• Title/Summary/Keyword: Laser process

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Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: opportunities and challenges

  • Cabarrocas, Pere Roca I;Abramov, Alexey;Pham, Nans;Djeridane, Yassine;Moustapha, Oumkelthoum;Bonnassieux, Yvan;Girotra, Kunal;Chen, Hong;Park, Seung-Kyu;Park, Kyong-Tae;Huh, Jong-Moo;Choi, Joon-Hoo;Kim, Chi-Woo;Lee, Jin-Seok;Souk, Jun-H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.107-108
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    • 2008
  • The spectacular development of AMLCDs, been made possible by a-Si:H technology, still faces two major drawbacks due to the intrinsic structure of a-Si:H, namely a low mobility and most important a shift of the transfer characteristics of the TFTs when submitted to bias stress. This has lead to strong research in the crystallization of a-Si:H films by laser and furnace annealing to produce polycrystalline silicon TFTs. While these devices show improved mobility and stability, they suffer from uniformity over large areas and increased cost. In the last decade we have focused on microcrystalline silicon (${\mu}c$-Si:H) for bottom gate TFTs, which can hopefully meet all the requirements for mass production of large area AMOLED displays [1,2]. In this presentation we will focus on the transfer of a deposition process based on the use of $SiF_4$-Ar-$H_2$ mixtures from a small area research laboratory reactor into an industrial gen 1 AKT reactor. We will first discuss on the optimization of the process conditions leading to fully crystallized films without any amorphous incubation layer, suitable for bottom gate TFTS, as well as on the use of plasma diagnostics to increase the deposition rate up to 0.5 nm/s [3]. The use of silicon nanocrystals appears as an elegant way to circumvent the opposite requirements of a high deposition rate and a fully crystallized interface [4]. The optimized process conditions are transferred to large area substrates in an industrial environment, on which some process adjustment was required to reproduce the material properties achieved in the laboratory scale reactor. For optimized process conditions, the homogeneity of the optical and electronic properties of the ${\mu}c$-Si:H films deposited on $300{\times}400\;mm$ substrates was checked by a set of complementary techniques. Spectroscopic ellipsometry, Raman spectroscopy, dark conductivity, time resolved microwave conductivity and hydrogen evolution measurements allowed demonstrating an excellent homogeneity in the structure and transport properties of the films. On the basis of these results, optimized process conditions were applied to TFTs, for which both bottom gate and top gate structures were studied aiming to achieve characteristics suitable for driving AMOLED displays. Results on the homogeneity of the TFT characteristics over the large area substrates and stability will be presented, as well as their application as a backplane for an AMOLED display.

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개회로 파장 변조 분광법과 에디 공분산 방법으로 논에서 관측된 CH4 플럭스 자료의 보정 (Corrections on CH4 Fluxes Measured in a Rice Paddy by Eddy Covariance Method with an Open-path Wavelength Modulation Spectroscopy)

  • 강남구;윤주열;아산 탈룩더;문민규;강민석;심교문;김준
    • 한국농림기상학회지
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    • 제17권1호
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    • pp.15-24
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    • 2015
  • $CH_4$$CO_2$$N_2O$와 더불어 중요한 온실가스로서 지속적이고도 체계적인 감시가 요구된다. 에디 공분산 기술 기반의 $CO_2$ 플럭스의 관측은 이미 세계적으로 관측망이 구축되어 관측부터 자료처리에 이르기까지 모든 과정이 표준화되어 있을 뿐 아니라 체계적으로 잘 문서화되어 있다. 그러나 미량 기체인 $CH_4$의 경우, 레이저 기반의 고속반응 분광계를 필요로 할 뿐 아니라, 이에 수반되는 플럭스 자료의 처리 과정이 표준화되어 있지 않다. 본 연구 노트에서는 최근에 상용화된 개회로 파장 변조 분광계를 사용하여 에디 공분산 방법으로 논에서 관측한 $CH_4$ 플럭스 결과를 보고하였다. 모내기 전과 직후의 각 5일간 연속 관측한 자료를 KoFlux 프로토콜에 따라 상용화된 $EddyPro^{TM}$ 프로그램을 사용하여 자료를 처리하였다. 이 후처리 과정에서 세 가지 주요 보정, (1) 주파수 반응 보정, (2) 공기 밀도 보정, (3) 분광 보정의 효과를 정량화 하였다. 보정 효과는 밤과 낮에 따라 차이를 보였고, 메탄플럭스가 작을수록 보정 효과가 컸다. 전반적으로 보정 후에 메탄 플럭스는 평균 20-25% 정도 증가하였다. 국가농림기상센터(www.ncam.kr)에서는 분광 보정과 빈 자료 메우기를 포함한 $CH_4$플럭스 자료 처리가 포함된 업데이트된 KoFlux 프로그램을 일반 사용자에게 제공할 예정이다.

SURFACE CHARACTERISTICS AND BIOLOGICAL RESPONSES OF HYDROXYAPATITE COATING ON TITANIUM BY HYDROTHERMAL METHOD: AN IN VITRO STUDY

  • Kim, Dong-Seok;Kim, Chang-Whe;Jang, Kyung-Soo;Lim, Young-Jun
    • 대한치과보철학회지
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    • 제43권3호
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    • pp.363-378
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    • 2005
  • Statement of problem. Hydroxyapatite(HA) coated titanium surfaces have not yet showed the reliable osseointegration in various conditions. Purpose. This study was aimed to investigate microstructures, chemical composition, and surface roughness of the surface coated by the hydrothermal method and to evaluate the effect of hydrothermal coating on the cell attachment, as well as cell proliferation. Material and Methods. Commercially pure(c.p.) titanium discs were used as substrates. The HA coating on c.p. titanium discs by hydrothermal method was performed in 0.12M HCl solution mixed with HA(group I) and 0.1M NaOH solution mixed with HA(group II). GroupⅠ was heated at 180 $^{\circ}C$ for 24, 48, and 72 hours. GroupⅡ was heated at 180 $^{\circ}C$ for 12, 24, and 36 hours. And the treated surfaces were evaluated by Scanning electron microscopy(SEM), Energy dispersive X-ray spectroscopy(EDS), X-ray photoelectron spectroscopy(XPS), X-ray diffraction method(XRD), Confocal laser scanning microscopy(CLSM). And SEM of fibroblast and 3-(4,5- dimethylthiazol-2-yl)-2,5-diphenyl tetrazolium bromide(MTT) assay were used for cellular responses of the treated surfaces. Results. The color of surface changed in both groups after the hydrothermal process. SEM images showed that coating pattern was homogeneous in group II, while inhomogeneous in group I. H72 had rosette-like precipitates. The crystalline structure grew gradually in group II, according to extending treatment period. The long needle-like crystals were prominent in N36. Calcium(Ca) and phosphorus(P) were not detected in H24 and H48 in EDS. In all specimens of group II and H72, Ca was found. Ca and P were identified in all treated groups through the analysis of XPS, but they were amorphous. Surface roughness did not increase in both groups after hydrothermal treatment. The values of surface roughness were not significantly different between groups I and II. According to the SEM images of fibroblasts, cell attachments were oriented and spread well in both treated groups, while they were not in the control group. However, no substantial amount of difference was found between groups I and II. Conclusions. In this study during the hydrothermal process procedure, coating characteristics, including the HA precipitates, crystal growth, and crystalline phases, were more satisfactory in NaOH treated group than in HCl treated group. Still, the biological responses of the modified surface by this method were not fully understood for the two tested groups did not differ significantly. Therefore, more continuous research on the relationship between the surface features and cellular responses seems to be in need.

이광자 광중합의 윤곽선 스캐닝법에 의한 마이크로 입체형상 제작 (Fabrication of Microstructures Using Double Contour Scanning (DCS) Method by Two-Photon Polymerization)

  • 박상후;임태우;이상호;양동열;공흥진;이광섭
    • 폴리머
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    • 제29권2호
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    • pp.146-150
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    • 2005
  • 본 연구는 수십 마이크로미터 크기의 임의의 3차원 형상제작을 위한 이광자 광중합에 의한 나노 입체 리소그래피(nano-stereolithography) 공정개발에 관한 것이다. 본 연구에서 제안한 공정은 3차원 CAD 파일을 이용하여 형상의 윤곽선을 고화시켜서 연속적으로 적층하여 구조물을 제작하는 공정으로 기존의 리소그래피 공정과 달리 복잡한 형상제작이 가능하다. 형상제작은 펨토초 레이저를 이용하여 이광자 흡수 색소가 첨가된 아크릴레이트 계열의 단량체에 이광자 중합반응으로 제작하였으며 선 폭 정밀도는 150 nm수준이었다. 이광자 광중합법으로 윤곽선을 고화시켜 쉘(shell) 형태로 3차원 형상을 제작할 때에는 기계적 강성이 약하여 고화 후에 용매로 중합반응이 일어나지 않는 부분을 제거할 때 변형이 쉽게 발생하게 된다. 본 연구에서는 이러한 문제점을 해결하고자 윤곽 쉘 두께를 증가시켜 윤곽선을 중첩으로 제작하는 이중 윤곽선 스캐닝 방법(double contour scanning)을 시도하였으며 이를 통하여 제작된 형상의 강도가 향상됨을 확인할 수 있었다.

캠 샤프트 재용융 처리시 재흑연화 현상에 관한 연구 (Investigation of Regraphitization during Cam Shaft Remelting)

  • 오영근;김광수;고진현
    • 한국재료학회지
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    • 제8권7호
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    • pp.648-652
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    • 1998
  • 자동차용 캠 샤프트의 표면경화를 위해 TiG 용접공정에 의한 재용융처리가 실시되었다. 재용융처리는 캠축에 평행한 방향으로 행하여졌다. 캠 샤프트 소재의 조직은 편상의 흑연과 퍼얼라이트의 회주철 조직으로 구성되어 있으나 재용융 처리후 미세한 퍼얼라이트 및 세멘타이트와 구상 오스테나이트의 레데브라이트 조직으로 변화하였다. 캠 샤프트 모재의경도는 HRc 25~28에서 재용융 처리후에는 HRg 53~55정도로 증가하였다. 다층 용융 처리시 비드가 겹치는 경계에서 검은띠가 관찰되었는데 이 검은띠는 흑연으로 판명되었다. 이 검은띠는 전층의 레데브라이트 조직이 변태된 것으로 주로 세멘타이트와 기지조직의 경계에서 생성되었다. 고밀도 에너지인 레이저 용융처리시에도 재흑연화 현상은 TIG의 경우처럼 관찰되었다. 재흑연화 현상의 확인을 위해서 Gleeble 1500을 이용하여 $1100^{\circ}C$$1000^{\circ}C$에서 0.5, 1, 3, 5 및 10초동안 유지한 모의실험을 하였다. $1000^{\circ}C$에서 0.5초 유지했을 때도 흑연이 발견된 것으로 보아 재흑연화 현상은 어떠한 재용융 처리 공정을 사용하더라도 피할 수 없는 현상임을 확인할 수 있다.

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Annealing of Co-Cr dental alloy: effects on nanostructure and Rockwell hardness

  • Ayyildiz, Simel;Soylu, Elif Hilal;ide, Semra;Kilic, Selim;Sipahi, Cumhur;Piskin, Bulent;Gokce, Hasan Suat
    • The Journal of Advanced Prosthodontics
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    • 제5권4호
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    • pp.471-478
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    • 2013
  • PURPOSE. The aim of the study was to evaluate the effect of annealing on the nanostructure and hardness of Co-Cr metal ceramic samples that were fabricated with a direct metal laser sintering (DMLS) technique. MATERIALS AND METHODS. Five groups of Co-Cr dental alloy samples were manufactured in a rectangular form measuring $4{\times}2{\times}2$ mm. Samples fabricated by a conventional casting technique (Group I) and prefabricated milling blanks (Group II) were examined as conventional technique groups. The DMLS samples were randomly divided into three groups as not annealed (Group III), annealed in argon atmosphere (Group IV), or annealed in oxygen atmosphere (Group V). The nanostructure was examined with the small-angle X-ray scattering method. The Rockwell hardness test was used to measure the hardness changes in each group, and the means and standard deviations were statistically analyzed by one-way ANOVA for comparison of continuous variables and Tukey's HSD test was used for post hoc analysis. P values of <.05 were accepted as statistically significant. RESULTS. The general nanostructures of the samples were composed of small spherical entities stacked atop one another in dendritic form. All groups also displayed different hardness values depending on the manufacturing technique. The annealing procedure and environment directly affected both the nanostructure and hardness of the Co-Cr alloy. Group III exhibited a non-homogeneous structure and increased hardness ($48.16{\pm}3.02$ HRC) because the annealing process was incomplete and the inner stress was not relieved. Annealing in argon atmosphere of Group IV not only relieved the inner stresses but also decreased the hardness ($27.40{\pm}3.98$ HRC). The results of fitting function presented that Group IV was the most homogeneous product as the minimum bilayer thickness was measured (7.11 ${\AA}$). CONCLUSION. After the manufacturing with DMLS technique, annealing in argon atmosphere is an essential process for Co-Cr metal ceramic substructures. The dentists should be familiar with the materials that are used in clinic for prosthodontics treatments.

용융아연 도금공정에서의 SNOUT 내부 유동장 해석 ( I ) (Velocity Field Measurement of Flow Inside SNOUT of Zinc Plating Process ( I ))

  • 신대식;최제호;이상준
    • 대한기계학회논문집B
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    • 제23권10호
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    • pp.1265-1273
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    • 1999
  • PIV(Particle Image Velocimetry) velocity field measurements inside the snout of a1/10 scale model of the Zn plating process were carried out at the strip speed $V_s=1.5m/s$. Aluminum powder particles ($1{\mu}m$) and atomized olive oil ($3{\mu}m$) were used as seeding particles to simulate the molten Zinc flow and deoxidization gas flow, respectively. A pulsed Nd:Yag laser and a $2K{\times}2K$ high-resolution CCD camera were synchronized for the PIV velocity field measurement. From flow visualization study, it is found that the liquid flow in the Zn pot is dominantly governed by the uprising flow caused by the rotating sink roll, with its effect on the steel strip inside the snout largely diminished by installing of the snout. The deoxidization gas flow in front of the strip inside the snout can be characterized by a large-scale vortex rotating clockwise direction formed by the moving strip. In the rear side of the strip, a counter-clockwise vortex is formed and some of the flow entrained by the moving strip impinges on the free surface of molten zinc. The liquid flow in front of the strip is governed by the flow entering the snout, caused by the spinning sink roll. Just below the free surface a counter-clockwise vortex is formed near the snout wall. The moving strip affects dominantly the flow behind the strip inside the snout, and large amount of the liquid flow follows the moving strip toward the sink roll. The thickness of the flow following the strip is very thin in the front side due to the uprising flow, however thick boundary layer is formed in the rear side of the strip. Its thickness is increased as moving downstream toward the sink roll. Inside the snout, the deoxidization gas flow above the free surface is much faster than the liquid flow in the zinc pot. Due to the larger influx of the flow following the moving strip in the rear side of the strip, higher percentage of imperfection can be anticipated on the rear surface of the strip.

Detection of Clavibacter michiganensis subsp. michiganensis Assisted by Micro-Raman Spectroscopy under Laboratory Conditions

  • Perez, Moises Roberto Vallejo;Contreras, Hugo Ricardo Navarro;Herrera, Jesus A. Sosa;Avila, Jose Pablo Lara;Tobias, Hugo Magdaleno Ramirez;Martinez, Fernando Diaz-Barriga;Ramirez, Rogelio Flores;Vazquez, Angel Gabriel Rodriguez
    • The Plant Pathology Journal
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    • 제34권5호
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    • pp.381-392
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    • 2018
  • Clavibacter michiganensis subsp. michiganesis (Cmm) is a quarantine-worthy pest in $M{\acute{e}}xico$. The implementation and validation of new technologies is necessary to reduce the time for bacterial detection in laboratory conditions and Raman spectroscopy is an ambitious technology that has all of the features needed to characterize and identify bacteria. Under controlled conditions a contagion process was induced with Cmm, the disease epidemiology was monitored. Micro-Raman spectroscopy ($532nm\;{\lambda}$ laser) technique was evaluated its performance at assisting on Cmm detection through its characteristic Raman spectrum fingerprint. Our experiment was conducted with tomato plants in a completely randomized block experimental design (13 plants ${\times}$ 4 rows). The Cmm infection was confirmed by 16S rDNA and plants showed symptoms from 48 to 72 h after inoculation, the evolution of the incidence and severity on plant population varied over time and it kept an aggregated spatial pattern. The contagion process reached 79% just 24 days after the epidemic was induced. Micro-Raman spectroscopy proved its speed, efficiency and usefulness as a non-destructive method for the preliminary detection of Cmm. Carotenoid specific bands with wavelengths at 1146 and $1510cm^{-1}$ were the distinguishable markers. Chemometric analyses showed the best performance by the implementation of PCA-LDA supervised classification algorithms applied over Raman spectrum data with 100% of performance in metrics of classifiers (sensitivity, specificity, accuracy, negative and positive predictive value) that allowed us to differentiate Cmm from other endophytic bacteria (Bacillus and Pantoea). The unsupervised KMeans algorithm showed good performance (100, 96, 98, 91 y 100%, respectively).

폴리머코어 게이트 크기 변화가 두께 방향 수축률에 미치는 영향에 대한 연구 (A study on the effects of polymer core gate sizes on thickness shrinkage rate)

  • 최한솔;정의철;박준수;김미애;채보혜;김상윤;김용대;윤경환;이성희
    • Design & Manufacturing
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    • 제14권1호
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    • pp.1-7
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    • 2020
  • In this study, the variation of the shrinkage in the thickness direction of the molded parts according to the gate size of the polymer core fabricated through the 3D printer using the SLS method was studied. The polymer cores are laser sintered and the powder material is nylon base PA2200. The polymer cores have lower heat transfer rate and rigidity than the metal core due to the characteristics of the material. Therefore, the injection molding test conditions are set to minimize the deformation of the core during the injection process. The resin used in the injection molding test is a PP material. The packing condition was set to 80, 90 and 100% of the maximum injection pressure for each gate size. The runner diameter used was ∅3mm, and the gates were fabricated in semicircle shapes with cross sections 1, 2, and 3 ㎟, respectively. Thickness measurement was performed for 10 points at 2.5 mm intervals from the point 2.5 mm away from the gate, and the shrinkage to thickness was measured for each point. The shrinkage rate according to the gate size tends to decrease as the cross-sectional area decreases as the maximum injection pressure increases. The average thickness shrinkage rate was close to 0% when the packing pressure was 90% for the gate area of 1mm2. When the holding pressure was set to 100%, the shrinkage was found to decrease by 3% from the standard dimension due to the over-packing phenomenon. Therefore, the smaller the gate, the more closely the molded dimensions can be molded due to the high pressure generation. It was confirmed that precise packing process control is necessary because over-packing phenomenon may occur.

복합재 격자 구조 비파괴평가를 위한 초음파전파 영상화 시스템 활용 연구 (Study on Application of Ultrasonic Propagation Imager for Non-destructive Evaluation of Composite Lattice Structure)

  • 박재윤;신혜진;이정률
    • Composites Research
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    • 제30권6호
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    • pp.356-364
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    • 2017
  • 복합재 격자 구조는 동일한 무게를 갖는 다른 구조에 비해 더 큰 하중을 견딜 수 있다는 장점으로 인해 다양한 분야에 적용이 시도되고 있다. 최근, 국내에서도 복합재 격자 구조 제작을 위한 기술 개발이 이루어지고 있으며 이에 복합재 격자 구조를 빠르고 정밀하게 검사할 수 있는 비파괴검사 기술의 개발 역시 필요하게 되었다. 본 논문에서는 초음파전파 영상화 시스템들을 활용하여 복합재 격자 구조에 빠르고 정밀한 비파괴검사를 하기 위한 연구를 수행하였다. 레이저 펄스에코 초음파전파 영상화 시스템을 통해 스킨에 쌓여 있는 복합재 격자 구조의 내부 리브 구조를 관찰할 수 있었고 접착분리를 검출할 수 있는 가능성을 확인하였다. 또한 검사시간을 줄이기 위해 주파수 영역을 최적화 하기 위한 밴드 디바이더를 개발 적용하였으며, 검사 결과의 질을 향상시키기 위해 곡률 보상 알고리즘을 개발하였다. 유도파 초음파전파 영상화 시스템으로는 리브 구조에 있는 층간분리 결함을 확인할 수 있었으며, 다중 소스 초음파전파영상을 통해 검사 영역을 확대시켰고 가변시간창 진폭 이미지 알고리즘을 통해 결함을 강조시킬 수 있도록 했다. 이와 같은 결과들을 통해 격자구조에 최적화 된 초음파전파 영상화 시스템의 지속적인 개발이 이뤄지면 복합재 격자 구조의 대량생산에 이은 고속 정밀 비파괴검사가 이뤄질 수 있을 것으로 판단된다.