• 한국정밀공학회지
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• 제27권10호
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• pp.40-44
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• 2010

Laser drilling is an enabling technology for Through Silicon Via (TSV) interconnect applications. Recent advances in picoseconds laser drilling of blind, micron sized vias in silicon is presented here highlighting some of the attractive features of this approach such as excellent sidewall quality. In this study, we dealt with comparison of heat affection around drilled hole between a picosecond laser and a nanosecond laser process under the UV wavelength. Points which special attention should be paid are that picosecond laser process lowered experimentally recast layer, surface debris and micro-crack around hole in comparison with nanosecond laser process. These finding suggests that laser TSV process has possibility to drill under $10{\mu}m$ via. Finally, the laser drilling platform was constructed successfully.

• 한국레이저가공학회지
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• 제12권4호
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• pp.6-11
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• 2009

The LDS(Laser Direct Structuring) process uses thermoplastic polymers with a additive compound that serves as plating seed after the activation by laser. It can realize industry requirement such as miniaturization of electrical component, design flexibility and reduction of production steps. The purpose of this study is to introduce LDS, and to investigate the fundamental mechanism. Also the characteristics of conductive patterns were investigated with respect to laser fluence and intensity. We have used a pulsed fiber laser (wavelength : 1064nm) and copper electroless plating to fabricate conductive patterns. The result showed that laser induced metal-organic complex was caused metalization by electroless copper plating, the critical laser fluence was $1.41\;J/cm^2$ at a scan speed of 1 m/s.

• 한국레이저가공학회지
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• 제15권4호
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• pp.12-15
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• 2012

On behalf of the existing semiconductor process, the electronic devices to low-cost mass production to mass print the way, the research for development of roll-to-roll printing process is actively underway. This study was performed in about the research on the manufacturing technology of the printing roll used in the printing process of electronic devices. The indirect laser imprinting technology was used to create printable roll, and after coating copper on the surface of steel and thereon after coating polymer, after removing the polymer on the surface of roll, the printable roll was made. The laser system and roll feeder system were constructed and control program was developed. We has found the optimal conditions to perform laser patterning experiments using a system developed and We can make the minimum line width of 18 ${\mu}m$.

• 한국정밀공학회지
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• 제31권12호
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• 한국정밀공학회지
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• 제21권7호
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• pp.136-144
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• 2004

Optimal process and system to produce the laser welded tube for one body formed bumper beam are studied. The calculated size of tube is a thickness of 1.4mm, diameter of 105.4mm and length of 2000mm. The tube is shaped from a cold rolled high strength steel sheet(tensile strength: 60kgf/$\textrm{mm}^2$ grade). Two roll bending method is the optimal tube shaping process compared to UO-bending, bending on press brake, multi-step continuous roll forming and 3 roll bending methods. Weld quality monitoring and seam tracking along the butt-joint lengthwise to the tube axis are also studied. The longitudinal butt-joint is welded by the $CO_2$ laser welding system equipped with a seam tracker and plasma sensor. The constructed $CO_2$laser tube welding system can be used for the precision seam tracking and the real-time monitoring of weld quality. Finally, the obtained laser welded tube can be used for one-body formed automobile bumper beam.

• 한국기계가공학회지
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• 제21권2호
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• pp.11-22
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• 2022

This paper presents the development process for a high-power diode laser for metal surface hardening. To combine the emissions from several laser bars, it is necessary to collimate the emitted light using an optical lens. Thus, to achieve a suitable power density and uniform beam profile, several optical layouts were proposed. To estimate the laser beam for a flat-top distribution, a numerical analysis was performed using the ZEMAX software, and the results were compared with the experimental results. With a focal lens assembled in a serial diode stack source, the design can utilize the advantage of compacting the overall beam size. Experimental results for a robotic system demonstrated the processing ability of this diode laser module in industrial laser hardening.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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• pp.41-45
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.221-222
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• 2007

• Journal of the Optical Society of Korea
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• 제10권1호
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• pp.23-27
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• 2006

We are studying the application of an adaptive optics system to upgrade the beam quality of a laser. The adaptive optics (AO) system consists of a bimorph deformable mirror, a Shack-Hartmann sensor and a control system. In most AO applications, the beam aperture is considered to be circular. However, in some cases such as laser beams from unstable resonators, the beam apertures are annulus or a holed-rectangle. In this paper, we investigate how well a bimorph deformable mirror of ${\Phi}120\;mm$ clear aperture can compensate phase distortions for three different beam configurations; 1) ${\Phi}120\;mm$ circular aperture, 2) ${\Phi}100\;mm$ annulus aperture with a ${\Phi}20\;mm$ hole and 3) $70\;mm{\times}70\;mm$ square aperture with a hole of $30\;mm{\times}30\;mm$. This study concludes that the bimorph mirror, which might be considered as a modal controller, can compensate tilt, defocus, coma and astigmatism, and spherical aberration for all three beams.

• 한국군사과학기술학회지
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• 제14권6호
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• pp.1171-1177
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• 2011

A high power laser beam focused on a small area accelerates a thin material that flies and hits other target material in which a shock wave may be induced. This laser induced shock experimental method is more repeatable and cheaper but worse than other experimental method using gas gun or other apparatus. An optical system including a phase zone plate reduces the interference and also makes the focused-beam-intensity distribution uniform. We wrote a computer code that calculates light ray traces. Using the code we designed and fabricated an optical system including a phase zone plate and improved the laser-beam uniformity. We introduce preliminary experimental results of laser induced shock of the samples such as aluminum and other materials.