• 제목/요약/키워드: Lee Jang Ga

검색결과 274건 처리시간 0.029초

F-based 플라즈마를 이용한 GaAs/AlGaAs 와 InGaP 반도체의 건식식각에 관한 연구 (A Study of Dry etching of GaAs over AlGaAs and InGaP Semiconductor in F-based Plasmas)

  • 장수욱;류현우;최충기;문준희;이장희;유승열;임완태;이제원;전민현;조관식;송한정;백인규;권민철;문성진;신동현
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2005년도 춘계학술발표대회 및 제8회 신소재 심포지엄 논문개요집
    • /
    • pp.55-55
    • /
    • 2005
  • PDF

p-InGaN/GaN 초격자구조에서 열처리 조건에 따른 오믹전극의 특성 (Characteristics of p-InGaN/GaN Superlattice structure of the p-GaN according to annealing conditions)

  • 장선호;김세민;이영웅;이영석;이종선;박민정;박일규;장자순
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.160-160
    • /
    • 2010
  • In this work, we investigate ohmic contacts to p-type GaN using a Pt/Cu/Au metallization scheme in order to achieve low resistance and thermally stable ohmic contact on p-GaN. An ohmic contact formed by a metal electrode deposited on a highly doped InGaN/GaN superlattice sturucture on p-GaN layer. The specific contact resistance is $1.56{\times}10^{-6}{\Omega}cm^2$ for the as-deposited sample, $1.35{\times}10^{-4}{\Omega}cm^2$ for the sample annealed at $250^{\circ}C$ and $6.88{\times}10^{-3}{\Omega}cm^2$ for the sample annealed at $300^{\circ}C$.

  • PDF

Detection of Streptavidin-Biotin Complexes Using a Highly Sensitive AlGaN/GaN-Based Extended-Gate MISHEMT-Type Biosensor

  • Lee, Hee Ho;Bae, Myunghan;Choi, Byoung-Soo;Shin, Jang-Kyoo
    • 센서학회지
    • /
    • 제25권5호
    • /
    • pp.320-325
    • /
    • 2016
  • In this paper, we propose an AlGaN/GaN-based extended-gate metal-insulator-semiconductor high electron mobility transistor (MISHEMT)-type biosensor for detecting streptavidin-biotin complexes. We measure the drain current of the fabricated sensor, which varies depending on the antibody-antigen reaction of streptavidin with biotin molecules. To confirm the immobilization of biotin polyethylene glycol (PEG) thiol, we analyze the Au surface of a GaN sample using X-ray photoelectron spectroscopy (XPS). The proposed biosensor shows higher sensitivity than Si-based extended-gate metal oxide semiconductor field effect transistor (MOSFET)-type biosensor. In addition, the proposed AlGaN/GaN-based extended-gate MISHEMT-type biosensor exhibits better long-term stability, compared to the conventional AlGaN/GaN-based MISHEMT-type biosensor.

R-plane 사파이어 기판위의 GaN/InGaN 이종접합구조의 HVPE 성장 (HVPE growth of GaN/InGaN heterostructure on r-plane sapphire substrate)

  • 전헌수;황선령;김경화;장근숙;이충현;양민;안형수;김석환;장성환;이수민;박길한
    • 한국결정성장학회지
    • /
    • 제17권1호
    • /
    • pp.6-10
    • /
    • 2007
  • R-plane 사파이어 위에 a-plane GaN층이 성장된 기판에 혼합소스 HVPE(mixed-source hydride vapor phase epitaxy) 방법으로 GaN/InGaN의 이종접합구조(heterostructure)를 구현하였다. GaN/InGaN 이종접합구조는 GaN, InGaN, Mg-doped GaN 층으로 구성되어 있다. 각 층의 성장온도는 GaN층은 $820^{\circ}C$, InGaN 층은 $850^{\circ}C$, Mg-doped GaN 층은 $1050^{\circ}C$에서 성장하였다. 이때의 $NH_3$와 HCl 가스의 유량은 각각 500 sccm, 10 sccm 이었다. SAG-GaN/InGaN 이종접합구조의 상온 EL (electroluminescence) 특성은 중심파장은 462 nm, 반치폭(FWHM : full width at half maximum) 은 0.67eV 이었다. 이 결과로부터 r-plane 사파이어 기판위에 multi-sliding boat system의 혼합소스 HVPE 방법으로 이종접합구조의 성장이 가능함을 확인하였다.

Investigation of Oxygen Incorporation in AlGaN/GaN Heterostructures

  • Jang, Ho-Won;Baik, Jeong-Min;Lee, Jong-Lam;Shin, Hyun-Joon;Lee, Jung-Hee
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • 제3권2호
    • /
    • pp.96-101
    • /
    • 2003
  • Direct evidence on the incorporation of high concentration of oxygen into undoped AlGaN layers for the AlGaN/GaN heterostuctures is provided by scanning photoemission microscopy using synchrotron radiation. In-situ annealing at $1000^{\circ}C$ resulted in a significant increase in the oxygen concentration at the AlGaN surface due to the predominant formation of Al-O bonds. The oxygen incorporation into the AlGaN layers resulting from the high reactivity of Al to oxygen can enhance the tunneling-assisted transport of electrons at the metal/AlGaN interface, leading to the reduction of the Schottky barrier height and the increase of the sheet carrier concentration near the AlGaN/GaN interface.

Identification of Endogenous Gibberellins by Feeding of [$^{14}\textrm{C}$] $\textrm{GA}_{12}$ in Chinese Yam, Dioscorea opposite

  • Lee, In-Jung;Kim, Sang-Kuk;Lee, Sang-Chul;Lee, Bong-Ho;Jang, Soo-Won;Park, Tae-Shik
    • 한국작물학회지
    • /
    • 제48권2호
    • /
    • pp.68-72
    • /
    • 2003
  • The metabolism of [$^{14}\textrm{C}$] $\textrm{GA}_{12}$ in the Chinese yam (Dioscorea opposita Thunb. var. Tsukune) was examined to determine the identification of endogenous gibberellins. [$^{14}\textrm{C}$] $\textrm{GA}_{12}$ was metabolized to $\textrm{GA}_{53}$, $\textrm{GA}_{44}$, $\textrm{GA}_{19}$, $\textrm{GA}_{20}$, $\textrm{GA}_1$, $\textrm{GA}_8$, $\textrm{GA}_{15}$, $\textrm{GA}_{24}$, $\textrm{GA}_9$, $\textrm{GA}_{36}$ and $\textrm{GA}_4$. Radioactivity of GAs in non C-13 hydroxylation route was five-fold higher than that of early C-13 hydroxylation in analyzed GA-metabolites. Radioactivity of $\textrm{GA}_4$ was always four times higher than that of $\textrm{GA}_1$ at every feeding time. $\textrm{GA}_1$ radioactivity has always a lower level to below 200 DPM. The major pathway of endogenous GA metabolism in seedlings of the Chinese yam might be the non C-13 hydroxylation pathway.

HVPE 후막 a-plane GaN 결정의 성장과 특성 (Growth and characteristics of HVPE thick a-plane GaN layers)

  • 이충현;황선령;김경화;장근숙;전헌수;안형수;양민;배종성;김석환;장성환;이수민;박길한
    • 한국결정성장학회지
    • /
    • 제17권1호
    • /
    • pp.1-5
    • /
    • 2007
  • 본 연구에서는 HVPE(hydride vapor phase epitaxy) 방법으로 r-plane 사파이어 기판 위에 무극성의 (11-20) a-plane GaN을 성장하여 구조적인 특성을 관찰하였다. HVPE 방법으로 저온($500/550/600/660^{\circ}C$)에서 성장한 AIN 버퍼층이 고온의 a-GaN에 미치는 영향을 확인하였다. 또한, AIN 버퍼층과의 비교를 위하여 저온에서 성장한 GaN 버퍼층과 InGaN 버퍼층 같은 다양한 버퍼층을 이용하여 a-plane GaN의 성장도 실시하였다. 고온에서 성장된 a-GaN의 구조적 형상은 저온버퍼층의 성장 조건에 크게 영향을 받음을 알 수 있었다. $GaCl_3$ 전 처리를 실시하고 $820^{\circ}C$에서 성장한 경우에 가장 평탄한 표면을 가지는 a-GaN을 얻을 수 있었다.