제10권2호
• /
• pp.151-157
• /
• 2010

MEMS(Micro Electro-Mechanical Systems) 분야의 급격한 발전은 저비용의 정보 처리 센싱 능력을 갖춘 센서의 발전에 박차를 가했다. 이러한 기술의 흐름은 강력하고 높은 확장성을 가지는 WSNs(Wireless Sensor Networks)을 위하여 더 많은 센서 간 연결을 위한 연구가 진행되고 있는 실정이다. WSNs의 자원부족, Ad-hoc 배치방법, 보다 광대해지는 규모는 센서 간 통신에서 안전성을 보다 중요한 문제로 인식하게 하고 있다. 센서 네트워크의 주요 고려사항은 에너지 효율이기 때문에, 보안 기술은 통신에서의 보안 특징과 그것을 수행하기 위해 계산해야하는 오버헤드 간 균형을 맞춰야한다. 본 논문에서는 새로운 보안 인식 다중경로 위치기반 라우팅 프로토콜을 개발하기 위하여 위치정보와 전송확률을 결합한다. 네트워크 시뮬레이터(ns-2)를 실행한 결과 보다 나은 성능을 얻을 수 있음을 알 수 있다.

• KSTLE International Journal
• /
• 제8권2호
• /
• pp.26-28
• /
• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 추계학술대회논문집B
• /
• pp.591-596
• /
• 2001

Micron-size mechanical devices are becoming more prevalent, both in commercial applications and in scientific inquiry. Within the last decade, a dramatic increase in research activities has taken place, mostly due to the rapidly expanding growth of applications in areas of MEMS(Micro-Electro-Mechanical Systems), bioengineering, chemical systems, and advanced energy systems. In this study, we have described the effects of vortex viscosity variation on the flowfields in a micro-slot between rotating surfaces of revolution using a micropolar fluid theory. In order to solve this problem, we have used boundary layer equations and applied non-zero values of the microrotation vector on the wall. The results are compared with the corresponding flow problems for Newtonian fluid. Results show that the coefficient $\delta$ controls the main part of velocity ${\upsilon}_x$ and the coefficient M controls the main part of microrotation component ${\Omega}_{\theta}$.

• 한국추진공학회:학술대회논문집
• /
• 한국추진공학회 2010년도 제35회 추계학술대회논문집
• /
• pp.126-129
• /
• 2010

추진기관용 점화안전장치인 SAU에 적용 가능한 MEMS 관성 스위치를 고안하였다. 본 MEMS 관성 스위치는 일반적인 기계요소 설계 방식을 따라 설계하였으나 일반적인 MEMS 가속계와 다르게 목넘김 관성 스위칭 방식을 채택하여 일정 가속도 이상에서만 스위칭이 일어난다. 제작된 시료에 대한 검사 결과와 설계 데이터를 비교해 본 결과 관성 스위치의 구성 요소인 판 스프링 및 연성 힌지의 비선형요소에 의한 영향으로 인하여 설계된 스위칭 가속도 값과 근사한 차이가 유발됨을 확인하였다.

• Journal of Mechanical Science and Technology
• /
• 제18권5호
• /
• pp.798-807
• /
• 2004

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2000년도 추계학술대회논문집B
• /
• pp.597-602
• /
• 2000

In a MEMS(micro-electro mechanical system), the fluid may slip near the surface of a solid and have a discontinuous temperature profile. A numerical prediction in this slip flow region can provide a reasonable guide for the design and fabrication of micro devices. The compressible Navier-Stokes equation with Maxwell/smoluchowski boundary condition is solved for two simple systems; couette flow and pressure driven flow in a long channel. We found that the couette flow could be regarded as an incompressible system in low speed regions. For the pressure driven flow system, we observed nonlinear distribution of pressure in the long channel and numerical results showed a good agreement with the experimental results.

• Steel and Composite Structures
• /
• 제41권6호
• /
• pp.805-820
• /
• 2021

In this research, the buckling and free vibration of three-phase carbon nanotubes/ fiber/ polymer piezoelectric nanocomposite face sheet sandwich microbeam with microsensor and micro-actuator surrounded in elastic foundation based on modified couple stress theory (MCST) is investigated. Three types of porous materials are considered for sandwich core. Higher order (Reddy) and sinusoidal shear deformation beam theories are employed for the displacement fields. Sinusoidal surface stress effects are extracted for sinusoidal shear deformation beam theory. The equations of motion are derived by Hamilton's principle and then the natural frequency and critical buckling load are obtained by Navier's type solution. The determined results are in good agreement with other literatures. The detailed numerical investigation for various parameters is performed for this microsensor-microactuator. The results reveal that the microsensor-microactuator enhanced by increasing of Skempton coefficient, carbon nanotubes diameter length to thickness ratio, small scale factor, elastic foundation, surface stress constants and reduction in porous coefficient, micro-actuator voltage and CNT weight fraction. The valuable results can be expedient for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.