• Title/Summary/Keyword: Low temperature transfer method

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Electrical Characteristics of Ni/Ti/Al Ohmic Contacts to Al-implanted p-type 4H-SiC (Al 이온 주입된 p-type 4H-SiC에 형성된 Ni/Ti/Al Ohmic Contact의 전기적 특성)

  • Joo, Sung-Jae;Song, Jae-Yeol;Kang, In-Ho;Bahng, Wook;Kim, Sang-Cheol;Kim, Nam-Kyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.11
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    • pp.968-972
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    • 2008
  • Ni/Ti/Al multilayer system ('/'denotes the deposition sequence) was tested for low-resistance ohmic contact formation to Al-implanted p-type 4H-SiC. Ni 30 nm / Ti 50 nm / Al 300 nm layers were sequentially deposited by e-beam evaporation on the 4H-SiC samples which were implanted with Al (norminal doping concentration = $4\times10^{19}cm^{-3}$) and then annealed at $1700^{\circ}C$ for dopant activation. Rapid thermal anneal (RTA) temperature for ohmic contact formation was varied in the range of $840\sim930^{\circ}C$. Specific contact resistances were extracted from the measured current vs. voltage (I-V) data of linear- and circular transfer length method (TLM) patterns. In constrast to Ni contact, Ni/Ti/Al contact shows perfectly linear I-V characteristics, and possesses much lower contact resistance of about $2\sim3\times10^{-4}\Omega{\cdot}cm^2$ even after low-temperature RTA at $840^{\circ}C$, which is about 2 orders of magnitude smaller than that of Ni contact. Therefore, it was shown that RTA temperature for ohmic contact formation can be lowered to at least $840^{\circ}C$ without significant compromise of contact resistance. X-ray diffraction (XRD) analysis indicated the existence of intermetallic compounds of Ni and Al as well as $NiSi_{1-x}$, but characteristic peaks of $Ti_{3}SiC_2$, a probable narrow-gap interfacial alloy responsible for low-resistance Ti/Al ohmic contact formation, were not detected. Therefore, Al in-diffusion into SiC surface region is considered to be the dominant mechanism of improvement in conduction behavior of Ni/Ti/Al contact.

Measurement of Interface Trapped Charge Densities $(D_{it})$ in 6H-SiC MOS Capacitors

  • Lee Jang Hee;Na Keeyeol;Kim Kwang-Ho;Lee Hyung Gyoo;Kim Yeong-Seuk
    • Proceedings of the IEEK Conference
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    • summer
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    • pp.343-347
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    • 2004
  • High oxidation temperature of SiC shows a tendency of carbide formation at the interface which results in poor MOSFET transfer characteristics. Thus we developed oxidation processes in order to get low interface charge densities. N-type 6H-SiC MOS capacitors were fabricated by different oxidation processes: dry, wet, and dry­reoxidation. Gate oxidation and Ar anneal temperature was $1150^{\circ}C.$ Ar annealing was performed after gate oxidation for 30 minutes. Dry-reoxidation condition was $950^{\circ}C,$ H2O ambient for 2 hours. Gate oxide thickness of dry, wet and dry-reoxidation samples were 38.0 nm, 38.7 nm, 38.5 nm, respectively. Mo was adopted for gate electrode. To investigate quality of these gate oxide films, high frequency C- V measurement, gate oxide leakage current, and interface trapped charge densities (Dit) were measured. The interface trapped charge densities (Dit) measured by conductance method was about $4\times10^{10}[cm^{-1}eV^{-1}]$ for dry and wet oxidation, the lowest ever reported, and $1\times10^{11}[cm^{-1}eV^{-1}]$ for dry-reoxidation

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Fabrication of Flexible Solid-state Dye-sensitized $TiO_2$ Nanotube Solar Cell Using UV-curable NOA

  • Park, Ik-Jae;Park, Sang-Baek;Kim, Ju-Seong;Jin, Gyeong-Seok;Hong, Guk-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.396-396
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    • 2012
  • $TiO_2$ anatase nanotube arrays (NTAs) were grown by electrochemical anodization and followed annealing of Ti foil. Ethylene glycol/$NH_4F$-based organic electrolyte was used for electrolyte solution and using second anodization process to obtain free-standing NTAs. After obtaining NTAs, ITO film was deposited by sputtering process on bottom of NTAs. UV-curable NOA was used for attach free-standing NTAs on flexible plastic substrate (PEN). Solid state electrolyte (spiro-OMeTAD) was coated via spin-coating method on top of attached NTAs. Ag was deposited as a counter electrode. Under AM 1.5 simulated sunlight, optical characteristics of devices were investigated. In order to use flexible polymer substrate, processes have to be conducted at low temperature. In case of $TiO_2$ nano particles (NPs), however, crystallization of NPs at high temperature above $450^{\circ}C$ is required. Because NTAs were conducted high temperature annealing process before NTAs transfer to PEN, it is favorable for using PEN as flexible substrate. Fabricated flexible solid-state DSSCs make possible the preventing of liquid electrolyte corrosion and leakage, various application.

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Study on the Heat Transfer Phenomenon around Underground Concrete Digesters for Bigas Production Systems (생물개스 발생시스템을 위한 지하매설콘크리트 다이제스터의 열전달에 관한 연구)

  • 김윤기;고재균
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.22 no.1
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    • pp.53-66
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    • 1980
  • The research work is concerned with the analytical and experimental studies on the heat transfer phenomenon around the underground concrete digester used for biogas production Systems. A mathematical and computational method was developed to estimate heat losses from underground cylindrical concrete digester used for biogas production systems. To test its feasibility and to evaluate thermal parameters of materials related, the method was applied to six physical model digesters. The cylindrical concrete digester was taken as a physical model, to which the model,atical model of heat balance can be applied. The mathematical model was transformed by means of finite element method and used to analyze temperature distribution with respect to several boundary conditions and design parameters. The design parameters of experimental digesters were selected as; three different sizes 40cm by 80cm, 80cm by 160cm and l00cm by 200cm in diameter and height; two different levels of insulation materials-plain concrete and vermiculite mixing in concrete; and two different types of installation-underground and half-exposed. In order to carry out a particular aim of this study, the liquid within the digester was substituted by water, and its temperature was controlled in five levels-35。 C, 30。 C, 25。 C, 20。C and 15。C; and the ambient air temperature and ground temperature were checked out of the system under natural winter climate conditions. The following results were drawn from the study. 1.The analytical method, by which the estimated values of temperature distribution around a cylindrical digester were obtained, was able to be generally accepted from the comparison of the estimated values with the measured. However, the difference between the estimated and measured temperature had a trend to be considerably increased when the ambient temperature was relatively low. This was mainly related variations of input parameters including the thermal conductivity of soil, applied to the numerical analysis. Consequently, the improvement of these input data for the simulated operation of the numerical analysis is expected as an approach to obtain better refined estimation. 2.The difference between estimated and measured heat losses was shown to have the similar trend to that of temperature distribution discussed above. 3.It was found that a map of isothermal lines drawn from the estimated temperature distribution was very useful for a general observation of the direction and rate of heat transfer within the boundary. From this analysis, it was interpreted that most of heat losses is passed through the triangular section bounded within 45 degrees toward the wall at the bottom edge of the digesten Therefore, any effective insulation should be considered within this region. 4.It was verified by experiment that heat loss per unit volume of liquid was reduced as the size of the digester became larger For instance, at the liquid temperature of 35˚ C, the heat loss per unit volume from the 0. 1m$^3$ digester was 1, 050 Kcal/hr m$^3$, while at for 1. 57m$^3$ digester was 150 Kcal/hr m$^3$. 5.In the light of insulation, the vermiculite concrete was consistently shown to be superior to the plain concrete. At the liquid temperature ranging from 15。 C to 350 C, the reduction of heat loss was ranged from 5% to 25% for the half-exposed digester, while from 10% to 28% for the fully underground digester. 6.In the comparison of heat loss between the half-exposed and underground digesters, the heat loss from the former was fr6m 1,6 to 2, 6 times as much as that from the latter. This leads to the evidence that the underground digester takes advantage of heat conservation during winter.

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Numerical Analysis of Heat Transfer in Multichannel Volumetric Solar Receivers (다채널 체적식 태양열 흡수기에서 열전달 수치해석)

  • Lee, Hyun-Jin;Kim, Jong-Kyu;Lee, Sang-Nam;Kang, Yong-Heack
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.12
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    • pp.1383-1389
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    • 2011
  • The current study focuses on the consistent analysis of heat transfer in multichannel volumetric solar receivers used for concentrating solar power. Changes in the properties of the absorbing material and channel dimensions are considered in an optical model based on the Monte Carlo ray-tracing method and in a one-dimensional heat transfer model that includes conduction, convection, and radiation. The optical model results show that most of the solar radiation energy is absorbed within a very small channel length of around 15 mm because of the large length-to-radius ratio. Classification of radiation losses reveals that at low absorptivity, increased reflection losses cause reduction of the receiver efficiency, notwithstanding the decrease in the emission loss. As the average temperature increases because of the large channel radius or small mass flow rate, both emission and reflection losses increase but the effect of emission losses prevails.

Numerical Study on Operating Parameters and Shapes of a Steam Reformer for Hydrogen Production from Methane (천연가스로부터 수소를 생산하기 위한 수증기 개질기의 작동조건과 형상에 대한 수치해석 연구)

  • Park, Joong-Uen;Lee, Shin-Ku;Lim, Sung-Kwang;Bae, Joong-Myeon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.1
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    • pp.60-68
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    • 2009
  • The steam reformer for hydrogen production from methane is studied by a numerical method. Langmuir- Hinshelwood model is incorporated for catalytic surface reactions, and the pseudo-homogeneous model is used to take into account local equilibrium phenomena between a catalyst and bulk gas. Dominant chemical reactions are Steam Reforming (SR) reaction, Water-Gas Shift (WGS) reaction, and Direct Steam Reforming (DSR) reaction. The numerical results are validated with experimental results at the same operating conditions. Using the validated code, parametric study has been numerically performed in view of the steam reformer performance. As increasing a wall temperature, the fuel conversion increases due to the high heat transfer rate. When Steam to Carbon Ratio (SCR) increases, the concentration of carbon monoxide decreases since WGS reaction becomes more active. When increasing Gas Hourly Space Velocity (GHSV), the fuel conversion decreases due to the heat transfer limitation and the low residence time. The reactor shape effects are also investigated. The length and radius of cylindrical reactors are changed at the same catalyst volume. The longer steam reformer is, the better steam reformer performs. However, system energy efficiency decreases due to the large pressure drop.

Soot Formation and Combustion in Turbulent Flames (난류 화염 내에서의 매연 입자의 생성및 재연소)

  • 정종수;신현동;이춘식
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.13 no.5
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    • pp.962-978
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    • 1989
  • A new model of the combustion rates of soot particle in turbulent flames has been suggested. This model applies the combustion rate of soot particles in laminar flames and uses local time-averaged quantities in order to consider the effect of the chemical reaction on the soot combustion in turbulent flames. The proposed rate equation has been tested for two propane-air turbulent round-jet diffusion flames and gives better predictions for the soot concentration field of two flames than the model previously used, especially in low temperature regions. A modified Monte carlo Method for analyzing radiative heat transfer of a flame also has been suggested and tested, which reveals good results.

Development of Transfer Method for Transparent Thin Film Transistor of Heat-treated Zinc Oxide Thin Film by Solution Process (용액공정을 이용한 열처리된 산화아연 박막의 투명한 박막 트랜지스터 구현을 위한 전사방법 개발)

  • Kwon, Soon Yeol;Jung, Dong Geon;Choi, Young Chan;Lee, Jae Yong;Kong, Seong Ho
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.2
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    • pp.57-60
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    • 2018
  • Recently, Thin-film transistors (TFTs) are fundamental building blocks for state-of-the-art microelectronics, such as flat-panel displays and system-on-glass. Zinc oxide thin films have the advantage that they can grow at low temperature and can obtain high charge movility. Also the zinc oxide thin film can be used to control the resistance according to the oxygen content, so it is very easy to obtain the desired physical properties. In this paper, we fabricated a zinc oxide thin film on a polished copper substrate through a solution process, then improved the crystallinity through a geat treatment porcess, and studied to transfer it on a flexible substrate after the heat treatment was completed.

Temperature Analysis for the Point-Cell Source in the Vapor Deposition Process

  • Park, Jong-Wook;Kim, Sung-Cho;Hun Jung
    • Journal of Mechanical Science and Technology
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    • v.18 no.9
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    • pp.1680-1688
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    • 2004
  • The information indicating device plays an important part in the information times. Recently, the classical CRT (Cathod Ray Tube) display is getting transferred to the LCD (Liquid Crystal Display) one which is a kind of the FPDs (Flat Panel Displays). The OLED (Organic Light Emitting Diodes) display of the FPDs has many advantages for the low power consumption, the luminescence in itself, the light weight, the thin thickness, the wide view angle, the fast response and so on as compared with the LCD one. The OLED has lately attracted considerable attention as the next generation device for the information indicators. And also it has already been applied for the outside panel of a mobile phone, and its demand will be gradually increased in the various fields. It is manufactured by the vapor deposition method in the vacuum state, and the uniformity of thin film on the substrate depends on the temperature distribution in the point-cell source. This paper describes the basic concepts that are obtained to design the point-cell source using the computational temperature analysis. The grids are generated using the module of AUTOHEXA in the ICEM CFD program and the temperature distributions are numerically obtained using the STAR-CD program. The temperature profiles are calculated for four cases, i.e., the charge rate for the source in the crucible, the ratio of diameter to height of the crucible, the ratio of interval to height of the heating bands, and the geometry modification for the basic crucible. As a result, the blowout phenomenon can be shown when the charge rate for the source increases. The temperature variation in the radial direction is decreased as the ratio of diameter to height is decreased and it is suggested that the thin film thickness can be uniformed. In case of using one heating band, the blowout can be shown as the higher temperature distribution in the center part of the source, and the clogging can appear in the top end of the crucible in the lower temperature. The phenomena of both the blowout and the clogging in the modified crucible with the nozzle-diffuser can be prevented because the temperature in the upper part of the crucible is higher than that of other parts and the temperature variation in the radial direction becomes small.

A study on the transient cooling process of a vertical-high temperature tube in an annular flow channel (환상유로에 있어서 수직고온관의 과도적 냉각과정에 관한 연구)

  • 정대인;김경근
    • Journal of Advanced Marine Engineering and Technology
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    • v.10 no.2
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    • pp.156-164
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    • 1986
  • In the case of boiling on high temperature wall, vapor film covers fully or parcially the surface. This phenomenon, film boiling or transition boiling, is very important in the surface heat treatment of metal, design of cryogenic heat exchanger and emergency cooling of nuclear reactor. Mainly supposed hydraulic-thermal accidents in nuclear reactor are LCCA (Loss of Coolant Accident) and PCM (Power-Cooling Mismatch). Recently, world-wide studies on reflooding of high temperature rod bundles after the occurrence of the above accidents focus attention on wall temperature history and required time in transient cooling process, wall superheat at rewet point, heat flux-wall superheat relationship beyond the transition boiling region, and two-phase flow state near the surface. It is considered that the further systematical study in this field will be in need in spite of the previous results in ref. (2), (3), (4). The paper is the study about the fast transient cooling process following the wall temperature excursion under the CHF (Critical Heat Flux) condition in a forced convective subcooled boiling system. The test section is a vertically arranged concentric annulus of 800 mm long and 10 mm hydraulic diameter. The inner tube, SUS 304 of 400 mm long, 8 mm I.D, and 7 mm O.D., is heated uniformly by the low voltage AC power. The wall temperature measurements were performed at the axial distance from the inlet of the heating tube, z=390 mm. 6 chromel- alumel thermocouples of 76 .mu.m were press fitted to the inner surface of the heating tube periphery. To investigate the heat transfer characteristics during the fast transient cooling process, the outer surface (fluid side) temperature and the surface heat flux are computed from the measured inner surface temperature history by means of a numerical method for inverse problems of transient heat conduction. Present cooling (boiling) curve is sufficiently compared with the previous results.

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