• Title/Summary/Keyword: Localized electrochemical deposition

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Microfabrication by Localized Electrochemical Deposition Using Ultra Short Pulses (초단펄스 전해증착을 이용한 마이크로 형상 제작)

  • 박정우;류시형;최덕기;주종남
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1199-1202
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    • 2003
  • In this research, microfabrication technique using localized electrochemical deposition is presented. Electric field is localized near the tip end region by applying ultra short pulses. Platinum tip is used as the counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The deposition characteristics such as size, shape, and structural density according to pulse duration and applied voltage are investigated. Micro-columns less than 10 $\mu\textrm{m}$ in diameter are fabricated using the presented technique. The process can be potentially used for three dimensional metal structure fabrications with micrometer feature size.

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Pulsed Electrochemical Deposition for 3D Micro Structuring

  • Park, Jung-Woo;Ryu, Shi-Hyoung;Chu, Chong-Nam
    • International Journal of Precision Engineering and Manufacturing
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    • v.6 no.4
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    • pp.49-54
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    • 2005
  • In this paper, micro structuring technique using localized electrochemical deposition (LECD) with ultra short pulses was investigated. Electric field in electrochemical cell was localized near the tool tip end region by applying pulses of a few hundreds of nano second duration, Pt-Ir tip was used as a counter electrode and copper was deposited on the copper substrate in mixed electrolyte of 0.5 M $CuSO_4$ and 0.5 M $H_2SO_4$, The effectiveness of this technique was verified by comparison with ECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration were investigated. The proper condition was selected based on the results of the various experiments. Micro columns less than $10{\mu}m$ in diameter were fabricated using this technique. The real 3D micro structures such as micro spring and micro pattern were made by the presented method.

Microfabrication by Localized Electrochemical Deposition Using Ultra Short Pulses (초단펄스 응용 전해증착에 의한 마이크로 구조물 제작)

  • 박정우;류시형;주종남
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.11
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    • pp.186-194
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    • 2004
  • In this research, microfabrication technique using localized electrochemical deposition (LECD) with ultra short pulses is presented. Electric field is localized near the tool tip end region by applying a few hundreds of nano second pulses. Pt-Ir tip is used as a counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The effectiveness of this technique is verified by comparison with LECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration are investigated. The proper condition is selected from the results of the experiments. Micro columns less than 10 $\mu$m in diameter are fabricated using this technique. The real 3D micro structures such as micro pattern and micro spring can be fabricated by this method. It is suggested that presented method can be used as an easy and inexpensive method for fabrication of microstructure with complex shape.

Fabrication of EDM Electrodes by Localized Electrochemical Deposition

  • Habib, Mohammad Ahsan;Gan, Sze Wei;Lim, Han-Seok;Rahman, Mustafizur
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.2
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    • pp.75-80
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    • 2008
  • The fabrication of complex three-dimensional electrodes for micro electrical discharge machining (micro-EDM) is an important issue in the field of micromachining Localized electrochemical deposition (LECD) is a simple and inexpensive technique for fabricating micro-EDM electrodes. This study presents a new process for manufacturing electrodes with complex cross-sections using masks of different shapes, In this process, a non-conductive mask is placed between an anode and cathode that are immersed in a plating solution of acidified copper sulfate. The LECD is achieved by applying a pulsed voltage between the anode and cathode, which are separated by a small distance. In this setup, the cathode is placed above the anode and the mask, so that the deposited electrode can be used directly for EDM without changing the tool orientation. We found that the microstructure of the deposited electrode is influenced by the concentration of the plating solution and organic additives. Moreover, the values of the voltage, frequency, and duty cycle of the pulsed input have significant effects on the microstructure of the fabricated electrode. Finally, the optimum values of the voltage, frequency, and duty cycle were determined for the most effective fabrication of complex-shaped electrodes.

A Study of Localized Corrosion Mechanisms in the Multilayered Coatings by Cathodic Arc Deposition (음극아크증착법으로 합성한 다층박막의 국부부식 기구에 관한 연구)

  • 김호건;안승호;이정호;김정구;한전건
    • Journal of the Korean institute of surface engineering
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    • v.36 no.4
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    • pp.301-306
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    • 2003
  • Multilayered WC-Ti/suv $1-x/Al_{x}$ N coatings were deposited on AISI D2 steel using cathodic arc deposition (CAD) method. These coatings contain structural defects such as pores or droplets. Thus, the substrate is not completely isolated from the corrosive environment. The growth defects (pores, pinholes) in the coatings are detrimental to corrosion resistance of the coatings used in severe corrosion environments. The localized corrosion behavior of the coatings was studied in deaerated 3.5 wt.% NaCl solution using electrochemical techniques (potentiodynamic polarization test) and surface analyses (GDOES, SEM, AES, TEM). The porosity was calculated from the result of potentiodynamic polarization test of the uncoated and coated specimens. The calculated porosity is higher in the $WC-Ti_{0.6}$ $Al_{0.4}$ N than others, which is closely related to the packing factor. The positive effects of greater packing factor act on inhibiting the passage of the corrosive electrolyte to the substrate and lowering the localized corrosion kinetics. From the electrochemical tests and surface analyses, the major corrosion mechanisms can be classified into two basic categories: localized corrosion and galvanic corrosion.

Electrochemical Synthesis of Dumbbell-like Au-Ni-Au Nanorods and Their Surface Plasmon Resonance

  • Park, Yeon Ju;Liu, Lichun;Yoo, Sang-Hoon;Park, Sungho
    • Journal of Electrochemical Science and Technology
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    • v.3 no.2
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    • pp.57-62
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    • 2012
  • In this report, we demonstrate that the longitudinal localized surface plasmon resonance mode can be suppressed when the nanorods were in dumbbell shape. The seed nanorods were synthesized by electrochemical deposition of metals into the pores of anodic aluminum oxide templates. The dumbbell-like nanorods were grown from seed Au-Ni-Au nanorods by a rate-controlled seed-mediated growth strategy. The selective deposition of Au atoms onto Au blocks of Au-Ni-Au nanorods produced larger diameter of Au nanorods with bumpy surface resulting in dumbbell-like nanorods. The morphology of nanorods depended on the reduction rate of $AuCl_4^-$, slow rate producing smooth surface of Au nanorods, but high reduction rate producing bumpy surface morphology. Through systematic investigation into the UV-Vis-NIR spectroscopy, we found that the multiple localized surface plasmon resonance (LSPR) modes were available from single-component Au nanorods. And, their LSPR modes of Au NRs with bumpy surface, compared to the smooth seed Au NRs, were red-shifted, which was obviously attributed to the increased electron oscillation pathways. While the longitudinal LSPR modes of smoothly grown Au NRs were blue-shifted except for a dipole transverse LSPR mode, which can be interpreted by decreased aspect ratio. In addition, dumbbell-like nanorods showed an almost disappeared longitudinal LSPR mode. It reflects that the plasmonic properties can be engineered using complex nanorods structure.

Effect of Hydrodynamic Condition on the Electrochemical Behavior of Various Metals in 3.5 wt% NaCl Solution

  • Pan, Szu-Jung;Hadinata, Samuel-Sudibyo;Kao, Ruey-Chy;Tsai, Wen-Ta
    • Corrosion Science and Technology
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    • v.14 no.5
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    • pp.218-225
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    • 2015
  • The electrochemical behaviors of various metals with and without diamond-like-carbon (DLC) coating in 3.5 wt% NaCl solution were investigated. The effect of hydrodynamic conditions was focused by employing a rotating disc electrode (RDE). The experimental results showed that each bare metal had a more positive corrosion potential and a higher corrosion rate due to enhanced oxygen transport at the higher rotating speed of the RDE. DLC coating caused a substantial increase in the corrosion resistance of all metals studied. However, localized corrosion was still found in the DLC-coated metal at sites where deposition defects existed. Surface morphology examination was performed after the electrochemical test to confirm the roles of hydrodynamic conditions and DLC coating.

Optical and Hydrophobic Properties of Ag Deposited ZnO Nanorods on ITO/PET (ITO/PET 기판 위에 성장된 산화아연 나노로드에 형성된 은 입자의 광학적 특성 및 소수성 표면 연구)

  • Ko, Yeong-Hwan;Kim, Myung-Sub;Yu, Jae-Su
    • Journal of the Korean Vacuum Society
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    • v.21 no.4
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    • pp.205-211
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    • 2012
  • We investigated the optical and hydrophobic properties of the deposited silver (Ag) zinc oxide (ZnO) nanorods (NRs) on flexible indium tin oxide (ITO) coated polyethylene terephthalate (PET) substrates (i.e., ITO/PET). The ZnO NRs were grown by an electrochemical deposition using a sputtered ZnO seed layer and the Ag was deposited by using a thermal evaporator. For comparison, the same fabrication process was carried out on the bare ITO/PET without ZnO NRAs. Due to the discrete surface of ZnO NRs, the deposited Ag was formed as nano-scale particles, while the Ag became film-like for bare ITO/PET. In order to control the size and amount of Ag particles, the Ag deposition time was changed from 100 to 600 s. When the deposition time was increased, the Ag particles became larger and denser, and the absorptance was increased. This enhanced absorptance may be due to the localized surface plasmon resonance of Ag particles. Furthermore, the relatively high hydrophobicity was observed for the deposited Ag on the ZnO NRs/ITO/PET. These improved optical and surface properties are expected to be useful for flexible photovoltaic and optoelectronic devices.

Growth of Silicon Nanowire Arrays Based on Metal-Assisted Etching

  • Sihn, Donghee;Sohn, Honglae
    • Journal of Integrative Natural Science
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    • v.5 no.4
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    • pp.211-215
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    • 2012
  • Single-crystalline silicon nanowire arrays (SiNWAs) using electroless metal-assisted etchings of p-type silicon were successfully fabricated. Ag nanoparticle deposition on silicon wafers in HF solution acted as a localized micro-electrochemical redox reaction process in which both anodic and cathodic process took place simultaneously at the silicon surface to give SiNWAs. The growth effect of SiNWs was investigated by changing of etching times. The morphologies of SiNWAs were obtained by SEM observation. Well-aligned nanowire arrays perpendicular to the surface of the silicon substrate were produced. Optical characteristics of SiNWs were measured by FT-IR spectroscopy and indicated that the surface of SiNWs are terminated with hydrogen. The thicknesses and lengths of SiNWs are typically 150-250 nm and 2 to 5 microns, respectively.

A Study on Corrosion Characteristics of Multilayered WC- $Ti_{1-x}$A $l_{x}$N Coatings Deposited on AISI D2 Steel

  • Ahn, S.H.;Yoo, J.H.;Kim, J.G.;Lee, H.Y.;Han, J.G.
    • Journal of the Korean institute of surface engineering
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    • v.36 no.1
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    • pp.79-84
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    • 2003
  • $WC-Ti_{1}$ -xA $l_{x}$ N multilayered coatings are performed by their periodically repeated structures of lamellae of WC-Ti/$WC-Ti_{1}$ -xA $l_{x}$ Nmaterials. The $WC-Ti_{1}$ -xA $l_{x}$ N coatings with variable Al content were deposited onto AISI D2 steel by cathodic arc deposition (CAD) method. The electrochemical behavior of multilayered $WC-Ti_{1}$ -xA $l_{x}$ N coatings with different phases (WC- Ti$0.6/Al_{0.4}$ N, $WC-Ti_{0.53}$$Al_{0.47}$N, $WC-Ti_{0.5}$ $Al_{0.5}$ N and $WC-Ti_{ 0.43}$$Al_{0.57}$ N) was investigated in deaerated 3.5% NaCl solution at room temperature. The corrosion behaviors for the multilayered coatings were investigated by electrochemical techniques (potentiodynamic polarization) and surface analyses (X-ray diffraction (XRD), scanning electron microscopy (SEM), and glow discharge optical emission spectroscopy (GDOES)). In the petentiodynamic polarization test, the corrosion current density of $WC-Ti_{0.5}$$Al_{0.5}$N was lower than others.