• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.894-897
• /
• 2004

In this paper, we address a position control scheme for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal forces. Dynamic equations of the stage system are derived based on Newton-Euler method and its special Jacobian matrix describing a relation between the Joint velocity and platen velocity is done. There are proposed two control schemes for positioning, which are Cartesian space controller and Joint space controller. The control performance of the Cartesian space controller is better than the Joint space controller in task space trajectory while the Joint space controller is simpler than the Cartesian space controller in controller realization.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.30 no.5 s.248
• /
• pp.609-614
• /
• 2006

Recently linear motor has been used mainly for high speed feeding performance of machine tools. The advantages of linear motor are not only high speed but high accuracy, because it is not required the coupling and ballscrew for converting rotary to liner motion. Before applying in different moving system, the dynamometer is necessary to test the performance. In Korea, the linear motor is producing in a couple of company However, the liner motor dynamometer is not commercialized yet, like as rotary motor dynamometer. In this paper, a linear motor dynamometer is designed and manufactured using a MR damper. The dynamometer system developed in this study could be used for testing the positioning accuracy fur different loading conditions, traction forces, dynamic performance and so on.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.4
• /
• pp.505-512
• /
• 2011

Linear permanent magnet synchronous motors utilize high-energy product permanent magnet to produce high thrust, velocity and acceleration. Such motors are finding applications requiring high positioning accuracy and speed response, for example, machine tools, in the absence of mechanical gears and ball screw systems. A disadvantage of the linear motors is high power loss in comparison with rotary motors. For the application of the linear motors to machine tools, it is required to use water coolers and to improve the thermal behavior through insulation and structure optimization or control strategies. This paper presents the function of the secondary part of the linear synchronous motor as to the thermal behavior and the improving method. The result shows cooling pipe combined with an insulation layer is a suitable design for improving of the thermal behavior.

• 제어로봇시스템학회:학술대회논문집
• /
• 1993.10a
• /
• pp.133-138
• /
• 1993

This paper presents neural network based position estimation method in slippery environment as an approach to solve one of problems which are engaged in dead reckoning method. Position estimator is composed of slip detector and linear velocity estimator. Both of them are based on the fact that dynamic characteristic of mobile robot in slippery environment is different from the case without slip. To find out the dynamic relation among driving torque, angular acceleration of driving wheel and linear acceleration of mobile robot, accelerometer is used for measuring acceleration of mobile robot and neural network is used for dynamic system identifier in slippery environment.

• Journal of Advanced Marine Engineering and Technology
• /
• v.20 no.1
• /
• pp.31-36
• /
• 1996

In recent years, as the electonic industry has become more advanced, the LPM(Linear Pulse Motor) has appeared in a wide range of applications because of easier control, operation by open-loop control, high positioning accuracy, and retrieval of position or velocity data by the input pulses. In this study, we deal with the development of a position detection device attached to a hybrid LPM in our laboratory. Precise position detection signals could be sensed by the synchronous rectifier method from the LPM stator scale. In addition, we can keep the amplitude constant by using an AGC(Automatic Gain Control) circuit. Experimental results show that the position data is good enough to perform the LPM position control.

• International Journal of Precision Engineering and Manufacturing
• /
• v.9 no.3
• /
• pp.40-45
• /
• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• Proceedings of the KIPE Conference
• /
• 2003.07b
• /
• pp.654-658
• /
• 2003

In this study a control system with variable gain schedule using real speed and moving direction is proposed to control a Permanent Magnet Linear Synchronous Motor (PMLSM) with Z-axis operation structure. The implementation of the controller is designed on the DSP TMS320C32 board. PMLSM is operated by using 4-point absolute positions profile with each velocity, acceleration and deceleration. The direction of the initial angle action for starting is set from the lower limit point to the upper limit point on PMLSM operation stroke. The effectiveness of a control system with variable gain schedule is demonstrated by some experimental results.

• International Journal of Control, Automation, and Systems
• /
• v.2 no.3
• /
• pp.310-318
• /
• 2004

In this paper, an unscented Kalman filter (UKF) for curvilinear motions in an interacting multiple model (IMM) algorithm to track a maneuvering vehicle on a road is investigated. Driving patterns of vehicles on a road are modeled as stochastic hybrid systems. In order to track the maneuvering vehicles, two kinematic models are derived: A constant velocity model for linear motions and a constant-speed turn model for curvilinear motions. For the constant-speed turn model, an UKF is used because of the drawbacks of the extended Kalman filter in nonlinear systems. The suggested algorithm reduces the root mean squares error for linear motions and rapidly detects possible turning motions.

• Journal of the Semiconductor & Display Technology
• /
• v.19 no.4
• /
• pp.18-21
• /
• 2020

Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

• Proceedings of the KIEE Conference
• /
• 2006.07d
• /
• pp.1856-1857
• /
• 2006

The existing automation transfer systems such as AGV(Automated Guided Vehicle) have many problems (maintenance, accuracy, velocity, etc.) and wastes of a vast space and time. Hence we have suggested to LMTT(Linear Motor-based Transfer Technology). This paper deals with fundamental LMTT, and proposes a concept of mass reduction and propulsion control for LMTT when it is starting and reaching an object by using lift-force. By applying optimal controller and the repulsive lift forte in the LMTT, a large percent of vehicle weight is compensated and it reduces friction, then it needs less thrust force to propel the vehicle.