• 한국재료학회지
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• 제8권9호
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• pp.871-875
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• 1998

사진식각 공정으로 종횡비가 매우 큰 유리 미세구조물을 제작하였다. 미세구조물의 제작에는 압축응력에 강하고 전기적 절연체인 감광성 유리를 사용하였다. 감광성 유리는 석영기판 위에 크롬이 패턴된 마스크를 사용하여 파장이 312nm인 자외선에 노광되었다. $500^{\circ}C$ 이상의 열처리공정을 거친 후 초음파 분위기에서 10%의 불산용액으로 식각함으로써 유리 미세구조물을 제작하였다. 미세구조물의 최종 형상은 감광성 유리의 두께, 마스크 패턴, 자외선 노광조건 및 식각조건에 크게 의존하였으며, 종횡비가 30이상인 스트라이프 구조의 유리 미세구조물을 제작할 수 있었다.

• 한국미생물·생명공학회지
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• 제50권1호
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• pp.95-101
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• 2022

Due to the pandemic caused by COVID-19, the demand for face masks is soaring and has often caused a shortage. The aim of this study was to evaluate the effect of ultraviolet (UV) and drying treatments on microbial contaminants in facial masks. To conduct this study, standard procedures were designed to develop samples contaminated by the control bacteria Escherichia coli, Staphylococcus aureus, and Pseudomonas aeruginosa. The contamination level of the standard samples was approximately 6.30 × 10⁶ CFU/ml, and the UV light treatment was performed 1, 3, 5, and 7 times. To evaluate the effect of the UV and drying treatments, the masks were first treated with UV 1, 2, and 3 times, followed by the drying process. As a result, the mask contaminated with E. coli and P. aeruginosa showed a bacterial rate of approximately 99.9% after 1 UV irradiation, and in the case of the S. aureus-contaminated mask, it exhibited a bactericidal rate of approximately 99.9% after 7 UV irradiations. However, when the drying process was included after UV irradiation, all the samples contaminated with E. coli, S. aureus, and P. aeruginosa showed a bactericidal rate of 99.9% or more. The results of this study suggest that UV and drying treatments can effectively reduce the bacterial contaminants in facial masks. In addition, these results provide fundamental data and appropriate sterilization methods for reusing masks.

• Current Photovoltaic Research
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• 제5권3호
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• pp.75-82
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• 2017

High efficiency thin film solar cells require an absorber layer with high absorption and low defect, a transparent conductive oxide (TCO) film with high transmittance of over 80% and a high conductivity. Furthermore, light can be captured through the glass substrate and sent to the light absorbing layer to improve the efficiency. In this paper, morphology formation on the surface of glass substrate was investigated by using HF, mainly classified as random etching and periodic etching. We discussed about the etch mechanism, etch rate and hard mask materials, and periodic light trapping structure.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2018년도 추계 학술논문 발표대회
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• pp.16-17
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• 2018

A few years ago, the rapid degradation of domestic air quality has led to the efforts of exhaust gas policy and fine dust mask, but it is not a fundamental measure. In Korea, photocatalyst will be applied to residential and multi-use facilites to purify indoor and outdoor air. Also, in this study, it is tried to produce exposed concrete that is aesthetically pleasing as well as air purification of indoor by combining with light transparent concrete according to the increasing interest in human indoor living environment. For this purpose, we have developed a block formwork for photocatalysis light transparent concrete and established a suitable manufacturing method for on-site construction.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제15권2호
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• pp.786-799
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• 2021

Road damage detection is important for road maintenance. With the development of deep learning, more and more road damage detection methods have been proposed, such as Fast R-CNN, Faster R-CNN, Mask R-CNN and RetinaNet. However, because shallow and deep layers cannot be extracted at the same time, the existing methods do not perform well in detecting objects with fewer samples. In addition, these methods cannot obtain a highly accurate detecting bounding box. This paper presents a Multi-level Feature Pyramids method based on M2det. Because the feature layer has multi-scale and multi-level architecture, the feature layer containing more information and obvious features can be extracted. Moreover, an attention mechanism is used to improve the accuracy of local boundary boxes in the dataset. Experimental results show that the proposed method is better than the current state-of-the-art methods.

• JSTS:Journal of Semiconductor Technology and Science
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• 제15권4호
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• pp.454-461
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• 2015

Light enhancement of GaN based light emitting diodes (LEDs) have been investigated by texturing the top p-GaN surface. Nano-textured LEDs have been fabricated using self-assembled Ni nano mask during dry etching process. Experimental results were further compared with simulation data. Three types of LEDs were fabricated: Conventional (planar LED), Surface nano-porous (porous LED) and Surface nano-cluster (cluster LED). Compared to planar LED there were about 100% and 54% enhancement of light output power for porous and cluster LED respectively at an injection current of 20 mA. Moreover, simulation result showed consistency with experimental result. The increased probability of light scattering at the nano-textured GaN-air interface is the major reason for increasing the light extraction efficiency.

• 한국산학기술학회논문지
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• 제14권10호
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• pp.4685-4693
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• 2013

본 연구는 FMM 방식을 사용하는 OLED 디스플레이의 증착공정에서 사용되는 마스크 프레임의 무게를 최소화하기 위한 형상최적설계를 다루었다. 위상최적화 해석을 수행하였으며 그 결과를 토대로 프레임의 가로 및 세로변에 슬롯을 삽입함으로써 강성을 증가시키면서 무게를 저감시킬 수 있는 설계 개념을 도출하였다. 프레임의 형상설계변수를 정의하고 형상최적설계 문제를 정립하여 수치적 최적화를 수행하였다. 프레임의 설계기준인 최대 변위의 제약조건을 만족하면서 무게가 최소인 프레임의 최적형상을 성공적으로 구하였으며, 최적설계된 프레임의 무게는 117.6 kg으로 최초설계안 256 kg 대비 138.4 kg(54.1%)가 감소된 결과를 얻었다.

• 전기전자학회논문지
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• 제17권3호
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• pp.221-228
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• 2013

About functional parameters of a LED/UVLED (Light Emitting Diode/Ultra Violet LED), one of the most important parameters is the I-V characteristic. By researching factors affect to the I-V characteristic of uvled, we found that beside of the structure of the device itself, there is the influence of the electrode materials, electrode shapes, the process of wiring and packaging. In this work, we want to improve the performance of UVLED to find out the optimal mask design principles. The study is based on theoretical mathematical models, as well as the use of simulation software tool Comsol. From all results obtained, the team has improved mask design to manufacture electrodes for GaN-based UVLED. Electrode masks are designed by three softwares, which are Intellisuite, Klayout and AutoCad. Intellisuite masks would be used in fabrication simulation while Klayout and AutoCad are used to fabricate electrodes in experiments. As well as, we silmulated the structure of an uvled 355nm emission wavelength by TCAD software, in order to compare with uvled sample that has the same emission wavelength.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.136-136
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• 1999

박막의 탄성특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 최근에는 탄성특성을 평가할 수 있는 간단한 방법으로 기판 식각 기법을 이용한 freehang, bridge 방법이 제시되었다. 이중에서 bridge 방법은 간단한 식각 기법을 이용하여 얇은 박막에서도 탄성 특성을 평가할 수 있는 방법으로 제시되었다. 그러나 식각 과정에서 발생하는 patch 부분의 under-cut으로 인해 정확한 bridge의 길이를 측정할 수 없게 되어 오차가 발생하고 있다. 본 연구에서는 bridge 방법에서 발생하는 오차를 줄이기 위한 방법으로, patch 부분에 etch-stop을 제작해 줌으로서 식각 과정에서 발생하는 under-cut을 효과적으로 제거시켰다. Etch-stop은 2장의 mask를 align key를 이용하여 제작하였다. 먼저 산화막이 형성되어 있는 Si 기판위에 mask 1을 이용하여 patch 부분을 lithography 작업하고, 습식 식각 공정을 한 뒤 DLC 필름을 증착시킨다. 다음으로 mask 2를 이용하여 bridge pattern을 제작하고, DLC 필름을 증착시킨 후 lift-off 기술과 산화막 등방식각 공정을 통해 bridge를 제작하였다. 이렇게 제작된 bridge를 통해 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류응력과 함께 박막의 응력-변형률 관계식에 적용시켜 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. Sidl 첨가된 DLC 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400V로 합성압력은 10mTorr로 고정하였다. 사용한 반응가스는 벤젠(C6H6)과 희석된 실렌(SiH4:2H=10:90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 함유된 Si의 양을 조절하였다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 조절하였다. 필름의 잔류응력은 압축잔류 응력에 의해 발생한 필름/기판 복합체의 곡률을 laser 반사법을 이용하여 측정하고, 이 결과를 Brenner 등에 의해 유도된 식을 대입하여 계산하였다.

• Journal of the Optical Society of Korea
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• 제19권5호
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• pp.487-493
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• 2015

A wavefront coding (WFC) technique provides an extension of the depth of field for a microscopy imaging system with slight loss of image spatial resolution. Through the analysis of the relationship between the incidence angle of light at the phase mask and the system pupil function, a mixing symmetrical cubic phase mask (CPM) applied to 5X-40X micro-objectives is optimized simultaneously based on point-spread function (PSF) invariance and nonzero mean values of the modulation transfer function (MTF) near the spatial cut-off frequency. Optimization results of the CPM show that the depth of field of these micro-objectives is extended 3-10 times respectively while keeping their resolution. Further imaging simulations also prove its ability in enhancing the defocus imaging.