• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.331-331
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• 2009

Hafnium oxide ($HfO_2$) attracted by one of the potential candidates for the replacement of si-based oxides. For applications of the high-k gate dielectric material, high thermodynamic stability and low interface-trap density are required. Furthermore, the amorphous film structure would be more effective to reduce the leakage current. To search the gate oxide materials, metal-insulator-metal (MIM) capacitors was fabricated by pulsed laser deposition (PLD) on indium tin oxide (ITO) coated glass with different oxygen pressures (30 and 50 mTorr) at room temperature, and they were deposited by Au/Ti metal as the top electrode patterned by conventional photolithography with an area of $3.14\times10^{-4}\;cm^2$. The results of XRD patterns indicate that all films have amorphous phase. Field emission scanning electron microscopy (FE-SEM) images show that the thickness of the $HfO_2$ films is typical 50 nm, and the grain size of the $HfO_2$ films increases as the oxygen pressure increases. The capacitance and leakage current of films were measured by a Agilent 4284A LCR meter and Keithley 4200 semiconductor parameter analyzer, respectively. Capacitance-voltage characteristics show that the capacitance at 1 MHz are 150 and 58 nF, and leakage current density of films indicate $7.8\times10^{-4}$ and $1.6\times10^{-3}\;A/cm^2$ grown at 30 and 50 mTorr, respectively. The optical properties of the $HfO_2$ films were demonstrated by UV-VIS spectrophotometer (Scinco, S-3100) having the wavelength from 190 to 900 nm. Because films show high transmittance (around 85 %), they are suitable as transparent devices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.295-296
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• 2009

There are various application of liquid crystal materials to devices, especially, blue phase liquid crystal (BPLC) and nano-structured liquid crystal mixture have been studied recently because BPs existing temperature range has been expanded by polymer-stabilization and liquid crystal has been confined in room which has certain coherence length so that their particular characters, such as fast response time and optically isotropic state at no electric field, could apply to advanced liquid crystal display devices. However, there is an crucial problem which is high operating voltage from low Kerr constant and limited electric field utilization using in-plain electric field. In this paper, we will analyze cell structure in the way of using electric field and show effective electric field utilization to reduce operating voltage.

• 마이크로전자및패키징학회지
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• 제11권3호
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• pp.91-97
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• 2004

PZT 박막을 rf-마그네트론 스퍼터링으로 $Pt/Ti/SiO_2/Si$ 기판 위에 형성시켰다. $5\%$ 과잉 PbO 를 포함한 bulk PZT 타겟을 사용하였다. 상온에서 PZT 박막을 얇게 입힌 후 나머지 두께를 $650^{\circ}C$에서 in-situ 방법으로 형성시켰다. 강유전 특성을 갖는 PZT 상은 $650^{\circ}C$에서 형성되었다. 2단계 스퍼터링에 의해 누설전류 특성을 크게 증진시킬 수 있었고, 적절한 두께의 상온층을 포함시킨 경우 $2{\times}10^{-7}A/cm^2$의 매우 작은 누설전류를 나타냈다. 누설전류 기구에 대한 조사 결과, 여러 조건에서 제조된 PZT 박막의 전기전도는 모두 bulk-limit 기구에 의한 것임을 알 수 있었다.

• 한국지반공학회논문집
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• 제32권6호
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• pp.17-26
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• 2016

지반의 동결-융해 과정에 의한 지반구조물의 거동 특성을 이해하기 위해서는 동결에 의한 지반의 상변화와 구조물과의 상호작용에 대한 연구가 필요하다. 본 연구에서는 기존의 동상 팽창 실험결과에 대한 역해석을 수행하여 얼음포화도에 따란 탄성계수 모델식을 제시하였다. 실트지반은 화강풍화토와 모래지반에 비하여 탄성계수가 얼음포화도에 대하여 매우 민감하고, 화강풍화토는 실트에 비하여 초기 포화도가 탄성계수에 미치는 영향이 큰 것으로 나타났다. 매설 냉각가스관에 대한 수치해석은 가스관 주변의 연중 동결 영역이 외부 동결하중에 대하여 shield 역할을 하여 추가적인 외력의 영향은 상대적으로 작은 것으로 나타났다. 그리고 모래로 치환된 지반에 설치된 가스관은 주변 원지반(화강풍화토)과 치환 모래의 상대적인 탄성계수의 차이로 히빙량이 크게 나타나지만, 외부하중을 효과적으로 재분배하여 안정적인 응력상태에 도달함을 알 수 있다.

• 대한기계학회논문집B
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• 제36권11호
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• pp.1135-1140
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• 2012

마스크를 이용하여 니켈 시드층의 형성 후 실버 도금을 통해 태양전지 상부전극을 형성하는 2 단계 전극형성 공정이 태양전지의 고효율화 방안으로 제안되었다. 본 연구에서는, 자외선 경화형 혹은 상변화 잉크를 고비용의 인쇄공정을 통해 마스크를 형성하는 방법을 대신하여, 코팅과 레이저의 복합공정을 통해 마스크를 형성하는 방법에 대해 제안하도록 한다. 마스크를 형성하는 물질로서 저비용의 저융점 왁스 혹은 플루오르카본 용액을 태양전지 웨이퍼 상에 코팅 후 레이저로 선택적으로 제거하여 전극패턴을 형성하였으며, 플루오르카본 용액 코팅이 왁스 코팅보다 패턴 균일도 측면에서 우수할 뿐만 아니라 통계적으로 0.16% 태양전지 효율증대를 유발한다는 점이 발견되었다.

• 에너지공학
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• 제5권2호
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• pp.176-182
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• 1996

소형의 고온 고압 반응장치에서의 석탄액화시 흑액, 리그닌, NaOH, 물, 나무 등을 첨가제로 사용하여 375$^{\circ}C$ 근처에서의 액체생성물의 수율과 비점분포를 분석하였다. 흑액을 석탄액화 과정 중에 첨가하게 되면 석탄액화율이 38.6% 정도 증가하나, 액화율 상승효과의 대부분은 NaOH 때문인 것으로 판단되며, 흑액 중에 포함된 황화합물은 액화과정에서 수소와 결합함으로서 휘발성의 자극성 악취를 발생시키기 때문에 불리한 요인이 될 수 있다. 액화공정에 물이 존재하면 액화 수율에는 변화가 없었으나 액화생성물 중에는 저비점 성분이 증가되며, 가스 중에는 CO가 줄고, $CO_2$성분이 증가되었다. 나무를 석탄액화시 첨가하면 생성물 중 가스의 비율이 증가하고 액체생성물도 다소 증가하게 되는데, 석탄전환율로 보면 나무의 첨가효과는 거의 무시할 수 있는 값이며, 액체 생성물 수율만으로 보면 375$^{\circ}C$에서는 3%, 40$0^{\circ}C$에서는 약 8%정토의 액체생성물의 수율 증가를 보여주었으며, 4$25^{\circ}C$에서는 가스생성물의 증가로 액체생성물의 오히려 감소하였다.

• 한국주조공학회지
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• 제31권2호
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• pp.66-70
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• 2011

Hot dip aluminizing (HDA) is widely used in industry for improving corrosion resistance of material. The formation of intermetallic compound layers during the contact between dissimilar materials at high temperature is common phenomenon. Generally, intermetallic compound layers of $Fe_2Al_5$ and $FeAl_3$ are formed at the Al alloy and Fe substrate interface. In case of cast iron, high contact angle of graphite existed in the matrix inhibits the formation of intermetallic compound layer, which carry with it the disadvantage of a reduced reaction area and mechanical properties. In present work, the process for the removal of graphite existed on the surface of specimen has been investigated. And also HDA was proceeded at $800^{\circ}C$ for 3 minutes in aluminum alloy melt. The efficiency of graphite removal was increased with the reduction of particle size in sanding process. Graphite appears to be present both in the region of melting followed by re-solidification and in the intermetallic compound layer, which could be attributed to the fact that the surface of cast iron is melted down by the formation of low melting point phase with the diffusion of Al and Si to the cast iron. Intermetallic compound layer consisted of $Fe(Al,Si)_3$ and $Fe_2Al_5Si$, the layer formed at cast iron side contained lower amount of Si.

• 한국전기전자재료학회논문지
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• 제23권11호
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• pp.854-858
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• 2010

In this study, we have investigated the effects of Cr dopant on the sintering and electrical properties of ZnO-$Sb_2O_3$ (ZS) ceramics for varistor application. Spinel phases including $\alpha-$ and $\beta$-type was formed at ZS system and $\alpha$-spinel was stabilized by Cr doping in ZS system. Densification of ZS and ZSCr system was retarded to $1000^{\circ}C$ by the formation of spinel at $800^{\circ}C$. The morphology and its distribution of spinel phases in ZS system was homogeneous but disturbed by Cr doping. In ZSCr the densification of ZnO compared with ZS system was more retarded by low concentration of Zn interstitial defects induced by Cr doping in addition to the effect of spinel phase formation. The defects in each system were identified as attractive coulombic center (ZS: 0.13 eV, ZSCr: 0.12 eV) and singly charged oxygen vacancy $V_0^{\cdot}$ (ZSCr: 0.33 eV). In all ZS and ZSCr system have week varistor behavior by the formation of double Schottky barrier at grain boundary but its stability of barrier was very sensitive to sintering temperature.

• 한국세라믹학회지
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• 제35권4호
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• pp.311-318
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• 1998

The reaction bonded alumina ceramics with reinforced particles which have low shrinkage were pro-duced by blending of SiC or TiC or ZrO2 powders to the mixture of Al metal and Al2O3 powder. The powd-ers were attrition milled isostantically pressed and preheated tio 110$0^{\circ}C$ with a heating rate of $1.5^{\circ}C$/min The specimens were then sintered at the temperature range 1500 to 1$600^{\circ}C$ for 5 hours with a heating rate of 5$^{\circ}C$/min. The specimens showed 5-9% weight gain and 2-9% dimensional expansion through the complete oxidation of Al after preheating up to 11--$^{\circ}C$ the overall dimensional change of the specimens after the reaction sintering at 1500-1$600^{\circ}C$ was 6-12% The maximum densities were 92% theoretical. The fine grain-ed(average grain size :0.4 ${\mu}{\textrm}{m}$) microstructure were observed in the specimen with ZrO2 and SiC. But the microstructure of specimen with TiC was relatively coarse.(average grain size : 2.1 ${\mu}{\textrm}{m}$) The mullite phase was formed by the reaction of Al2O3 and SiO2 in a specimen with SiC. In the TiC contained specimen TiC was oxidized into TiO2 and finally reacted with Al2O3 to form Al2TiO5 during sintering.

• 한국전기전자재료학회논문지
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• 제23권6호
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• pp.477-480
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• 2010

In this study, we fabricate 3 wt% $Li_2CO_3$ doped $(Ba,Sr)TiO_3$ thick films on the Ag/Pd bottom electrode printed $Al_2O_3$ substrates for the LTCCs (low temperature co-fired ceramics) applications. From the X-ray diffraction analysis, 3 wt% $Li_2CO_3$ doped BST thick films on the Ag/Pd printed $Al_2O_3$ substrates, which sintered at $900^{\circ}C$, showed perovskite structure without any pyro phase. The dielectric properties of 3 wt% $Li_2CO_3$ doped BST thick films are measured from 1 kHz to 1 MHz. To investigate the electrical properties of 3 wt% $Li_2CO_3$ doped BST thick films, we employ the impedance spectroscopy. The complex impedance of 3 wt% $Li_2CO_3$ doped BST thick films are measured from 20 Hz to 1 MHz at the various temperatures.