• Journal of the Microelectronics and Packaging Society
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• v.12 no.3 s.36
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• pp.197-205
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• 2005

Development of the packaging is one of the critical issues for commercialization of the RF-MEMS devices. RF MEMS package should be designed to have small size, hermetic protection, good RF performance and high reliability. In addition, packaging should be conducted at sufficiently low temperature. In this paper, a low temperature hermetic wafer level packaging scheme for the RF-MEMS devices is presented. For hermetic sealing, Au-Sn eutectic bonding technology at the temperature below $300{\times}C$ is used. Au-Sn multilayer metallization with a square loop of $70{\mu}m$ in width is performed. The electrical feed-through is achieved by the vertical through-hole via filled with electroplated Cu. The size of the MEMS Package is $1mm\times1mm\times700{\mu}m$. By applying $O_2$ plasma ashing and fabrication process optimization, we can achieve the void-free structure within the bonding interface as well as via hole. The shear strength and hermeticity of the package satisfy the requirements of MIL-STD-883F. Any organic gases or contamination are not observed inside the package. The total insertion loss for the packaging is 0.075 dB at 2 GHz. Furthermore, the robustness of the package is demonstrated by observing no performance degradation and physical damage of the package after several reliability tests.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.11a
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• pp.195-198
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• 2002

현재의 광통신, 이동통신 및 디지털 시대에서는 보다 소형화되고, 대용량의 데이터 저장 및 다기능 소자에 대한 요구가 많아지고 있다. 이러한 전자 산업 환경에서 MEMS 소자는 여러 요구조건을 만족시킬 수 있는 특징을 갖추고 있으며 실제 소자의 제작에 있어서 MEMS 소자를 이용하여 여러 물리 및 화학 센서 및 Actuator 제작에 응용이 되어지고 있고 Optical switch, Gyroscope, 적외선 어레이 센서, 가속도 센서, 위치 센서 등 여러 분야에서 실용화가 진행되어지고 있다. MEMS 구조물의 packaging 방법에 있어서는 내부 MEMS 소자의 동작을 위한 외부 환경으로부터의 보호를 위하여 Hermetic sealing에 대한 요구를 만족시켜야 한다. 본 발표에서는 이와 같은 MEMS device의 진공 패키지를 구현함에 있어서 기판 내부에 수동소자를 실장할 수 있는 LTCC 기술을 이용하여 진공 패키징하는 방법에 대하여 소개한다. 본 기술을 이용하는 경우 기존의 Hermetic sealing 이외에 향후 적층 기판 내부에 수동소자를 내장시켜 배선 길이 및 노이즈 성분을 감소시켜 더욱 전기적 성능을 향상시킬 수 있는 장점이 있게된다. 본 논문에서는 LTCC 기판을 이용하여 패키징 시킨 후, 내부 진공도에 영향을 줄 수 있는 계면들에서의 시간에 따른 진공도 변화의 특성치를 측정하여 LTCC 기판의 Hermetic sealing 특성에 관하여 조사하였다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.365-369
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• 2010

Magnetic fluid seal is characterized by its simple design, low friction and being dustless. Those advantages are deduced from the fact that the sealing element is not a solid such as rubber or plastic but it is a fluid. Those are critical for application to a rotating shaft which is inserted into a vacuum chamber where high level of vacuum and cleanness are required. For the reason the magnetic fluid seal has become a standard for vacuum chambers for semiconductor and LCD processing. It should be noted that its sealing performance is sensitive to temperature. If necessary, water cooling should be considered. Thus anticipation of the temperature distribution of the magnetic fluid seal is important before applying it. In this paper an FEM analysis of the heat transfer has been executed and compared with experimental results. An overall convective heat transfer coefficient has been adopted for the analysis, which results in satisfactory consistency of the theoretical and experimental results.

• Korean journal of food and cookery science
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• v.19 no.2
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• pp.241-253
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• 2003

Changes in chemical, microbiological quality of pan fried oak mushroom and meat, soy sauce glazed hair tail and roasted dodok in wrap packaging, top sealing, vacuum packaging were evaluated during storage 25$^{\circ}C$, 4$^{\circ}C$, -18$^{\circ}C$ for 5 days. The results were as follows: 1) The cases of chilled and frozen storage, there were small increases in the pH from the first day, with no differences between the different packaging methods, with the exception of the vacuum packaging, which was lower. The pH and Aw of the roasted dodok were lower than those of the other foods. The Aw for all three foods at room temperature significantly decreased in the wrap packaging and top sealing on day one, but the rate of reduction was lower when in chilled storage. The VBN increased with increasing length of storage, and temperatures, but the rate of increase was lower in the top sealing and vacuum packaging. The VBN of roasted dodok was considerably lower than with the other foods. The POV increased significantly on the first day or room temperature storage and the rate or increase was low in chilled End frozen storages, and in the vacuum packaging. 2) SPC of the roasted dodok at room temperature increased significantly within five days of storage. but was inhibited within five days in the vacuum packaging with chilled storage. The SPC of the soy sauce glazed hair tail was low in the top sealing and vacuum packaging when in chilled storage. The coliform of the pan fried oak mushroom and meat. on the fifth day of room temperature storage, was close to hazardous conditions for the wrap packaging. From the third day of chilled storage, few coliform were detected in the pan fried oak mushroom and meat, or the soy sauce glazed hair tail, but not in the vacuum packaging, within five days, for all three foods in frozen storage. The S. spp. had exceeded the standard in the wrap packaging and top sealing with the pan fried oak mushroom and meat on the third day at room temperature, but was not detected in the vacuum packaging within five days, and exceeded the standard in the wrap packaging on the fifth day of chilled storage. S. spp. was not detected in the soy sauce glazed hair tail within five days at all storage temperatures. S. spp. was not detected in the roasted dodok within five days of chilled and frozen storage, but was detected from the third day in the wrap packaging. and the fifth in the top sealing, at room temperature, which exceeded the standard. Sal. spp., V parahaemolyticus, E. coli O157:H7, L. monocytogenes were not detected. 3) The Aw was found to be influenced by storage temperature, period and packaging method, while the VBN was significantly influenced by the storage temperature and period. Regarding the SPC, the pan fried oak mushroom and meat was affected by the storage temperature and period, while the soy sauce glazed hair tail was influenced by the packaging method and storage period. The roasted dodok's microbiological quality was influenced by the method of packaging. The chemical, microbiological quality of home-delivered meals were preserved to be five days in the vacuum packaging, at. chilled and frozen storage.

• Journal of the Korean Recycled Construction Resources Institute
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• v.6 no.4
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• pp.297-303
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• 2018

With the changing trend of the building construction to high rising and large scaling, the underground structure has been increased, and its usage also increased and variety. Hence, to protect the underground structure against underground water, various water proofing methods has been developed. Among the many water proofing methods, the combined water proofing method using both asphalt seal and sheet has been widely used to secure the sufficient performance and decrease the construction failure. However, during the summer period of extremely high temperature conditions, the asphalt sealing materials were separated and leaked into the structure. Therefore, the aim of the research is to provide the quality standard of asphalt sealing material based on the various temperature changes depending on seasons. According to the experimental results, the temperature of the sealing materials applied on the slab was increased up to $54^{\circ}C$ which was $3^{\circ}C$ higher than the structure temperature of $51^{\circ}C$. Based on the melting test for asphalt sealing materials applied on the outside wall of the structure, in the case of water-dispersing typed materials showed significant melting down due to its slow evaporation and low viscosity. Furthermore, from the accelerated test conducted indoor conditions, a solvent-type and water-dispersing typed materials showed significant melting down due to their low viscosity and melting point in ambient conditions. Based on these results, viscosity and melting point are found as the important factors on asphalt sealing materials' quality, and it is necessary to designate the quantitative level of the viscosity and melting point for quality control.

• Journal of the Korean Ceramic Society
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• v.48 no.1
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• pp.63-68
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• 2011

The investigation is directed to lead free (Pb-free) frits that can be used for organic light emitting diode, plasma display screen devices and other sealing materials. $P_2O_5$-SnO system glasses have been prepared for Pb-free low temperature glass frit. Structure and properties of the glasses with the composition SnO-$xB_2O_3-(60-x)P_2O_5$ (x=0, 5, 10, 15, 20, 25, 30, 35, 40 mol%) were characterized by infrared spectra (IR), X-ray diffraction(XRD), Density, Molar volume, Thermo mechanical analysis(TMA) and weight loss after immersion test. Glass transition temperature($T_g$), dilatometric softening temperature($T_d$) and chemical durability increased, and coefficient of thermal expansion($\alpha$) decrease with the substitution of $B_2O_3$ for $P_2O_5$ in the range of 0~25 mol%.

• Korean journal of food and cookery science
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• v.16 no.2
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• pp.99-111
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• 2000

The purpose of this study was to assess the qualities of cook/chilled soy sauce-glazed soybean curd with various packaging conditions as a trial to develop health-oriented convenience foods. The effects of three packaging methods, linear low density-polyethylene (LLD-PE), top sealing, and modified atmosphere packaging(MAP) on the shelf-life of HACCP-based cook/chilled soy sauce-glazed soybean curd were evaluated during 20 days of chilled storage in terms of time-temperature, microbiological (total aerobic plate count, psychrotrophic plate count, coliform, and fecal coliform count), chemical(pH and peroxide value(POV)), and sensory evaluation. The results of microbiological and chemical analyses were within the limits of the microbial and chemical standards for all phases after cooking. No significant differences were detected in microbial counts of the samples for all three packaging methods. However, sensory evaluation indicated that the top sealing and MAP methods showed a longer shelf-life than LLD-PE packaging. Recommended shelf-life of the product was 12 days for LLD-PE packaging, and 16 days for both top sealing and MAP. In conclusion, MAP was considered as the most effective packaging method for assuring microbial and sensory quality of this cook/chilled product.

• Elastomers and Composites
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• v.53 no.4
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• pp.213-219
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• 2018

The degradation mechanism and physical properties of an FKM O-ring were observed with thermal aging in this experiment. From X-ray photoelectron spectroscopy (XPS) analysis, we could observe carbon (285 eV), fluoro (688 eV), and oxygen (531 eV) peaks. Before thermal aging, the concentration of fluoro atoms was 51.23%, which decreased to 8.29% after thermal aging. The concentration of oxygen atoms increased from 3.16% to 20.39%. Under thermal aging, the FKM O-ring exhibited debonding of the fluoro-bond by oxidation. Analysis of the C1s, O1s, and F1s peaks revealed that the degradation reaction usually occurred at the C-F, C-F2, and C-F3 bonds, and generated a carboxyl group (-COOH) by oxidation. Due to the debonding reaction and decreasing mobility, the glass transition temperature of the FKM O-ring increased from $-15.91^{\circ}C$ to $-13.79^{\circ}C$. From the intermittent CSR test, the initial sealing force was 2,149.6 N, which decreased to 1,156.2 N after thermal aging. Thus, under thermal aging, the sealing force decreased to 46.2%, compared with its initial state. This phenomenon was caused by the debonding reaction and decreasing mobility of the FKM O-ring. The S-S curve exhibited a 50% increase in modulus, with break at a low strain and stress state. This was also attributed to the decreasing mobility due to thermal aging degradation.

• Journal of the Korean Society of Safety
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• v.14 no.4
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• pp.78-84
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• 1999

A compact air-preheating type heat exchanger was developed and tested for the ultra-high temperature heat recovery applications. For the direct use of exhaust gases up to $1200^{\circ}C$, the heat exchanger adopted a ceramic core with high strength and low thermal expansion coefficient less than $1{\times}10^{-6}^{\circ}C^{-1}$. The ceramic core was fabricated by special extrusion and bonding techniques. To minimize thermal stresses in the core, spring-loaded sealing mechanism was designed and successfully installed. 1-pass air flow scheme was adopted for the compactness and cost-savings. The pressure test for the ceramic core showed no failure under 35 kPa and less than 3% leak under 7 kPa. Flue gas simulation system was developed to investigate the performance of the heat exchanger. The test results showed normal operations of the heat exchanger up to $1200^{\circ}C$ of exhaust gases and relatively high heat recovery efficiencies of 31～39% depending upon exhaust gas temperatures..

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 1999.02a
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• pp.173-176
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• 1999

Vacuum insulated pipes (VIP) are one of the important equipments for cryogenic fluids' transfer. Flange type of VIP, which can easily be installed at the site, uses a set of male and female bayonet with very small gap between them. In order to prevent leakage of liquid from inner pipe to bayonet. Teflon or Kel-F is located outside both the inner pipe of male and the guide of female. Even though liquid may leak at room temperature, it cannot leak at cryogenic temperature since Teflon shrinks much more than pipes and adheres closely to the inner pipe and guide. Teflon seal method has the advantage of easy fabrication, low cost and effective sealing compared to the conventional method.