• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.15-16
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• 2007

The high efficiency and low cost solar cells in order to it applied a dopant pastes diffusion process. The dopant pastes diffusion process which it uses is easily applied in screen-printing solar cells output line. in this paper, it used the Ferro 99-038 phosphorus diffusion pastes source and it analyzed a sheet resistance and a uniformity degree. And it knew the quality of the sheet resistance which it follows in temperature and time condition. The temperature variable it let and it fixed the time in 7 minutes. It will be able to measure the sheet resistance of $40({\Omega}/sq),\;30({\Omega}/sq),\; 20({\Omega}/sq)$. also average uniformity of the sheet resistance was below 5%.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.138.1-138.1
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• 2013

We present the low temperature (${\leq}1,000^{\circ}C$) vacuum sublimation behavior of an e-beam evaporative deposited on a SiC film and a method to reduce the vacuum sublimation through an ion beam process. The density of the SiC film deposited using the e-beam evaporation method was ~60% of the density of the bulk source material. We found that the sublimation became appreciable above ${\sim}750^{\circ}C$ under $1.5{\times}10^{-5}$ torr pressure and the sublimation rate increased with an increase in temperature, reaching ~70 nm/h at $950^{\circ}C$ when the coated sample was heated for 5 h. When the film was irradiated with 70 keV N+ ions prior to heating, the sublimation rate decreased to ~23 nm/h at a fluence of $1{\times}10^{17}\;ions/cm^2$. However, a further increase in fluence beyond this value or an extended heating period did not change (decrease or increase) the sublimation rate any further.

• KIEE International Transactions on Electrophysics and Applications
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• 제2C권5호
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• pp.246-252
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• 2002

Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

• Current Photovoltaic Research
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• 제6권1호
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• pp.21-26
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• 2018

Beside several advantages, the PV power generation as a clean energy source, is still below the supply level due to high power generation cost. Therefore, the interest in fabricating low-cost thin film solar cells is increasing continuously. $Cu_2O$, a low cost photovoltaic material, has a wide direct band gap of ~2.1 eV has along with the high theoretical energy conversion efficiency of about 20%. On the other hand, it has other benefits such as earth-abundance, low cost, non-toxic, high carrier mobility ($100cm^2/Vs$). In spite of these various advantages, the efficiency of $Cu_2O$ based solar cells is still significantly lower than the theoretical limit as reported in several literatures. One of the reasons behind the low efficiency of $Cu_2O$ solar cells can be the formation of CuO layer due to atmospheric surface oxidation of $Cu_2O$ absorber layer. In this work, atomic layer deposition method was used to remove the CuO layer that formed on $Cu_2O$ surface. First, $Cu_2O$ absorber layer was deposited by electrodeposition. On top of it buffer (ZnO) and TCO (AZO) layers were deposited by atomic layer deposition and rf-magnetron sputtering respectively. We fabricated the cells with a change in the deposition temperature of buffer layer ranging between $80^{\circ}C$ to $140^{\circ}C$. Finally, we compared the performance of fabricated solar cells, and studied the influence of buffer layer deposition temperature on $Cu_2O$ based solar cells by J-V and XPS measurements.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.444-445
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• 2009

The metallic contact system of silicon solar cell must have several properties, such as low contact resistance, easy application and good adhesion. Ni is shown to be a suitable barrier to Cu diffusion as well as desirable contact metal to silicon. Nickel monosilicide(NiSi) has been suggested as a suitable silicide due to its lower resistivity, lower sintering temperature and lower layer stress than $TiSi_2$. Copper and Silver can be plated by electro & light-induced plating method. Light-induced plating makes use the photovoltaic effect of solar cell to deposit the metal on the front contact. The cell is immersed into the electrolytic plating bath and irradiated at the front side by light source, which leads to a current density in the front side grid. Electroless plated Ni/ Electro&light-induced plated Cu/ Light-induced plated Ag contact solar cells result in an energy conversion efficiency of 16.446 % on $0.2\sim0.6\;{\Omega}{\cdot}cm$, $20\;\times\;20\;mm^2$, CZ(Czochralski) wafer.

• Bulletin of the Korean Chemical Society
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• 제34권10호
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• pp.3059-3064
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• 2013

In this study transesterification of Triglycerides (TG) from Jatropha curcas oil (JCO) with methanol for production of biodiesel was investigated over cerium impregnated ZSM-5 catalysts. NaZSM-5 was synthesized in an alkaline medium and impregnated with cerium oxide by wet method using cerium nitrate as a source for cerium. They were characterized by X-ray diffraction (XRD), Thermogravimeteric analysis (TGA), $CO_2$-temperature programmed desorption, and $N_2$ adsorption/desorption analysis. XRD analysis showed decrease in intensity of the patterns with the increase in the ceria loading but crystallization of ceria to larger size is an evident for 10 and 15% loading. The optimal yield of transesterification process was found to be 90% under the following conditions: oil to methanol molar ratio: 1:12; temperature: $60^{\circ}C$; time: 1 h; catalyst: 5 wt %. Here the yield of fatty acid methyl ester (FAME) was calculated through $^1H$ NMR analysis. The investigation on catalyst loading, temperature, time and reusability illustrated that these ceria impregnated NaZSM-5's were found to be selective, recyclable and could yield biodiesel at low temperature with low methanol to oil ratio due to the presence of both Lewis and Bronsted basicity. Hence, from the above study it is concluded that ceria impregnated ZSM-5 could be recognized as a potential catalysts for biodiesel production in industrial processes.

• 한국지열·수열에너지학회논문집
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• 제5권1호
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• pp.1-6
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• 2009

In this study, an ORC (Organic Rankine Cycle) is investigated for a low-temperature geothermal power generation by a simulation method. A steady-state simulation model is developed to analyze cycle's performance. The model contains a turbine, a pump, an expansion valve and heat exchangers. The turbine and pump are modelled by an isentropic efficiency. Simulations were carried out for the given heat source and sink inlet temperatures, and given flow rate that is based on the typical power plant thermal-capacitance-rate ratio. HFC-245fa is considered as a working fluid of the cycle. Simulation results, at the given secondary working fluids conditions, show that even though the power can be presented by both the evaporating temperature and the turbine inlet superheat, it depends on the evaporating temperature primarily.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.782-787
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• 2008

The Kalina cycle simulation study was carried out for a preliminary design of a geothermal power generation system. The Kalina cycle system can be used for the utilization of a low-temperature heat sources such as geothermal and industrial waste heat that are not hot enough to produce steam. The sea/river water can be considered as a cooling media. A steady-state simulation model was developed to analyze and optimize its performance. The model contains a turbine, a pump, an expansion valve and heat exchangers. The turbine and pump were modelled by an isentropic efficiency, while a condenser, an evaporator and a regenerative heat exchanger were modeled by UA-LMTD method with a counter-flow assumption. The simulation results show that the power generation efficiency over 10% is expected when a heat source and sink inlet temperatures are $100^{\circ}C$ and $10^{\circ}C$ respectively.

• 플랜트 저널
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• 제12권1호
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• pp.29-36
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• 2016

최근 늘어가는 에너지 수요를 화석연료에만 의존 할 수 없게 되면서 대체 에너지의 중요성이 대두되고 있으며, 이러한 상황에서 유기랭킨 사이클(Organic Rankine Cycle, 이하 ORC)등 산업체 폐열, 태양열, 지열, 해수 온도차 등의 저등급 에너지를 효과적으로 활용하기 위한 많은 연구가 진행되고 있다. 본 연구에서는 지역난방 축열시 회수수를 혼합하지 않고 ORC를 이용하여 하부사이클을 구성하여 성능해석 상용프로그램으로 작동유체 및 운전특성을 예측하였다. 지역난방수 운전조건인 열원 온도 $120^{\circ}C$, 열원 유량 $163m^3/h$(회수수 유량을 고려한 값)로 하고 이 온도에 적합한 다수의 작동유체를 선정하여 성능해석을 수행하였으며, 최고의 성능이 나타난 R245fa의 경우 269.2kW출력과 6.37%효율을 얻을 수 있었다. 또한 ORC 시스템의 응축기 압력변화에 따라 지역난방 회수수 온도가 $57.3{\sim}85^{\circ}C$범위에 형성됨으로서 보일러 입구온도상승에 따른 연료 절감 효과가 예상되었다.