Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Development of Transfer Method for Transparent Thin Film Transistor of Heat-treated Zinc Oxide Thin Film by Solution Process

용액공정을 이용한 열처리된 산화아연 박막의 투명한 박막 트랜지스터 구현을 위한 전사방법 개발

  • Kwon, Soon Yeol (yungpook National University, School of Electronics Engineering) ;
  • Jung, Dong Geon (yungpook National University, School of Electronics Engineering) ;
  • Choi, Young Chan (yungpook National University, School of Electronics Engineering) ;
  • Lee, Jae Yong (yungpook National University, School of Electronics Engineering) ;
  • Kong, Seong Ho (yungpook National University, School of Electronics Engineering)
  • 권순열 (경북대학교 IT대학 전자공학부) ;
  • 정동건 (경북대학교 IT대학 전자공학부) ;
  • 최영찬 (경북대학교 IT대학 전자공학부) ;
  • 이재용 (경북대학교 IT대학 전자공학부) ;
  • 공성호 (경북대학교 IT대학 전자공학부)
  • Received : 2018.06.15
  • Accepted : 2018.06.21
  • Published : 2018.06.30
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Abstract

Recently, Thin-film transistors (TFTs) are fundamental building blocks for state-of-the-art microelectronics, such as flat-panel displays and system-on-glass. Zinc oxide thin films have the advantage that they can grow at low temperature and can obtain high charge movility. Also the zinc oxide thin film can be used to control the resistance according to the oxygen content, so it is very easy to obtain the desired physical properties. In this paper, we fabricated a zinc oxide thin film on a polished copper substrate through a solution process, then improved the crystallinity through a geat treatment porcess, and studied to transfer it on a flexible substrate after the heat treatment was completed.

Keywords

References

  1. Taur, Y. & Ning, H. T. Fundamentals of Modern VLSI Devices (Cambridge Univ. Press, New York, 1988).
  2. Soon Yeol Kwon, Dong Geon Jung, Young Chan Choi, Jae Yong Lee and Seong Ho Kong., "Transfer of heat-treated ZnO thin-film plastic substrates for transparent and flexible thin-film transistors," Journal of sensor science and Technology Vol. 27(3), pp. 182-185, 2018 https://doi.org/10.5369/JSST.2018.27.3.182
  3. Kuo, Y. (ed.) Thin Film Transistors: Materials and Processes (Kluwer Academic, Dordrecht, 2004).
  4. Edzer Huitema, Gerwin Gelinck, Bas van der Putten, Eugenio Cantatore, Erik van Veenendaal, Laurens Schrijnemakers, Bart-Hendrik Huisman, Dago de Leeuw., "Plastic Transistors in Active-Matrix Displays," Nature 414, 599, 2001. https://doi.org/10.1038/414599a
  5. Schwarz, U. T., English, L. Q. & Sievers, A. J., "Experimental generation and observation of intrinsic localized spin wave modes in an antiferromagnet," Phys. Rev. Lett, Vol. 83, pp. 223-227, 1999. https://doi.org/10.1103/PhysRevLett.83.223
  6. Xie, A., van der Meer, L., Hoff, W. & Austin, R. H., "Long-lived Amide I vibrational modes in myoglobin," Phys. Rev. Lett, Vol. 84, 5435-5438, 2000. https://doi.org/10.1103/PhysRevLett.84.5435
  7. Markovich, T., Polturak, E., Bossy, J. & Farhi, E., "Observation of a new excitation in bcc He-4 by inelastic neutron scattering," Phys. Rev. Lett. Vol. 88, 195-301, 2002.
  8. Chikamatsu, M., Tanaka, M. & Yamazaki, H., "Effect of magnetic dipolar interaction on antiferromagnetic resonance in $ (C_2H_5NH_3)_2CuCl_4$," J. Phys. Soc. Jpn. Vol. 50, 2876-2883, 1981. https://doi.org/10.1143/JPSJ.50.2876
  9. De Jongh, L. J. in Physics and Chemistry of Materials with Low-Dimensional Structures (ed. Levy, F.) 1-51 (Kluwer Academic, Dordrecht, 1990).
  10. K. Song, J. Noh, T. Jun, Y. Jung, H.-Y. Kang, and J. Moon., "Flexible solution-deposited ZnO thin-film transistors," Adv. Mater., Vol. 22(38), pp. 4308-4312, 2010. https://doi.org/10.1002/adma.201002163
  11. R. R. Nair, P. Blake, A. N. Grigorenko, K. S. Novoselov, T. J. Booth, T. Stauber, N. M. R. Pere, and A. K. Geim., "Fine structure constant defines visual transparency of graphene," Science, Vol. 320(5881), pp. 1308-1308, 2008. https://doi.org/10.1126/science.1156965
  12. K. S. Kim, Y. Zhao, H. Jang, S. Y. Lee, J. M. Kim, K. S. Kim, J.-H. Ahn, P. Kim, J.-Y. Choi, and B. H. Hong., "Large-scale pattern growth of graphene films for stretchable transparent electrodes," Nature, Vol. 457(7230), pp. 706-710, 2009. https://doi.org/10.1038/nature07719
  13. S. Y. Park, K. Kim, K.-H. Lim, B. J. Kim, E. Lee, J. H. Cho, and Y. S. Kim., "The structural, optical, and electrical characterization of high performance, low-temperature and solution-processed alkali metal-doped ZnO TFTs," J. Mater. Chem. C, Vol. 1(7), pp. 1383-1391, 2013. https://doi.org/10.1039/c2tc00559j