• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.113-113
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• 2008

Cu CMP (Chemical Mechanical Planarization) has been used to remove copper film and obtain a planar surface which is essential for the semiconductor devices. Generally, it is known that chemical reaction is a dominant factor in Cu CMP comparing to Silicon dioxide CMP. Therefore, Cu CMP slurry has been regarded as an important factor in the entire process. This investigation focused on understanding the effect of corrosion inhibitor on copper surface and CMP results. Benzotriazole (BTA) was used as a corrosion inhibitor in this experiment. For the surface analysis, electrochemical characteristics of Cu was measured by a potentiostat and surface modification was investigated by X-ray photoelectron spectroscopy (XPS). As a result, corrosion potential (Ecorr) increased and nitrogen concentration ratio on the copper surface also increased with BTA concentration. These results indicate that BTA prevents Cu surface from corrosion and forms Cu-BTA layer on Cu surface. CMP results are also well matched with these results. Material removal rate (MRR) decreased with BTA concentration and static etch rate also showed same trend. Consequently, adjustment of BTA concentration can give us control of step height variation and furthermore, this can be applicable for Cu pattern CMP.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.49-49
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• 2008

ZnO-based varistors have been widely used for voltage stabilization or transient surge suppression in electric power systems and electronic circuits. Recently, It has reported that the varistor behavior with nonlinear coefficient of 6~17 in Mn-doped ZnO. In this study we have chosen the composition of ZnO-$TeO_2-Mn_3O_4$ (ZTM) system to the purpose of whether varistor behavior appeared in doped ZnO by the solid state sintering or not. We investigated the sintering and electric properties of 0.5~3.0 at% Mn doped ZnO-1.0 at% $TeO_2$ system. Electrical properties, such as current-voltage (I-V), capacitance-voltage (C-V), and impedance spectroscopy were conducted. $TeO_2$ itself melts at $732^{\circ}C$ in air but forms the $ZnTeO_3$ phase with ZnO as increasing temperature and therefore retards the densification of ZnO to $1000^{\circ}C$. The average grain size of sintered samples was at about $3{\mu}m$ and decreased with increasing Mn contents. It was found that a good varistor characteristics were developed in ZTM system sintered at $1100^{\circ}C$ (nonlinear coefficient $\alpha$ ~ 60). The results of C-V characteristics such as barrier height ($\Theta$), donor density ($N_d$), depletion layer (W), and interface state density ($N_t$) in ZTM ceramics were $4\times10^{17}cm^{-3}$, 0.7 V, 40 nm, and $1.6\times10^{12}cm^{-2}$, respectively. It will be discussed about the stability and homogeneity of grain boundaries using distribution parameter ($\alpha$) simulated with the Z(T)"-logf plots in ZTM system.

• Korean Chemical Engineering Research
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• v.50 no.2
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• pp.334-342
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• 2012

To know the role of 'the solid compressive pressure to the first solid layer of a cake, $p_d$' in the 'unified theory on solid-liquid separation', we analyzed extremely compressible cake formed with floc for the following three operations with our new concepts. First, the role of $p_d$ was studied in calculating the sediment thickness of floc, and in calculating the cake thickness in cake filtration performed with floc sediment. Second, we calculated the expression procedure using $p_d$. Finally, the influence of $p_d$ on cake thickness in hindered sedimentation, and on the calculation of the procedure of hindered sedimentation $p_d$ was verified. Thus the possibility of application of 'unified theory on solid-liquid separation' and the importance of $p_d$ was verified. Through these processes, new theoretical definitions of the cake filtration, expression and hindered sedimentation was established.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.1
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• pp.22-28
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• 2009

We investigated the sintering and electric properties of ZnO-1.0 at% $TeO_2$ (ZT1) and 1.0 at% Mn-doped ZT1(ZT1M1) system. $TeO_2$ itself melts at $732^{\circ}C$ in air but forms the $ZnTeO_3$ or $Zn_2Te_3O_8$ phase with ZnO as increasing temperature and therefore retards the densification of ZnO to $1000^{\circ}C$. In ZT1M1 system, also, the densification of ZnO was retarded up to $1000^{\circ}C$ and then reached > 90% of theoretical density above $1100^{\circ}C$. It was found that a good varistor characteristics(nonlinear coefficient $a{\sim}60$) were developed in ZT1M1 system sintered at $1100^{\circ}C$ due to Mn which known as improving the nonlinearity of ZnO varistors. The results of C-V characteristics such as barrier height (${\Phi}_b$), donor density ($N_D$), depletion layer (W), and interface state density ($N_t$) in ZT1M1 ceramics were $1.8{\times}10^{17}cm^{-3}$, 1.6 V, 93 nm, and $1.7{\times}10^{12}cm^{-2}$, respectively. Also we measured the resistance and capacitance of grain boundaries with temperature using impedance and electric modulus spectroscopy. It will be discussed about the stability and homogeneity of grain boundaries using distribution parameter ($\alpha$) simulated with the Z(T)"-logf plots.

• Wind and Structures
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• v.20 no.1
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• pp.37-58
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• 2015

As wind flows around a sharp-edged body, the resulting separated flow becomes complicated, with multiple separations and reattachments as well as vortex recirculation. This widespread and unpredictable phenomenon has long been studied academically as well as in engineering applications. In this study, the flow characteristics around rectangular prisms with five different aspect ratios were determined through wind tunnel experiments and a detached eddy simulation, that placed the objects in a simulated deep turbulent boundary layer at $Re=4.6{\times}10^4$. A series of rectangular prisms with the same height (h = 80 mm), different longitudinal lengths (l = 0.5h, h, and 2h), or different transverse widths (w = 0.5h, h, and 2h) were employed to observe the effects of the aspect ratio. Furthermore, five wind directions ($0^{\circ}$, $10^{\circ}$, $20^{\circ}$, $30^{\circ}$, and $45^{\circ}$) were selected to observe the effects of the wind direction. The simulated results of the surface pressure were compared to the wind tunnel experiment results and the existing results of previous papers. The vortex and spectrum were also analyzed to determine the detailed flow structure around the body. The paper also highlights the pressure distribution around the rectangular prisms with respect to the different aspect ratios. With an increasing transverse width, the surface suction pressure on the top and side surfaces becomes stronger. In addition, depending on the wind direction, the pressure coefficient experiences a large variation and can even change from a negative to a positive value on the side surface of the cube model.

• Wind and Structures
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• v.23 no.1
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• pp.1-18
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• 2016

This work experimentally and numerically analyzes the flow configurations and the dynamic wind loads on panels of rectangular L/h 5:1 cross section mounted on a structural frame of rectangular bars of L/h 0.5:1, corresponding to a radar structure. The fluid dynamic interaction between panels and frame wakes imposes dynamic loads on the panels, with particular frequencies and Strouhal numbers, different from those of isolated elements. The numerical scheme is validated by comparison with mean forces and velocity spectra of a panel wake obtained by wind tunnel tests. The flow configuration is analyzed through images of the numerical simulations. For a large number of panels, as in the radar array, their wakes couple in either phase or counter-phase configurations, changing the resultant forces on each panel. Instantaneous normal and tangential force coefficients are reported; their spectra show two distinct peaks, caused by the interaction of the wakes. Finally, a scaled model of a rectangular structure comprised of panels and frame elements is tested in the boundary layer wind tunnel in order to determine the influence of the velocity variation with height and the three-dimensionality of the bulk flow around the structure. Results show that the unsteady aerodynamic loads, being strongly influenced by the vortex shedding of the supporting elements and by the global 3-D geometry of the array, differ considerably on a panel in this array from loads acting on an isolated panel, not only in magnitude, but also in frequency.

• Smart Structures and Systems
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• v.25 no.1
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• pp.81-96
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• 2020

Wind measurements were made on the Canton Tower at a height of 461 m above ground during the Typhoon Vincente, the wind-induced accelerations and displacements of the tower were recorded as well. Comparisons of measured wind parameters at upper level of atmospheric boundary layer with those adopted in wind tunnel testing were presented. The measured turbulence intensity can be smaller than the design value, indicating that the wind tunnel testing may underestimate the crosswind structural responses for certain lock-in velocity range of vortex shedding. Analyses of peak factors and power spectral density for acceleration response shows that the crosswind responses are a combination of gust-induced buffeting and vortex-induced vibrations in the certain range of wind directions. The identified modal frequencies and mode shapes from acceleration data are found to be in good agreement with existing experimental results and the prediction from the finite element model. The damping ratios increase with amplitude of vibration or equivalently wind velocity which may be attributed to aerodynamic damping. In addition, the natural frequencies determined from the measured displacement are very close to those determined from the acceleration data for the first two modes. Finally, the relation between displacement responses and wind speed/direction was investigated.

• Journal of Forest and Environmental Science
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• v.32 no.3
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• pp.270-279
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• 2016

This study explained vertical distributions and growth environments for woody vegetation. It had been degenerated by long-term volcanic activity of Sakurajima; vegetation and thicknesses of tephra layers and forest soils were investigated at 5 sites (250-700 m in altitude) with different altitudes localized at the northwestern-northern flanks of Sakurajima in Kagoshima Prefecture. The results in 2015 were compared with the vertical distribution of woody vegetation in 1963, when the volcanic activity of Sakurajima was relatively moderate. Thus, we investigated temporal changes in the vertical distribution of woody vegetation owing to volcanic activity over about 50 years (1963-2015). We indicated altitude decreased, the number of woody vegetation, number of species, sum of cross-sectional area of tree diameter at breast height, Fisher-Williams's diversity index ${\alpha}$, and forest soil thickness increased. However, these values were found to be degenerated when compared to climax forest values, and succession was incomplete. It seems that because the woody vegetation of the flank was affected by volcanic activity for a long time, exposing them to severe growth environments, areas with lower altitudes became distant from the craters of Sakurajima, thereby weakening the effect of volcanic activity in these areas at lower altitudes. a at the same altitudes over about 50 years (1963-2015) decreased by about 31-72%, and the sum of the cross-sectional area in tree diameter at breast heights decreased by about 14-62%. Thus, comparative growth environments for woody vegetation in 2015 were more severe than that of 1963, with respect to tephra layer thickness. In addition, for vegetation succession in the flank of Sakurajima, vegetation restoration should be promoted through the introduction of artificial woody plants covered by symbiotic microorganisms or organic materials.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.15 no.2
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• pp.86-96
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• 2003

A fracture or breakage of the concrete armor units in the primary cover layer of breakwaters is studied by using the reliability analysis which may be defined as the structural stability. The reliability function can be derived as a function of the angle of rotation that represents the rocking of armor units quantitatively. The relative influences of all of random variables related to the material and geometric properties on the fracture of armor units is analyzed in detail. In addition, the probability of failure for the fracture of individual armor unit can be evaluated as a function of the incident wave height. Finally, Bernoulli random process and the allowable fracture ratio may be introduced together in this paper, by which the probability of failure of a breakwater due to the fracture of armer units can be obtained straightforwardly. It is found that the probability of failure of a breakwater due to the fracture of armor units may be varied with the several allowable fracture ratios. Therefore, it should be necessary to consider the structural stability as well as the hydraulic stability for the design of breakwaters with multi-leg slender concrete armor units of large size under wave action in deep water.

• Wind and Structures
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• v.15 no.4
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• pp.331-343
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• 2012

Thunderstorm downbursts are responsible for numerous structural failures around the world. The wind characteristics in thunderstorm downbursts containing vortex rings differ with those in 'traditional' boundary layer winds (BLW). This paper initially performs an unsteady-state simulation of the flow structure in a downburst (modelled as a impinging jet with its diameter being $D_{jet}$) using a computational fluid dynamics (CFD) method, and then analyses the pressure distribution on a solar updraft tower (SUT) in the downburst. The pressure field shows agreement with other previous studies. An additional pair of low-pressure region and high-pressure region is observed due to a second vortex ring, besides a foregoing pair caused by a primary vortex ring. The evolutions of pressure coefficients at five orientations of two representative heights of the SUT in the downburst with time are investigated. Results show that pressure distribution changes over a wide range when the vortices are close to the SUT. Furthermore, the fluctuations of external static pressure distribution for the SUT case 1 (i.e., radial distance from a location to jet center x=$D_{jet}$) with height are more intense due to the down striking of the vortex flow compared to those for the SUT case 2 (x=$2D_{jet}$). The static wind loads at heights z/H higher than 0.3 will be negligible when the vortex ring is far away from the SUT. The inverted wind load cases will occur when vortex is passing through the SUT except on the side faces. This can induce complex dynamic response of the SUT.