Boron Diffusion of Low Concentration through Poly $Poly{\cdot}Si-SiO_2$
($Poly{\cdot}Si-SiO_2$ 를 통한 저농도 붕소확산)
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- Journal of the Korean Institute of Telematics and Electronics
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- v.24 no.2
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- pp.248-253
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- 1987