• 반도체디스플레이기술학회지
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• 제2권1호
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• pp.25-29
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• 2003

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be I-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time, the film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time varing film thickness is analyzed according to the wafer spin speed, the various solvent fraction in the coating liquid, and the various solvent vapor fraction in the bulk of the overlying gas during the spin coating is estimated.

• 대한기계학회논문집B
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• 제27권1호
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• pp.17-24
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• 2003

A mathematical model of the hydrodynamic and heat transfer performances of two-phase flow (gas-liquid) in thin film region of micro channel is proposed. For the formulation of modeling, the flow of the vapor phase and the shear stress at the liquid-vapor interface are considered. In this work, disjoining pressure and capillary force which drive the liquid flow at the liquid-vapor interface in thin film region are adopted also. Using the model, the effects of the variations of channel height and heat flux on the flow and heat transfer characteristics are investigated. Results show that the influence of variation of vapor pressure on the liquid film flow is not negligible. The heat flux in thin-film region is the most important operation factor of micro cooler system.

• 대한기계학회논문집
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• 제19권12호
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• pp.3317-3328
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• 1995

The objective of the present study is to predict the characteristics of heat and mass transfer around an evaporative condenser. Numerical calculations have been performed using multi-zone method to investigate heat transfer rate and evaporation rate with the variation of inlet condition(velocity, relative humidity and temperature) of the moist air, the flow rate of the cooling water and the shape of the condenser tube. From the results it is found that the profile of heat flux is the same as that of evaporation rate since heat transfer along the gas-liquid interface is dominated by the transport of latent heat in association with the vaporization(evaporation) of the liquid film. The evaporation rate and heat transfer rate is increased as mass flow rate increases or relative humidity and temperature decrease respectively. But the flow rate of the cooling water hardly affect the evaporation rate and heat flux along the gas-liquid interface. The elliptic tube which the ratio of semi-minor axis to semi-major axis is 0.8 is more effective than the circular tube because the pressure drop is decreased. But the evaporation rate and heat flux shown independency on the tube shape.

• 한국안전학회지
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• 제19권2호
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• pp.61-68
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• 2004

The evaporation phenomena of waterr droplet which has sodium acetate trihydrate($CH_3COONa{\cdot}3H_2O$) as a fire suppression additive were studied. Solutions of sodium salt up to 50% and heated stainless-steel surface were used in the experiment. The evaporation process was recorded using a charge-coupled-device camera at 120 frames per second. The average evaporation rate of the sodium acetate trihydrate soluation was lower than that of pure water at a given surface temperature and decreased with the concentration increase due to the precipitation of salt in the liquid film and change of surface tension. The variation of liquied film diameter was measured by time and it was increased by the hot surface temperature increase.

• 대한기계학회논문집B
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• 제27권2호
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• pp.188-196
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• 2003

Liquid-assisted cleaning technology utilizing a nanosecond laser pulse is effective for removing submicron particulates from a variety of solid substrates. In the technique, saturated vapor is condensed on a solid surface to form a thin liquid film and the film is evaporated explosively by laser heating. The present work studies the role of liquid-film evaporation in the cleaning process. First, optical interferometry is employed for in-situ monitoring the displacement of the laser-irradiated sample in the cleaning process. The experiments are performed for estimating the recoil force exerted on the target with and without liquid deposition. Secondly, time-resolved visualization and optical reflectance probing are also conducted for monitoring the phase-change kinetics and plume dynamics in vaporization of thin liquid layers. Discussions are made on the effect of liquid-film thickness and dynamics of plume and acoustic wave. The results confirm that cleaning force is generated when the bubble nuclei initially grow in the strongly superheated liquid.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.272-279
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• 2001

The objective of this paper is the investigation of the relationships between the surface roughness and film evaporative characteristics of the surface. For example, when the droplet of liquid is in contact with the solid surface, its behavior strongly depends on the surface characteristics. The material properties and geometry - profile shape, waviness, roughness - of the surfaces have strongly influenced on the wettability of the droplet. To investigate the effect of the surface roughness on the film evaporation, firstly, the characteristics of wettabilities were studied according to contact angle and surface tree energy of specimens with various roughness heights. Secondly, the experimental test were carried out on capacities of the tubes diversly roughened by using different kinds of emery papers. Finally, the relationships between the film evaporation characteristics and surface roughness were explained by means of the correlation of contact angle and surface free energy with surface roughness and the influences of surface tree energy on the heat transfer performance.

• 한국전기전자재료학회논문지
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• 제18권11호
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• pp.1024-1027
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• 2005

By using $45^{\circ}$ obliqued evaporation method with electron beam system, uniformly vertical liquid crystal (LC) alignment was achieved. And a high pretilt angles of about $2.5^{\circ}$ were measured. Also, it was verified that there are no variations of pretilt angle as a function of $SiO_x$ thin film thickness 20 nm and 50 nm. A good LC alignment states were observed at annealing temperature of $250^{\circ}C$. Consequently, the high pretilt angle and the good thermal stability of LC alignment by $45^{\circ}$ obliqued electron beam evaporation method on the $SiO_x$ thin film can be achieved.

• 한국응용과학기술학회지
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• 제12권2호
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• pp.29-39
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• 1995

The phase separated structure and the electro-optical properties of the (polymer/liquid) crystal : LC) composite film strongly depended on the weight fraction of LC in it. The continuous LC phase was formed in a three-dimensional polymer network when the LC weight fraction was above 40wt%. The aggregation structure of the composite film could be controlled by controlling the solvent evaporation velocity during the film preparation process. The smaller LC domains or channels were formed in the case of the faster solvent evaporation velocity. The composite film exhibited reversible light scattering-light transmission switching upon electric field -OFF and -ON states, respectiverly. The light scattering properties of the composite film strongly depended on the spatial distortion of the nematic directors as well as the mismatch in refractive indices between matrix polymer and LC.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.20-26
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• 2002

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be 1-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time various film thickness is analyzed according to the var ious solvent fraction in the coating liquid and in the bulk of the overlying gas and the temperature variation in the liquid film during the spin coating is estimated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.311-312
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• 2005

By using 45$^{\circ}$ obliqued evaporation method with electron beam system, uniformly vertical liquid crystal (LC) alignment was achieved. And a high pretilt angles of about 2.5$^{\circ}$ were measured. Also, it was verified that there are no variations of pretilt angle as a function of $SiO_x$ thin film thickness 20nm and 50nm. A good LC alignment states were observed at annealing temperature of 250$^{\circ}C$. The high pretilt angle and the good thermal stability of LC alignment by 45$^{\circ}$ obliqued electron beam evaporation method on the $SiO_x$ thin film can be achieved.