• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.620-623
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• 2003

The material processing by using ultrashort pulse laser, in recently, is actively applying into the micro machining and nano-machining technology since ultrashort pulse has so faster than the time which the electrons energy absorbing photon energy is transmitted to surrounding lattice-phonon that it has many advantages in point of machining. The micro machining of metallic thin film on the plain glass is widely used in the fields such as mask repairing for semiconductor, fabrication of photonic crystal, MEMS devices and data storage devices. Therefore, it is important to secure the machining technology of the sub-micron size. In this research, we set up the machining system by using ultrashort pulse laser and conduct on the Cr 200nm thin film ablation experiments of spot and line with the variables such as energy, pulse number, speed, and so on. And we observed the characteristics of surrounding heat-affected zone and by-products appeared in critical energy density and higher energy density through SEM, and also examined the machining features between in He gas atmosphere which make pulse change minimized by nonlinear effect and in the air. Finally, the pit size of 0.8${\mu}{\textrm}{m}$ diameter and the line width of 1${\mu}{\textrm}{m}$ could be obtained.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.844-847
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• 2001

The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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• pp.97-100
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• 2006

Picosecond (ps) laser micro-machining has emerged as an attractive method of fabricating high-precision microstructures, especially in metals. In this paper, a metallic mold for diffraction gratings is fabricated with a mode-locked 12 ps $Nd:YVO_4$ laser. Laser pulses with a wavelength of 355nm are irradiated on the surface of NOK 80, a mold material, to generate line patterns. In order to minimize the line width, laser power is set just above the ablation threshold of NOK 80. Results show that the spectrum from the fabricated mold is good enough for some industrial application.

• 한국정밀공학회지
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• 제29권5호
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• pp.506-509
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• 2012

Laser assisted machining is the processing method that preheating brittle materials by laser heat source and cutting the soften area. This processing applied to various industries because it can be cutting difficult-to-cut materials. However, the laser assisted machining appeared the limitations of processing for equipped with the spindle. So, it assumed separate model that spindle and laser assisted machining. In feed, the calculation of changing the angle of the laser module according to preheat point and the shape of the feed is important and it tried easy calculating changing angle of 1-axis Manipulator in separate model. In 3 types feed shape, angle of 1-axis Manipulator was calculated when fixed and moved in the outside of spindle. In this study, suggest 2 types of methods for laser module when fixed and moved.

• 한국정밀공학회지
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• 제31권2호
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• pp.119-123
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• 2014

Recently, laser processing technologies have been developed in many different industrial fields. The laser processing technologies are widely being applied such as laser assisted machining, cladding, heat treatment and coating. In the laser modules of the laser assisted machining system, laser lens is very important for accuracy and productivity of product. As the laser beam size, shape and focusing distance change, heat input energy of preheating point can be changed, the laser module of the laser assisted machining system should be equipped with various lenses differing beam size, beam shape and focusing distance. In this study, the rotary and linear laser modules are suggested. The finite element analysis is carried out to certify the static and dynamic stabilities of the developed laser modules. Finally, the rotary and linear laser modules have been fabricated successfully using the analysis results.

• 한국정밀공학회지
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• 제31권1호
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• pp.75-81
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• 2014

Laser beam machining has been known as efficient for glass micromachining. It is usually used the ultra-short pulsed laser which is time-consuming and uneconomic process. In order to use economic and powerful long pulsed laser, indirect processing called laser-induced backside wet etching (LIBWE) is good alternative method. In this paper, micromachining of glass using Nd:YAG laser with nanosecond pulsed beam has been attempted. In order to improve shape accuracy, combined processing with magnetic stirrer has been widely used. Magnetic stirrer acts to circulate the solution and remove the bubble but it is not suitable for deep hole machining. To get better effect, ultrasonic vibration was applied for improving shape accuracy.

• 한국산업융합학회 논문집
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• 제26권6_3호
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• pp.1197-1204
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• 2023

Ti-alloy, a high-strength alloy material among the materials used in aircraft that are trending toward lighter weight, is classified as a difficult-to-cut material that requires a lot of energy for cutting. Cutting in a high-temperature environment is considered one means of making this possible, and various studies have been conducted on it. In particular, research on LAM (Laser Assisted Machining (LAM)), which utilizes laser heating of the cutting area, is being actively conducted. Before processing of the milling cutter begins, the temperature is raised locally by the laser irradiated through the laser head carrier, and the resistance during milling is reduced. Therefore, in this paper, in order to derive such conditions, we performed heat transfer analysis according to transfer conditions and compared it with actually applied test data to use it to establish appropriate processing conditions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.707-708
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.41-42
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.107-108
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• 2010