• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2009.04a
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• pp.65-73
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• 2009

The terrestrial laser scanner measures the signal delay time of electronic circuit in EDM(Electronic Distance Measurement) Module for distance measurement. To measure signal delay time precisely, transmitting laser beam of terrestrial laser scanner is divided optically. Therefore, 10% of the laser beam power is entered into the electronic circuit and the others go out through lens. But, measure of delay time is severe in the laser scanner system that the laser beam power is changed dynamically by reflectance of a object, because characters like gain of electronic circuit involving APD(Avalanche Photo Diode) and so on are changed by incident laser beam. Therefore, we adapt ND(Neutral Density) filter that has grid pattern to the laser scanner system to keep constant the incident laser beam power. In this paper, we propose the simulation program for efficient design of ND filter pattern. Finally, to affirm simulation program, we conduct the experimental test of simulated ND filter that has linearly transmittance change, and we consider the experiment result.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.78-78
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• 1999

Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

• Laser Solutions
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• v.10 no.2
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• pp.17-24
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• 2007

We have studied a laser direct writing lithography(LDWL). This is more important to apply to micro patterning using UV laser. We demonstrate the possibility of LDWL and construct the fabrication system. We use Galvano scanner to process quickly micro patterns from computer data. And laser beam is focused with $F-{\theta}$ lens. AZ5214 and SU-8 photoresist are chosen as experimental materials and a kind of well-known positive and negative photoresist respectively. Laser ablation mechanism depends on the optical properties of polymer. In this paper, therefore we investigate the phenomenon of laser ablation according to the laser fluence variation and measure the shape profile of micro patterned holes. From these experimental results, we show that LDWL is very useful to process various micro patterns directly.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1737-1740
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• 2005

As the various manufacturing technology of optical glass is developed, the aspherical lenses are applied to many fields. However, It is still very difficult to manufacture glass lens because of the high cost and the short life of core. In recent years, the demands of the aspherical glass lenses increase since it is difficult to obtain the desirable performance in the plastic lens. In the glass mold lens, it has merits of high productivity and reproductivity since lens is manufactured by the only forming with high precision mold. The fabricating conditions for glass mold lens are glass surface that does not cause fusion, viscosity of 108-1013 poise for the $0.2{\mu}m$ accuracy, and viscoelasticity for the roughness less than 100 angstrom. In this thesis, ultra-precision grinding characteristics of tungsten carbide for forming the aspherical glass lens core were studied and the result of it is applied to manufacture the tungsten carbide-base core of the glass lens used to the laser scanning unit and the camera phone.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.2
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• pp.35-39
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• 2018

In order to improve the coupling efficiency, a collimator lens that collects the light emitted from the laser diode at a wide angle to the core of the optical fiber is essential. Glass mold method using a mold is widely used as a collimator lens currently used. Although this method is inexpensive to produce, it is difficult to form precisely and quality problems such as spherical aberration. In this study, the precision of surface processing was improved by replacing the existing glass mold method with the semiconductor process, and the material of the lens was changed to silicon suitable for the semiconductor process. The semiconductor process consists of a photolithography process using PR and a dry etching process using plasma. The optical coupling efficiency was measured using an ultra-precision alignment system for the evaluation of the optical characteristics of the silicon lens. As a result, the optical coupling efficiency was 50% when the lens diameter was $220{\mu}m$, and the optical coupling property was 5% or less with respect to the maximum optical coupling efficiency in the lens diameter range of $210-240{\mu}m$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1179-1180
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• 2005

3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

• Korean Journal of Optics and Photonics
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• v.17 no.4
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• pp.354-358
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• 2006

A silicon lens and an insulator of pyrex, components of a micro-electron column, should be assembled by aligning and stacking simultaneously. An optical alignment of a diffraction beam and a laser welding were employed for the assembly of a source lens and an Einzel lens with precision within $\pm$4% for the maximum aperture size. The experimental condition for optical alignment and laser welding are explained. Anodic bonding was used to assist in stacking lenses. A micro-electron column of smaller apertures assembled with precise alignment and fabrication was tested with a current image of a Cu grid of 9$\mu$m in linewidth, and showed a higher resolution in acceleration mode.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.6
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• pp.459-467
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• 2016

Using a line scan camera and a Galvano mirror, we constructed a high-speed line-scanning microscope that can generate 2D images ($8000{\times}8000pixels$) without any moving parts. The line scanner consists of a Galvano mirror and a cylindrical lens, which creates a line focus that sweeps over the sample. The measured resolutions in the x (perpendicular to line focus) and y (parallel to line focus) directions are both $2{\mu}m$, with a 2X scan lens and a 3X relay lens. This optical system is useful for measuring defects, such as spalling, chipping, delamination, etc., on the surface of carbon fiber reinforced plastic (CFRP) holes after machining in conjunction with adjustments in the angle of LED lighting. Defects on the inner wall of holes are measured by line confocal laser scanning. This confocal method will be useful for analyzing defects after CFRP machining and for fast 3D image reconstruction.

• Korean Journal of Optics and Photonics
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• v.8 no.2
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• pp.107-110
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• 1997

We generated a diffraction free beam from Nd:YAG laser with an NBUR (negative branch unstable ring) resonator. The field inside the resonator had a plane wavefront and a homogeneous intensity distribution and the output beam through a scraper mirror of an annular type was used as a source. The outpur beam had an inner radius of 2.5 mm and an outer radius of 5 mm. In this experiment, we used a Fourier transformation lens with the focal length of 5 m to observe the far-field pattern. The lens was placed at a distance of the focal length from the scraper mirror and we found that the beam did not show any noticable diffraction over the distance of 13 m from the lens.

• Journal of Korean Ophthalmic Optics Society
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• v.5 no.2
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• pp.181-186
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• 2000

The setup of the moir$\acute{e}$ deflectometry using the virtual grating was done, so the convergence and divergence of a pencil of ray was determined. The light source was He-Ne laser(3mW). The focal length of the first lens, the second lens being 18 mm, 250 mm respectively was used for the setup of the beam expander. The optics of the moir$\acute{e}$ deflectometry determining the vergence was used a diffraction grating(pitch = $1.6{\mu}m/line$) and a front flat reflection mirror. The effective focal length of the trial lens set was measured and compared with the theoretical value.