• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.8
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• pp.81-87
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• 2020

A stable rotational-to-linear motion transformation structure using a driving mechanism with 2 degrees of freedom was developed for an orthogonal mechanism to prevent the interference of each axis in 2D motion. In this mechanism, a step motor was used for precise position control. This structure was developed to maneuver workparts in micro particle blast machining experiments. To determine the real-time performance of micro particle blast machining, the control, input, and output were operated simultaneously and precise position control was implemented, using a timer interrupt with multiple execution codes. The two step motors obtained precise position control by removing backlash with a ball-screw mechanism. The device has menu-type control codes for user-friendliness, and real-time sequence control was simultaneously adopted for user control input.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.2575-2580
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• 2005

In this paper, we address two position control scheme; the lead-lag control and the sliding mode control for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal forces. Dynamic equations of the stage system are derived simply. The sliding mode control algorithm is more effective than the lead-lag control algorithm to reduce effects from movements and disturbances of other axis.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.11
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• pp.1042-1048
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• 2012

A 2-axis gimbal system is one of main disturbance sources affecting image jitter response of a satellite. The gimbal system comprises azimuth stage and elevation stage, and these pointing mechanism can be rotated by stepping motors about its azimuth and elevation axes simultaneously. Because of the complex and coupled dynamic motion of the gimbal system, its moment of inertia and structural modes can be changed according to the system configuration, and thus the gimbal system generates complicated and non-linear disturbance characteristics. In order to improve the jitter response of a spacecraft, it is an indispensable process to reduce the micro-vibration disturbance level of the antenna system. In the present research, a 2-axis gimbal system was manufactured and then its micro-vibration test was performed in terms of two types of stepping motors(2-phase and 5-phase). The test results show that the disturbance level of the gimbal system can be reduced by replacing the 2-phase stepping motor with the 5-phase one, and the average disturbance attenuation ratio is 56 % in peak level and 48 % in standard deviation level. The experimental results confirm that it is an efficient jitter reduction method to adopt a high-phase stepping motor.

• Journal of Astronomy and Space Sciences
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• v.20 no.3
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• pp.205-216
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• 2003

The attitude motion of a spin-stabilized, upper-stage spacecraft is investigated based on a two-body model, consisting of a symmetric body, representing the spacecraft, and a spherical pendulum, representing the liquid slag pool entrapped in the aft section of the rocket motor. Exact time-varying nonlinear equations are derived and used to eliminate the drawbacks of conventional linear models. To study the stability of the spacecraft's attitude motion, both the spacecraft and pendulum are assumed to be in states of steady spin about the symmetry axis of the spacecraft and the coupled time-varying nonlinear equation of the pendulum is simplified. A quasi-stationary solution to that equation and approximate resonance conditions are determined in terms of the system parameters. The analysis shows that the pendulum is subject to a combination of parametric and external-type excitation by the main body and that energy from the excited pendulum is fed into the main body to develop the coning instability. In this paper, numerical examples are presented to explain the mechanism of the coning angle growth and how angular momenta and disturbance moments are generated.

• Smart Structures and Systems
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• v.24 no.3
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• pp.303-317
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• 2019

Magneto-rheological fluid (MRF) rotatory dampers are normally used for controlling the constant rotation of machines and engines. In this research, such a device is proposed to act as variable stiffness device to alleviate the rotational oscillation existing in the many engineering applications, such as motor. Under such thought, the main purpose of this work is to characterize the nonlinear torque-angular displacement/angular velocity responses of an MRF based variable stiffness device in oscillatory motion. A rotational hysteresis model, consisting of a rotatory spring, a rotatory viscous damping element and an error function-based hysteresis element, is proposed, which is capable of describing the unique dynamical characteristics of this smart device. To estimate the optimal model parameters, a modified whale optimization algorithm (MWOA) is employed on the captured experimental data of torque, angular displacement and angular velocity under various excitation conditions. In MWOA, a nonlinear algorithm parameter updating mechanism is adopted to replace the traditional linear one, enhancing the global search ability initially and the local search ability at the later stage of the algorithm evolution. Additionally, the immune operation is introduced in the whale individual selection, improving the identification accuracy of solution. Finally, the dynamic testing results are used to validate the performance of the proposed model and the effectiveness of the proposed optimization algorithm.