• Title/Summary/Keyword: Leakage current density

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Electrical and Structural Properties of Ferroelectric $LiNbO_3$ Thin films for Nonvolatile Memory applications (비휘발 메모리소자응용을 위한 강유전체 $LiNbO_3$ 박막의 전기적 구조적 특성에 관한 연구)

  • 최유신;정세민;김도영;이준신
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.235-238
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    • 1998
  • Ferroelectric $LiNbO_3$ thin films were grown directly on Si(100) substrates by 13.55MHz RF magnetron sputtering system using a ceramic target ($Nb_2O_5/Li_2C0_3$ = 51.4/48.6). Because high temperature process have to avoided to prevent degradation of the interface (insulator/Si), $LiNbO_3$ thin films were deposited below $300^{\circ}C$. After as-deposited films were performed RTA treatments in an oxygen ambient at $600^{\circ}C$ for 60s, electrical measurements performed films before and after anneal treatment. In high field region, the leakage current density of the films after annealing was deceased about 4order and the resistivity of these was increased to about 5\times 10^{11} \Omega \cdot cm$ at 500kV/cm. In accumulation region of C-V curve, we calculated dielectric constant of thin film $LiNbO_3$ as 27.9 which is close to that of bulk value.

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Effect of ZrO2 Buffer Layers for Pt/Bi3.25La0.75Ti3O12/ZrO2/Si (MFIS)-FET Structures (Pt/Bi3.25La0.75Ti3O12/ZrO2/Si (MFIS)-FET 구조를 위한 ZrO2 Buffer Layer의 영향)

  • Kim, Kyoung-Tae;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.5
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    • pp.439-444
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    • 2005
  • We investigated the structural and electrical properties of BLT films grown on Si covered with $ZrO_{2}$ buffer layer. The BLT thin film and $ZrO_{2}$ buffer layer were fabricated using a metalorganic decomposition method. The electrical properties of the MFIS structure were investigated by varying thickness of the $ZrO_{2}$ layer. AES and TEM show no interdiffusion and reaction that suppressed using the $ZrO_{2}$ film as a buffer layer The width of the memory window in the C-V curves for the MFIS structure decreased with increasing thickness of the $ZrO_{2}$ layer. It is considered that the memory window width of MFIS is not affected by remanent polarization. Leakage current density decreased by about four orders of magnitude after using $ZrO_{2}$ buffer layer. The results show that the $ZrO_{2}$ buffer layers are prospective candidates for applications in MFIS-FET memory devices.

La2O3 Addition Influence on Electrical Characteristics of Pr6O11-based ZnO Varistors

  • Nahm, Choon-Woo
    • Transactions on Electrical and Electronic Materials
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    • v.7 no.3
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    • pp.123-128
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    • 2006
  • The microstructure and electrical properties of the varistors, which are composed of $ZnO-Pr_6O_{11}-CoO-Cr_2O_3-La_2O_3-based$ ceramics, were investigated for different $La_2O_3$ contents. The increase of $La_2O_3$ content led to more densified ceramics, whereas abruptly decreased the nonlinear properties by incorporating beyond 1.0 mol%. The highest nonlinearity was obtained from 0.5 mol% $La_2O_3$, with the nonlinear coefficient of 81.6 and the leakage current of $0.2{\mu}A$. The increase of sintering time and temperature greatly decreased the nonlinear properties. As the $La_2O_3$ content increased, the donor density increased from $0.64\times10^{18}/cm^3\;to\;16.89\times10^{18}/cm^3$ and the barrier height greatly decreased with increasing $La_2O_3$ content, reaching a maximum (1.47 eV) in 0.5 mol% $La_2O_3$.

Ferroelectric Properties of SBT Thin Films Deposited by RF Magnetron Sputering Method (RF 마그네트론 스퍼터링법에 의한 SBT 박막의 강유전체 특성)

  • 조춘남;김진사;최운식;박용필;김충혁
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.731-735
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    • 2001
  • S $r_{0.89}$B $i_{2.4}$T $a_2$ $O_{9}$ (SBT) thin films are deposited on Pt-coated electrode(Pt/Ti $O_2$/ $SiO_2$/Si) using RF magnetron sputtering method. In the XRD pattern, the SBT thin films had (105) orientation. As annealing temperature was increased from $600^{\circ}C$ to 85$0^{\circ}C$, the intensities of peak were increased. In the SEM images, Bi-layered perovskite phase was crystallized above $650^{\circ}C$ and rod-like grains grew above 75$0^{\circ}C$. The maximum remanent polarization and the coercive electric field at annealing temperature of 75$0^{\circ}C$ are 11.60$\mu$C/$\textrm{cm}^2$ and 48kV/cm respectively. The dielectric constant and leakage current density at annealing temperature of 75$0^{\circ}C$ are 213 and 1.01x10$^{-8}$ A/$\textrm{cm}^2$, respectively. The fatigue characteristics of SBT thin filmsdid not change up to 10$^{10}$ switching cycles.s.s.

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Electrical Properties of SBT Capacitors with various Annealing Atmosphere (다양한 열처리 분위기에 따른 SBT 커패시터의 전기적 특성)

  • 조춘남;김진사;신철기;최운식;김충혁;홍진웅;이준웅
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.3
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    • pp.207-213
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    • 2003
  • The Sr$\_$0.7/Bi$\_$2.6/Ta$_2$O$\_$9/(SBT) thin films are deposited on Pt-coated electrode(Pt/TiO$_2$/SiO$_2$/Si) using RF magnetron sputtering method. The structural and electrical properties of SBT capacitors were influenced with annealing atmosphere. In the XRD pattern, the SBT thin films in all annealed atmosphere had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized in all annealing atmosphere and grain largely grew in oxygen annealing atmosphere. The maximum remnant polarization and the coercive electric field in oxygen annealing atmosphere are 12.40[${\mu}$C/cm$^2$] and 30[kV/cm] respectively. The dielectric constant and leakage current density of capacitors annealed oxygen atmosphere are 340 and 2.13${\times}$10$\^$-9/ [A/cm$^2$] respectively. The fatigue characteristics of SBT capacitors did not change up to 10$\^$10/ switching cycles.

Electrical Properties of PZT/$BaTiO_3$/PZT Multilayer Thick Films (PZT/$BaTiO_3$/PZT 다층 후막의 유전특성)

  • Nam, Sung-Pill;Lee, Sung-Gap;Bae, Seon-Gi;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.123-124
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    • 2006
  • The sandwiched PZT/$BaTiO_3$/PZT thick films were fabricated by two different methods thick films of the PZT by screen printing method on alumina substrateselectrodes with Pt, thin films of $BaTiO_3$ by the spin-coating method on the PZT thick films and once more thick films of the PZT by the screen printing method on the $BaTiO_3$ layer. The structural and the dielectric properties were investigated for effect of various stacking sequence of sol-gel prepared $BaTiO_3$ coating solution at interface of the PZT thick films, The insertion of BaTi03 interlayer yielded the PZT thick films with homogeneous and dense grain structure with the number of $BaTiO_3$ layers. The leakage current density of the $PZT/BaTiO_3-1$ film is less that $4.41{\times}10^{-9}A/cm^2$ at 5 V.

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Dependence of Ferroelectric Properties on the Crystalline Phases of HoMnO3 Thin Film (HoMnO3 박막의 강유전 특성의 결정상 의존성)

  • Kim, Eung-Soo;Kang, Dong-Ho
    • Korean Journal of Materials Research
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    • v.16 no.6
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    • pp.394-399
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    • 2006
  • Ferroelectric $HoMnO_3$ thin films were deposited on the Si(100) substrate at $700^{\circ}C$ for 2 hrs by metalorganic chemical vapor deposition (MOCVD) and post-annealed at 850oC by rapid thermal process (RTP). Electrical properties and crystalline phases of $HoMnO_3$ thin films were investigated as a function of postannealing time. Single phase of hexagonal symmetry with c-axis preferred orientation was obtained from $HoMnO_3$ thin films post-annealed at $850^{\circ}C$ for 5 min, while the c-axis preferred orientation was decreased with the increase of post-annealing time, and the thin films post-annealed at $850^{\circ}C$ for 15 min showed the mixture phases of hexagonal and orthorhombic symmetry. P-E (Polarization-Electric field) hysteresis loop of ferroelectric $HoMnO_3$ thin films was observed only for the single phase of hexagonal symmetry, but that was not observed for the mixture phases of the hexagonal and orthorhombic symmetry, which was discussed with the bond valence of Mn ion of crystalline phase. Leakage current density was dependent on the microstructure of thin films as well as the change of valence of Mn ion.

Preparation of Ferroelectric $YMnO_3$ Thin Films by Metal-Organic Decomposition Process and their Characterization (Metal-Organic Decomposition법에 의한 강유전성 $YMnO_3$ 박막의 제조 및 특성)

  • 김제헌;강승구;김응수;김유택;심광보
    • Journal of the Korean Ceramic Society
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    • v.37 no.7
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    • pp.665-672
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    • 2000
  • The ferroelectric YMnO3 thin films were prepared by MOD(metal-organic decomposition) method with Y- and Mn-acetylacetonate as starting materials. Thin films were grown on various substrates by spin-coating technique. The crystalline phases of the thin films were identified by X-ray diffractometer as a function of heat-treatment temperature, pH of coating solution and substrate. In addition, the effect of Mn/Y molar ratio(0.8~1.2) on the formation of hexagonal-YMnO3 phase was investigated. In forming highly c-axisoriented hexagonal-YMnO3 single phase, the Pt coated Si substrate was more effective than the bare Si substrate, and the optimum heat-treatment condition was at 82$0^{\circ}C$ for 30 min. Higher Mn/Y molar ratio within 0.8~1.2 and pH of YMnO3 precursor solution within 0.5~2.5 favored formation of ferroelectric hexagonal phase rather than orthorhombic phase. Leakage current density of the hexagonal-YMnO3 thin film formed on Pt(111)/TiO2/SiO2/Si substrate was low enough as 0.4~4.0$\times$10-8(A/$\textrm{cm}^2$) at 5 V and its remanent polarization(Pr), calculated from the P-E hysteresis loop, was 3 nC/$\textrm{cm}^2$.

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Electrical Properties of SBT Capacitors with Top Electrodes (다양한 상부전극에 따른 SBT 커패시터의 전기적 특성)

  • 조춘남;오용철;김진사;정일형;신철기;최운식;김충혁;이준웅
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.12
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    • pp.553-558
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    • 2003
  • The A S $r_{0.7}$B $i_{2.6}$T $a_2$ $O_{9}$ (SBT)thin films are deposited on Pt-coated electrode(Pt/$TiO_2$/$SiO_2$/Si) using a RF magnetron sputtering method. The electrical properties of SBT capacitors with top electrodes were studied. In the XRD pattern, the SBT thin films in all annealing temperatures had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized at 75$0^{\circ}C$ and grains largely grew in oxygen annealing atmosphere. The electrical properties of SBT capacitor with top electrodes represent a favorable properties in Pt electrode. The maximum remanent polarization and the coercive electric field with Pt electrode are 12.40C/$\textrm{cm}^2$ and 30kV/cm, respectively. The dielectric constant and leakage current density with Pt electrode is 340 and 6.8110$^{-10}$ A/$\textrm{cm}^2$, respectively.y.y.

Design of a Simmer Circuit for Xenon Flash Lamp Driver Based on a LCC Converter (LCC 컨버터 기반의 제논 플래시 램프 구동장치를 위한 시머회로 설계)

  • Song, Seung-Ho;Cho, Chan-Gi;Park, Su-Mi;Park, Hyun-Il;Bae, Jung-Su;Jang, Sung-Roc;Ryoo, Hong-Je
    • Proceedings of the KIPE Conference
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    • 2017.07a
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    • pp.231-232
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    • 2017
  • This paper describes the design and implementation of a 2.5kW (500V, 5A) simmer circuit that maintains the ionization of xenon gas inside the lamp. The design is based on a LCC resonant converter in continuous conduction mode (CCM) with above resonant frequency to take advantage of high power density from using parasitic elements such as the leakage inductance in a power transformer. In addition, since the converter has current source output characteristics, it is suitable for maintaining ionization of the lamp having the negative resistance load characteristic. To verify this converter design, PSpice modeling was performed. Finally, the developed simmer circuit is verified by a resistive load of rated performance and the Ionization maintenance operation of the xenon flash lamp.

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