• Title/Summary/Keyword: Line Defect

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A Comparate Study for the PD Pattern Analysis using Different Type of Sensors Applicable to the On-line Monitoring of GIS (GIS 감시진단용 다양한 센서를 적용한 PD 검출 및 패턴분석 결과 비교연구)

  • Koo Ja-Yoon;Chang Yong-Moo;Choi Jae-Ok;Yeon Man-seung;Lee Ji-Chul
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.5
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    • pp.198-205
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    • 2005
  • Many precedent investigations hate been made for the reliable assessment of the insulation state of large power apparatus for which partial discharge detection is one of tile plausible way. In this work, experimental investigations have been carried out to make the comparison on the PD(partial discharge) pattern analysis related to the five different types of artificial defects such as SFMP (Single Free Moving Particle), MFMP (Multi Free Moving Particle), Void, CFP (Conductor-Fixed Protrusion), EP (Enclosure Protrusion). For each PD pattern, PD detection has been done by tee different types of PD sensors such as HFCT(High Frequency Current Transformer), AE(Acoustic Emission) and UHF(Ultra High Frequency). And, in addition, frequency spectrum by the UHF sensor has been also made for each defect respectively. As a result, it is observed that the possibility of obtaining PD pattern based on PRPD(Phase Resolved Partial Discharge) in connection with the defects tinder investigation is dependant on the type of the sensor while the spectrum analysis is always successful to be achieved for every defect. Therefore, it could be suggested that the nature of PD source can be identified more distinctively when the conventional PRPDA is combined with spectrum analysis.

Characteristics of Slurry Filter for Reduction of CMP Slurry-induced Micro-scratch (CMP 공정에서 마이크로 스크래치 감소를 위한 슬러리 필터의 특성)

  • 김철복;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.7
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    • pp.557-561
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    • 2001
  • Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

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Properties of Defect Initiation and Fatigue Crack Growth in Manufacturing Process of Bearing Metal (베어링메탈 제조공정에 따른 결함발생 및 피로균열 전파특성)

  • Kim, Min-Gun
    • Journal of Industrial Technology
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    • v.35
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    • pp.3-8
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    • 2015
  • A study has been made on defects which are formed in manufacturing processes of engine bearing and also on fatigue crack growth behavior in each step of bearing metal manufacturing. After the first step(sinter brass powder on steel plate ; Series A) many voids are made on brass surface and its size is decreased by the second step(rolling process of sintered plate ; Series B). After the third step(re-sintering step of brass powder and rolling ; Series C) the number of voids is decreased and its type shows line. The time of fatigue crack initiation and the growth rate of fatigue crack are in order of Series A, Series B, Series C. These reasons are that void fosters the crack initiation and growth, and residual stress made by rolling process effects on the crack growth rate in Series B, C. In forming and machining processes by use of final bearing metal, crack was observed at internal corner of flange and peeling off was observed at junction between steel and brass. Owing to the above crack and peeling off, it is considered that there is a possibility of fatigue fracture during the application time.

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Aging Effect on CMP slurry (CMP 실리카 슬러리 입도분석특성)

  • Lee, Woo-Sun;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.12-14
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    • 2003
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP). process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. It is well known that the presence of hard and larger size particles in the CMP slurries increases the defect density and surface roughness of the polished wafers. In this paper, we have studied. aging effect the of CMP slurry as a function of particle size. We prepared and compared the self-developed silica slurry by adding of abrasives before and after annealing. As our preliminary experiment results, we could be obtained the relatively stable slurry characteristics comparable to original silica slurry in the slurry aging effect.

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A Study on Development of Algorithm for Seam Tracking by Considering Weld Defects in Horizontal Fillet Welding (수평필릿용접에서 용접결함을 고려한 용접선 자동추적 알고리즘개발에 관한 연구)

  • 문형순;나석주
    • Proceedings of the KWS Conference
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    • 1996.10a
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    • pp.139-141
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    • 1996
  • Among various welding parameters, the welding current which is inversely proportional to the tip-to-workpiece distance in GMAW is an essential parameter to monitor the GMAW process of horizontal fillet joints. For the case of weld defect such as overlap in horizontal fillet welding, therefore, the signal processing for process monitoring or automatic seam tracking should be modified by considering the weld pool surface geometry including the corresponding weld defect. In other words, the adequate signal processing algorithm is indispensible to improve the performance of the arc sensor. However, arc sensor algorithm already developed usually focus on weld seam tracing but do not considering the weld qualities. In this paper, various experiments were carried out to investigate the tendencies of the weld defects when weaving motion is added, and the experimental method based on 2$^n$ factorial design was proposed for deriving the mathematical model between the leg length and the various welding conditions. Moreover, a signal processing method based on the artificial neural network(Adaptive Resonance Theory) was proposed far discriminating the current signal of sound weld beads from that of weld beads with overlap. Finally, the algorithm for weld seam tracking combined with the mathematical modeling and the signal processing method was carried out to track the weld line in conjunction with the improvement of the weld qualities. The reliability of the proposed algorithms were evaluated through various experiments, which showed that the proposed algorithms could be effectively used for arc welding automation.

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CMP slurry aging effect by Particle Size analysis (입도 분석을 통한 CMP 슬러리 에이징 효과)

  • Shin, Jae-Wook;Lee, Woo-Sun;Choi, Kwon-Woo;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.37-40
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    • 2003
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. It is well known that the presence of hard and larger size particles in the CMP slurries increases the defect density and surface roughness of the polished wafers. In this paper, we have studied aging effect the of CMP slurry as a function of particle size. We prepared and compared the self-developed silica slurry by adding of abrasives before and after annealing. As our preliminary experiment results, we could be obtained the relatively stable slurry characteristics comparable to original silica slurry in the slurry aging effect.

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Development of the Chemical Flow Control System for Spinner Equipment in Semiconductor Manufacturing Process (반도체 제조공정의 스피너 장비를 위한 약액 흐름제어 시스템 개발)

  • Park, Hyoung-Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.4
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    • pp.1812-1816
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    • 2011
  • This research developed chemical flow control system(CFCS) essential for spinner equipment in nano semiconductor manufacturing process under the 100nm to prevent complex process defect due to missing spread after chemical injection. The devices developed in this research, which can be swiftly replaced in case abnormal state element changes or wafer manufacturing defect occurs, are anticipated to improve module yield as well as real-time monitoring on the state element. In addition, as a result of mounting H/W and S/W system to control detailed operation sequence in production line and executing performance check and verification, we can be exactly detected in five abnomal process type.

A machine-vision based inspection system for non-transparent and high-reflectance substrate (머신 비전을 이용한 불투명/고반사율 기판 검사 시스템)

  • Yeo, Kyeong-Min;Seo, Jung-Woo;Lee, Suk-Won;Yi, June-Ho
    • Proceedings of the Korea Information Processing Society Conference
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    • 2010.04a
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    • pp.369-372
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    • 2010
  • 평판 디스플레이(flat panel display)의 크기가 커짐에 따라 다양한 기판을 이용한 제조 방법이 개발되고 있다. 디스플레이 제조 공정 중 기판의 결함을 찾아서 분류하는 검사 시스템은 최종 제품의 품질을 결정하는 매우 중요한 부분이다. 본 연구는 머신비전 기술을 이용하여 불투명하고 반사율이 높은 기판 표면의 결함을 찾아내고, 이 결함을 스크래치(scratch), 흑결함(dark defect), 백결함(white defect)으로 분류하는 장치를 구현하는데 목적이 있다. 이를 구현하기 위해 본 논문에서는 정밀 스테이지(stage)와 라인 카메라(line CCD camera)을 이용한 광학계를 활용하여 검사 시스템을 구현하였다. 구축된 시스템을 이용하여 취득한 이미지를 12 개의 영역으로 등분하여 각각의 국부 영역에 대한 문턱값 연산(thresholding)을 적용함으로써 조명의 불균일을 의한 검출 에러율을 획기적으로 낮추었다. 간단한 컴퓨터비전 알고리듬의 채용으로도 검사 시스템의 구현이 가능함을 보였다.

Aerosol-gel synthesis of ZnO quantum dots dispersed in SiO2 matrix and their characteristics (에어로솔-젤 법을 이용한 SiO2에 분산된 ZnO 양자점의 합성과 그 특성)

  • Kim, Sang-Gyu;Firmansyah, Dudi Adi;Lee, Kwang-Sung;Lee, Donggeun
    • Particle and aerosol research
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    • v.6 no.2
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    • pp.51-59
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    • 2010
  • ZnO quantum dots embedded in a silica matrix without agglomeration were synthesized from $TEOS:Zn(NO_3)_2$ solutions in one-step process by aerosol-gel method. It was successfully demonstrated that the size of ZnO Q-dots could be controlled from 2 to 7 mm verified by a high resolution transmission electron microscope observation. The line scanning energy dispersive X-ray spectroscopy(EDS) revealed that the Q-dots existed preferentially inside SiO2 sphere when Zn/Si < 0.5. However, the Q-dots distributed homogeneously all over the sphere when Zn/Si > 1.0. Blue-shifted UV/Vis absorption peak observation confirmed the quantum size effect on the optical properties. The photoluminescence(PL) emission peaks of the powders at room temperature were consistent with previous reports in the following aspects: 1) PL characteristics are dominated by two peaks of deep-level defect-related emissions at 2.4 - 2.8 eV, 2) the first defect-related peak at 2.4 eV was blue shifted due to the quantum size effect with decreasing the concentration of $Zn(NO_3)_2$(decreasing the size of ZnO q dots). More interestingly, the existence of surface-exposed ZnO q dots affects greatly the second defect PL peak at 2.8 eV.

Oblique Axis Hypothenar Free Flaps: Tips for Harvesting Larger Flaps with Minimal Donor Site Morbidity

  • Sang Ho Oh;Jae In Chung
    • Archives of Plastic Surgery
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    • v.50 no.3
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    • pp.279-287
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    • 2023
  • Background Hypothenar free flaps (HTFFs) have been widely used for reconstructing palmar defects. Although previous anatomical and clinical studies of HTFF have been conducted, this technique still has some limitations. In this study, we describe some tips for large flap design that allows for easy harvesting of HTFFs with minimal donor site morbidity. Methods A total of 14 HTFF for hand defect reconstruction were recorded. The oblique flap was designed in the proximal HT area following relaxed skin tension line along the axis between fourth web space and 10 mm ulnar side of pisiform. A flap pedicle includes one or two perforators with ulnar digital artery and HT branch of basilic vein. In addition, innervated HTFF can be harvested with a branch of ulnar digital nerve. Electronic medical records were reviewed to obtain data on patients' information, operative details, and follow-up period. In addition, surgical outcome score was obtained from the patient, up to 10 points, at the last follow-up. Results Mean harvest time was 46 minutes, and two perforators were included in 10 cases. The mean flap area was 10.84 cm2. There were no problems such as donor site depression, scar contracture, keloids, wound dehiscence, numbness or neuroma pain at donor sites, and hypersensitivity or cold intolerance at flap site, either functionally or aesthetically. Conclusion Palmar defect reconstruction is challenging for hand surgeons. However, large HTFF can be harvested without complications using the oblique axis HTFF technique. We believe our surgical tips increase utility of HTFF for palmar defect reconstruction.