• Title/Summary/Keyword: Light Measurement

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Light Scattering Characteristics of Defects on Silicon Wafer Surface (실리콘 웨이퍼 미세 표면결함의 광산란 특성 평가)

  • Ha T.H.;Song J.Y.;Miyoshi Takashi;Takaya Yasuhiro
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1083-1086
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    • 2005
  • Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses $Ar^+$ laser as an illumination source, and a highly sensitive photomultiplier tube (PMT) for detecting scattered light from defects. Unlike with conventional measurement system, our system has ability to measure scattered light pattern from wide range of scattering angles with changeable incidence condition. It is shown that our developed system is effective to discriminate the types and sizes of defects from basic experimental results using a microscatch and a PSL sphere.

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Uncertainty Analysis of the Optical Smoke Density Measurement through the Doorway in a Compartment Fire (구획화재의 출입구를 통한 광학적 연기밀도 측정의 불확실성 해석)

  • Kim, Sung-Chan
    • Fire Science and Engineering
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    • v.27 no.2
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    • pp.75-79
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    • 2013
  • The present study measured the light transmission to quantify the smoke density(smoke mass concentration) through the doorway in a compartment fire and performed the uncertainty analysis to evaluate the reliability of the measurement technique. The optical light extinction method based on Bourguer's law was applied to estimate the smoke density of doorway exhausting smoke flow in upper layer of a compartment for methane gas fires. The measurement uncertainty of the light extinction measurement was evaluated for the light transmittance, path length, and specific mass extinction coefficient and the expanded uncertainty was estimated about 20% with confidence level of 95%. The mean smoke density through the doorway for the methane fire was calculated for quasi-steady fire and the smoke density linearly increased as the GER increased.

Measurement Method of Height of White Light Scanning Interferometer using Deep Learning (Deep Learning을 사용한 백색광 주사 간섭계의 높이 측정 방법)

  • Baek, Sang Hyune;Hwang, Wonjun
    • Journal of Korea Multimedia Society
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    • v.21 no.8
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    • pp.864-875
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    • 2018
  • In this paper, we propose a measurement method for height of white light scanning interferometer using deep learning. In order to measure the fine surface shape, a three-dimensional surface shape measurement technique is required. A typical example is a white light scanning interferometer. In order to calculate the surface shape from the measurement image of the white light scanning interferometer, the height of each pixel must be calculated. In this paper, we propose a neural network for height calculation and use virtual data generation method to train this neural network. The accuracy was measured by inputting 57 actual data to the neural network which had completed the learning. We propose two new functions for accuracy measurement. We have analyzed the cases where there are many errors among the accuracy calculation values, and it is confirmed that there are many errors when there is no interference fringe or outside the learned range. We confirmed that the proposed neural network works correctly in most cases. We expect better results if we improve the way we generate learning data.

Utilization of Light Microscopy and FFT for MFA Measurement from Unstained Sections of Red Pine (Pinus Densiflora)

  • Kwon, Ohkyung;Lee, Mi-Rim;Eom, Chang-Deuk
    • Journal of the Korean Wood Science and Technology
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    • v.41 no.5
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    • pp.399-405
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    • 2013
  • This study demonstrates the utilization of light microscopy and Fast Fourier Transform-Peak Finding (FPF) method for microfibril angle (MFA) measurement from unstained sections of red pine (Pinus densiflora). To obtain an image with optimal contrast and resolution for MFA measurement, effects of numerical aperture (NA) of condenser lens and color filters were investigated. About 60% of NA of the maximum condenser NA produced an image with optimal contrast, but a color filter with short wavelength range (DAPI) created images with improved resolution. Manual angle measurement and the FPF method were applied to the image with optimal contrast for MFA measurement. The experimental results from the FPF method were considered to be more repeatable and less subjective than those from the manual angle measurement.

A Study on Roughness Measurement of Polished Surfaces Using Reflected Laser Beam Image (레이저빔 반사 화상을 이용한 연마면 거칠기 측정법에 관한 연구)

  • Shen, Yun-Feng;Lim, Han-Seok;Kim, Hwa-Young;Ahn , Jung-Hwan
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.2 s.95
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    • pp.145-152
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    • 1999
  • This paper presents the principle and experimental results of a non-contact surface roughness measurement by means of screen projected pattern of lase beam reflected from a polished surface. In the reflected laser beam pattern especially from a fine surface like ground or polished one, light intensity varies from the center fo the image to its boundary as the Gaussian distribution. The standard deviation of a light intensity distribution is assumed to be a good non-contact estimator for measuring the surface roughnes, because the light reflectivity is known to be well related with the surface roughness. This method doesn't need to discriminate between the specularly reflected light and the diffusely reflected one, whereas the scattered laser intensity method must do. Nor it needs to adjust the change of light intensity caused by environmental lights or specimen materials. Reflected laser beam pattern narrowly spreads out in the vertical direction to tiny scratches on the polished surface due to abrasives. The deeper the scratch the more the dispersion, which means the rougher surface. The standard deviation of the pattern is nearly in proportion to the surface roughness. Measurement errors by this method are shown to be below 10 percent compared with those obtained by a common contact method. The inclination of measuring unit from the normal axis causes the measurement errors up to 10 percent for an angle of 4 degree. Therefore the proposed method can be used as an on-the-machine quick roughness estimator within 10 percent measurement error.

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Accuracy Improvement and Systematic Bias Analysis of Scanning White Light Interferometry for Free-form Surfaces Measurements (자유 곡면 형상 측정을 위한 백색광 주사 간섭계의 정확도 향상 및 시스템 오차 분석)

  • Ghim, Young-Sik;Davies, Angela;Rhee, Hyug-Gyo
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.7
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    • pp.605-613
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    • 2014
  • Scanning white-light interferometry is an important measurement option for many surfaces. However, serious profile measurement errors can be present when measuring free-form surfaces being highly curved or tilted. When the object surface slope is not zero, the object and reference rays are no longer common path and optical aberrations impact the measurement. Aberrations mainly occur at the beam splitter in the interference objective and from misalignment in the optical system. Both effects distort the white-light interference signal when the surface slope is not zero. In this paper, we describe a modified version of white-light interferometry for eliminating these measurement errors and improving the accuracy of white-light interferometry. Moreover, we report systematic errors that are caused by optical aberrations when the object is not flat, and compare our proposed method with the conventional processing algorithm using the random ball test.

Measurement of Residual DC Voltage in the IPS-LCD by Light Minimum/Maximum Method (광 최소/최대법을 이용한 IPS-LCD의 잔류 DC 전압 측정)

  • Jeon, Yong-Je;Kim, Hyang-Yul;Kim, Jae-Hyung;Hahn, Eun-Joo;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.354-357
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    • 2001
  • The residual DC properties in the in-plane switching (IFS) liquid crystal displays(LCDs) which have different concentrations of cynao NLCs and different resistivities of fluorine NLCs were studied. We also propose a new residual DC measurement method, named 'light minimum/maximum method'. We confirmed the precision of residual DC measurement by light minimum/maximum method compared with the flicker minimizing method and found that new measurement method of residual DC is better than that of the conventional flicker minimizing method since the resolution level of measurements is in 0.1V

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Measurement of Residual DC Voltage in the IPS-LCD by Light Minimum/Maximum Method (광 최소/최대법을 이용한 IPS-LCD의 잔류 DC 전압 측정)

  • 전용제;김향율;김재형;한은주;서대식
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.354-357
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    • 2001
  • The residual DC properties in the in-plane switching (IPS) liquid crystal displays(LCDs) which have different concentrations of cynao NLCs and different resistivities of fluorine NLCs were studied. We also propose a new residual DC measurement method, named 'light minimum/maximum method'. We confirmed the precision of residual DC measurement by light minimum/maximum method compared with the flicker minimizing method and found that new measurement method of residual DC is better than that of the conventional flicker minimizing method since the resolution level of measurements is in 0.1 V

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The scanned point-detecting system for three-dimensional measurement of light emitted from plasplay panel (플라즈마 디스플레이 패널에서 방출되는 광의 3차원 측정을 위한 Scanned Point-Detecting System)

  • 최훈영;이석현;이승걸
    • Korean Journal of Optics and Photonics
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    • v.12 no.2
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    • pp.103-108
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    • 2001
  • In this paper, we designed and made the scanned point detecting system for 3-dimensional measurement of the light emitted from plasma display panel (PDP) , and we measured and analyzed 3-dimensional light emitted from a real PDP by using this scanned point detecting system. The scanned point detecting system has a point detector with a pinhole. The light emitted from the source at the in-focus position can pass through the pinhole and be collected by detector. The light from other sources at outof-focus positions is focused at points in front of or behind the pinhole, and thus it is intercepted by the pinhole. Therefore, we can detect light information from a particular point of a PDP cell of 3-dimensional structure. We know the electric field distribution inside the PDP cell from the 3-dimensionallight intensity distribution measured by using the scanned point detecting system. As the Z axial measurement increases, the intensity of light detected increases and intensity of light detected on the inside edge of the ITa electrode is larger than outside edge of the ITa eletrode and gap of the ITa electrodes. Also, as the measurement point moves from one barrier rib to another, the detected light is weaker near to the barrier ribs than at the center between the barrier ribs. The emitted light is concentrated at the center between barrier ribs. ribs.

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The three-dimensional measurement and analysis for 828nm light emitted from plasma display panel by scanned point detecting method(SPDM) (Scanned point detecting method(SPDM)에 의한 플라즈마 디스플레이 패널의 828nm 광에 대한 3차원 측정과 해석)

  • 최훈영;정재완;이승걸;이석현
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.284-287
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    • 2000
  • We analyzed the 3-dimensional discharge characteristic in plasma display panel(PDP) cell using the 3-dimensional emission distribution of 828nm light measured by scanned point detecting method(SPDM). The emitted light distributions on the ITO electrode show the stronger light intensity near to the electrode gap than outside. Also, 828nm light is widely detected outside of the bus electrode. We consider that measurement using new SPDM is effective to analyze the discharge physics and propose the new panel structures.

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