A Study on the Electromigratin Phenomena in Dielectric Passivated Al-1Si Thin Film Interconnections under D.C. and Pulsed D.C.Conditions. (절연보호막 처리된 Al-1 % Si박막배선에서 D.C.와 Pulsed D.C. 조건하에서의 electromigration현상에 관한 연구)
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- Journal of the Korean Vacuum Society
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- v.5 no.3
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- pp.229-238
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- 1996