• Title/Summary/Keyword: M2M Device

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A study on electron beam lithography for 0.1$\mu\textrm{M}$ T-gate formation at P(MMA/MAA)/PMMA structure (PMMA/P(MMA/MAA) 구조에서 0.1$\mu\textrm{M}$ T-gate 형성을 위한 전자빔 리소그래피 공정에 관한 연구)

  • Choe, Sang-Su;Lee, Jin-Hui;Yu, Hyeong-Jun;Lee, Sang-Yun
    • Korean Journal of Materials Research
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    • v.5 no.1
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    • pp.96-103
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    • 1995
  • This art~cle reports on the formation of T - Gate with O.1$\mu$m foot and 0.4$\mu$m head width at PMMA/P( MMA/MAA) resist structure using a 30KV electron beam lithography system. From the result of Monte Carlo simulation on PMMA/P( MMA/MAA)/GaAs, we obtain the dissipation energy ratio of forwardscattered electron and backscattered electron within 0.1$\mu$m scattering radius is 19.5 : 1 0.1$\mu$m T - gate has been formed with 30KV gaussian electron beam at a 440$\mu C/\textrm{cm}^2$ dosage. The gamma value of PMMA and P(MMA/MAA) at MIBK : IPA=l : 1 developer was 2.3. The overlay accuracy(3$\sigma$) from mix-andmatch of optical stepper and Ekeam lithography system for fabricating HEMT device is accomplished below 0.1$\mu$m.

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The Numerical Simulation of a 8-Channel Optical Wavelength Division Multiplexer with Channel Spacing $\Delta\lambda$=0.8 nm

  • Kim, Sang-Duk;Ku, Dae-Sung;Yun, Jung-Hyun;Lee, Jae-Gyu;Kim, Jong-Bin
    • Proceedings of the IEEK Conference
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    • 2002.07a
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    • pp.1-4
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    • 2002
  • The numerical alaysis of optical device, silicabased device, are presented. The purpose of this paper is to simulate and to design a 8-channel optical wavelength division multiplexer(OWDM) based on Mach-Zehnder Interferometer(MZI) with wavelength spacing between channels Δλ=0.8 nm at central wavelength λ=1.55 ${\mu}{\textrm}{m}$. In initial condition fur simulating, we assumed as follows. A channel waveguide is made from silica based P-doped SiO2 core layers in order to coupling with a fiber easily and its core dimension was 6 ${\mu}{\textrm}{m}$$\times$6 ${\mu}{\textrm}{m}$. The core and clad index of channel waveguide were 1.455 and 1.444, separately, at λ=1.55 ${\mu}{\textrm}{m}$. Where, the separation between channel waveguides in coupling region was 3 ${\mu}{\textrm}{m}$. As a result of analysis, a group mode index of channel waveguide was 1.4498370, was gained by Hermite-Gaussian Method(HGM). Also, the channel spacing was determined by the waveguide arm length difference and was Δλ=0.8 nm as like a proposed condition. The central wavelength of a designed-multiplexer was activated about wavelength λ=1.55 ${\mu}{\textrm}{m}$, and we certificated that it can be used to 8-channel optical wavelength division multiplexer/demultiplexer.

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Disposable Microchip-Based Electrochemical Detector Using Polydimethylsiloxane Channel and Indium Tin Oxide Electrode (Polydimethylsiloxane 채널과 indium tin oxide 전극을 이용한 일회용 전기화학적 검출 시스템)

  • Yi In-Je;Kang Chi-Jung;Kim Yong-Sang;Kim Ju-Ho
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.5
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    • pp.227-231
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    • 2005
  • We have developed a microsystem with a capillary electrophoresis (CE) and an electrochemical detector (ECD). The microfabricated CE-ECD systems are adequate for a disposable type and the characteristics are optimized for an application to the electrochemical detection. The system was realized with polydimethylsiloxane (PDMS)-glass chip and indium tin oxide electrode. The injection and separation channels (80 um wide$\ast$40 um deep) were produced by moulding a PDMS against a microfabricated master with relatively simple and inexpensive methods. A CE-ECD systems were fabricated on the same substrate with the same fabrication procedure. The surface of PDMS layer and ITO-coated glass layer was treated with UV-Ozone to improve bonding strength and to enhance the effect of electroosmotic flow. For comparing the performance of the ITO electrodes with the gold electrodes, gold electrode microchip was fabricated with the same dimension. The running buffer was prepared by 10 mM 2-(N-morpholino)ethanesulfonic acid (MES) titrated to PH 6.5 using 0.1 N NaOH. We measured olectropherograms for the testing analytes consisted of catechol and dopamine with the different concentrations of 1 mM and 0.1 mM, respectively. The measured current peaks of dopamine and catechol are proportional to their concentrations. For comparing the performance of the ITO electrodes with the gold electrodes, electropherograms was measured for CE-ECD device with gold electrodes under the same conditions. Except for the base current level, the performances including sensitivity, stability, and resolution of CE-ECD microchip with ITO electrode are almost the same compared with gold electrode CE-ECD device. The disposable CE/ECD system showed similar results with the previously reported expensive system in the limit of detection and peak skew. When we are using disposable microchips, it is possible to avoid polishing electrode and reconditioning.

Accuracy Estimation of Electro-optical Camera (EOC) on KOMPSAT-1

  • Park, Woon-Yong;Hong, Sun-Houn;Song, Youn-Kyung
    • Korean Journal of Geomatics
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    • v.2 no.1
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    • pp.47-55
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    • 2002
  • Remote sensing is the science and art of obtaining information about an object, area or phenomenon through the analysis of data acquired by a device that is not in contact with the object, area, or phenomenon under investigation./sup 1)/ EOC (Electro -Optical Camera) sensor loaded on the KOMPSAT-1 (Korea Multi- Purpose Satellite-1) performs the earth remote sensing operation. EOC can get high-resolution images of ground distance 6.6m during photographing; it is possible to get a tilt image by tilting satellite body up to 45 degrees at maximum. Accordingly, the device developed in this study enables to obtain images by photographing one pair of tilt image for the same point from two different planes. KOMPSAT-1 aims to obtain a Korean map with a scale of 1:25,000 with high resolution. The KOMPSAT-1 developed automated feature extraction system based on stereo satellite image. It overcomes the limitations of sensor and difficulties associated with preprocessing quite effectively. In case of using 6, 7 and 9 ground control points, which are evenly spread in image, with 95% of reliability for horizontal and vertical position, 3-dimensional positioning was available with accuracy of 6.0752m and 9.8274m. Therefore, less than l0m of design accuracy in KOMPSAT-1 was achieved. Also the ground position error of ortho-image, with reliability of 95%, is 17.568m. And elevation error showing 36.82m was enhanced. The reason why elevation accuracy was not good compared with the positioning accuracy used stereo image was analyzed as a problem of image matching system. Ortho-image system is advantageous if accurate altitude and production of digital elevation model are desired. The Korean map drawn on a scale of 1: 25,000 by using the new technique of KOMPSAT-1 EOC image adopted in the present study produces accurate result compared to existing mapping techniques involving high costs with less efficiency.

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MMIC Low Noise Amplifier Design for Millimeter-wave Application (밀리미터파 응용을 위한 MMIC 저잡음 증폭기 설계)

  • 장병준;염인복;이성팔
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.12 no.7
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    • pp.1191-1198
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    • 2001
  • MMIC low noise amplifiers for millimeter-wave application using 0.15 $\mu$m pHEMT have been presented in this paper. The design emphasis is on active device model and EM simulation. The deficiency of conventional device models is identified. A distributed device model has been adapted to circumvent the scaling problems and, thus, to predict small signal and noise parameters accurately. Two single-ended low noise amplifier are designed using distributed active device model for Q-band(40 ∼ 44 GHz) and V-band(58 ∼65 GHz) application. The Q-band amplifier achieved a average noise figure of 2.2 dB with 18.3 dB average gain. The V-band amplifier achieved a average noise figure of 2.9 dB with 14.7 dB average gain. The design technique and model employed provides good agreement between measured and predicted results. Compared with the published data, this work also represents state-of-the-art performance in terms of gain and noise figure.

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Fabrication and Device Characteristics of Infrared Photodetector Based on InAs/GaSb Strained-Layer Superlattice (InAs/GaSb 응력초격자를 이용한 적외선검출소자의 제작 및 특성 연구)

  • Kim, J.O.;Shin, H.W.;Choe, J.W.;Lee, S.J.;Kim, C.S.;Noh, S.K.
    • Journal of the Korean Vacuum Society
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    • v.18 no.2
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    • pp.108-115
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    • 2009
  • The superlattice infrared photodetector (SLIP) with an active layer of 8/8-ML InAs/GaSb type-II strained-layer superlattice (SLS) of 150 periods was grown by MBE technique, and the proto-type discrete device was defined with an aperture of $200-{\mu}m$ diameter. The contrast profile of the transmission electron microscope (TEM) image and the satellite peak in the x-ray diffraction (XRD) rocking curve show that the SLS active layer keeps abrupt interfaces with a uniform thickness and a periodic strain. The wavelength and the bias-voltage dependences of responsivity (R) and detectivity ($D^*$) measured by a blackbody radiation source give that the cutoff wavelength is ${\sim}5{\mu}m$, and the maximum Rand $D^*$ ($\lambda=3.25{\mu}m$) are ${\sim}10^3mA/W$ (-0.6 V/13 K) and ${\sim}10^9cm.Hz^{1/2}/W$ (0 V/13 K), respectively. The activation energy of 275 meV analyzed from the temperature dependent responsivity is in good agreement with the energy difference between two SLS subblevels of conduction and valence bands (HH1-C) involving in the photoresponse process.

Development of Online Realtime Positioning Error Compensation System for CNC Machine Tools (CNC 공작기계용 온라인 실시간 위치오차 보정시스템의 개발)

  • Chung, Chae-Il;Kim, Jong-Won;Nam, Weon-Woo;Lee, Sang-Jo
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.10
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    • pp.45-52
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    • 1999
  • The online realtime positioning error compensation system 'SKY-PACS' is developed to correct geometric errors, thermal errors and tool deflection errors induced by cutting forces on the vertical machining center. 'SKY-PACS' communicates position commands and position compensation signals with the CNC controller at 100Hz, which is CNC control frequency. So the compensation procedure can be applied during axis movement. Using 'SKY-PACS', Maximum 1 axis positioning accuracy was corrected from 5{\mu}m$ to 2{\mu}m$and the squareness error of X-Y table was corrected from 51{\mu}m$/m to below 4{\mu}m$/m. The error compensation under the cutting condition is carried out by ISO10791-7. And the measurement of test-pieces shows that the roundness is corrected rom 8{\mu}m$ to below 5{\mu}m$.

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Development of Measuring Device for Electric Field on the Ground Level Using a Field Mill (필드 밀을 이용한 대지전장 측정장치 개발)

  • 송재용;김명진;길경석;천상규;송동영
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.5 no.2
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    • pp.315-320
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    • 2001
  • This paper describes a rotation-type field mill to measure the electric field intensity caused by thunderclouds on the ground level. The field mill developed is consisted of two isolated electrode vanes, a grounded stator and a rotor. To develop a high sensitive field mill, the principles and design rules of a rotation-type field mill are studied. Also, two types of calibration system, such as a cylindrical guard electrodes and a parallel-plate electrodes, are proposed to determine the sensitivity and frequency bandwidth of the field mill. From the calibration experiment, the frequency bandwidth and the sensitivity of the field mill are DC ~ 200 [Hz] and 0.267 [mV/V/m], respectively. Therefore, it can measure the electric field intensity from 73 [V/m] to 18.7 [㎸/m].

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A Practical New Technology of Removing Algal Bloom: K-water GATe Water Combine (조류(藻類)제어를 위한 실용적 신기술 : K-water 녹조수상콤바인)

  • Shin, Jae-Ki;Kim, Hojoon;Kim, Sea Won;Chong, Sun-A;Moon, Byong Cheun;Lee, Sanghyup;Choi, Jae Woo
    • Korean Journal of Ecology and Environment
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    • v.47 no.3
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    • pp.214-218
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    • 2014
  • We introduce a technical equipment of GATe (Green (algae)-tide) water combine developed by K-water. The GATe water combine consists of five modules: main body and buoyant, transfer hopper, screen conveyer, sludge remover, and separator of algae and waste. Also a sprinkler, as the pre-treatment step if necessary, is equipped to the device to spread out environmental-friendly algaecide under the circumstance that the level of algal bloom does not reach to the scum-forming condition. The overall module system of this device is very simple. Based on the field test, the device covers surface area of ca. $500,000m^2day^{-1}$ during the period from May to July, and treats water volume as much as $500,000m^3day^{-1}$ in spite of some variation depending on the water quality condition. The removal efficiency of the device appeared to be over 90%. In addition, the operating duration of the device was able to expand to cover the period between March and November. We expect this new technology can be used to solve algal bloom problems in drinking water resource and public water area.

Development of a Precision Seed Metering Device for Direct Seeding of Rice (벼 직파용 정밀 배종장치 개발)

  • Yoo S. N.;Choi Y. S.;Suh S. R.
    • Journal of Biosystems Engineering
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    • v.30 no.5 s.112
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    • pp.261-267
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    • 2005
  • In order to save labor and cost, direct seeding has been considered as an important alternative to the machine transplanting in rice cultivation. As current seeders for direct seeding of rice seeds drill irregular amount of seeds under various operating conditions, conventional drilling should be turned to precision planting which enables accurate placement of proper amount of rice seeds at equal intervals within rows. In this study, design, construction and performance evaluation of a precision seed metering device for planting of rice seeds were carried out. As prototype, the conventional roller type seed metering device was modified for planting: increasing diameter of metering roller, setting 2 or 4 seed cells on metering roller, adding seed discharging lid and its driving cam mechanism. Through performance tests for prototype and the current seed metering device, number of seeds in a hill, planting space and its error ratio, coefficient of variation of planting space (planting accuracy), and seeding length of $90\%$ of seeds in a hill divided by planting space (planting precision) at setting planting spaces of 15, and 20cm, seeding heights of 10, and 20cm, and seeding speeds of 0.1, 0.2, and 0.5m/s were investigated. Prototype showed better seed planting performance than the current seed metering devices. When setting planting space of 15 cm and seeding height of 10cm, prototype with 2 seed cells showed that variations of planting space and seeding lengths of $90\%$ of seeds in a hill at up to seeding speed of 0.5m/s were within 0.9cm, and 3.6cm, respectively.