Effects of Large Particles and Filter Size in Central Chemical Supplying(CCS) System for STI-CMP on Light Point Defects (LPDs) (STI-CMP용 세리아 슬러리 공급시스템에서 거대입자와 필터 크기가 Light Point Defects (LPDs)에 미치는 영향)
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- Journal of the Semiconductor & Display Technology
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- v.3 no.4
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- pp.45-49
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- 2004