• Title/Summary/Keyword: LCD mask

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차세대 FPD 노광장비용 정렬계 설계

  • 송준엽;김동훈;정연욱;김용래;구형욱
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.223-223
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    • 2004
  • 반도체 및 TFT LCD 제조 공정에서 핵심 공정인 Photo 공정은 PR(Photo Resist, 감광액) Coating -) Exposure(노광) -. Develop(현상)으로 이루어져 있다. 이중 Exposure 공정에 사용되는 장치가 노광장비이다. 노광장비는 Mask Aligner 라고도 불리는데, 그만큼 정렬기술이 노광장비에서는 중요하다. 반도체 및 TFT LCD 는 여러 충의 회로를 쌓아감으로써 층과 층간의 전기적 작용으로 생성되는 Tr.(Transistor) 또는 Diode 등의 수동소자를 집적하는 기술로 제조되는 것으로, 층과 층간의 전기적 작용이 설계한 바와 같이 이루어지기 위해선, 층과 층 사이의 정렬이 정확히 이루어져야 한다.(중략)

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Three-dimensional/two-dimensional convertible integral imaging display system using an active mask (동적 마스크를 이용한 3D/2D 변환 집적영상 디스플레이 시스템)

  • Oh, Yongseok;Shin, Donghak;Lee, Byung-Gook;Jeong, Shin-Il
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.12
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    • pp.3055-3062
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    • 2014
  • 3D integral imaging technique with an active mask is capable of displaying real 3D images with high resolution in space. In this paper, we present a novel 3D/2D convertible integral imaging display system using an active mask. For the proposed method, the principles of 3D, 2D, and 3D/2D composed operations are explained according to the displayed images through two LCD panels. In 3D mode, the elemental images and the mask images are displayed in two display panels. On the other hand, the light source image and 2D image are displayed in 2D mode. In addition, 3D/2D mode is obtained using the spatial separation for 3D and 2D modes. To show the feasibility of the proposed method, we carry out the preliminary experiments and present the optical results.

Segmentation of Defective Regions based on Logical Discernment and Multiple Windows for Inspection of TFT-LCD Panels (TFT-LCD 패널 검사를 위한 지역적 분별에 기반한 결함 영역 분할 알고리즘)

  • Chung, Gun-Hee;Chung, Chang-Do;Yun, Byung-Ju;Lee, Joon-Jae;Park, Kil-Houm
    • Journal of Korea Multimedia Society
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    • v.15 no.2
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    • pp.204-214
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    • 2012
  • This paper proposes an image segmentation for a vision-based automated defect inspection system on surface image of TFT-LCD(Thin Film Transistor Liquid Crystal Display) panels. TFT-LCD images have non-uniform brightness, which is hard to finding defective regions. Although there are several methods or proposed algorithms, it is difficult to divide the defect with high reliability because of non-uniform properties in the image. Kamel and Zhao disclosed a method which based on logical stage algorithm for segmentation of graphics and character. This method is a one of the local segmentation method that has a advantage. It is that characters and graphics are well segmented in an image which has non-uniform property. As TFT-LCD panel image has a same property, so this paper proposes new algorithm to segment regions of defects based on Kamel and Zhao's algorithm. Our algorithm has an advantage that there are a few ghost objects around the defects. We had experiments to prove performance in real TFT-LCD panel images, and comparing with the FFT(Fast Fourier Transform) method which is used a bandpass filter.

New Material Architecture and Its Process Integration for a-Si TFT Array Manufacturing

  • Song, Jean-Ho;Park, Hong-Sick;Kim, Sang-Gab;Cho, Hong-Je;Jeong, Chang-Oh;Kang, Sung-Chul;Kim, Chi-Woo;Chung, Kyu-Ha
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.552-555
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    • 2002
  • In order to achieve higher performance and low cost a-Si TFT-LCD panel, new material architecture and its process integration for a-Si TFT array manufacturing method were developed. Material combination of low resistant dry-etchable metal and new pixel electrode under currently adopted 4 mask process made it possible to get more-simplified manufacturing method and better device performance for the a-Si TFT-LCD application. Proposed 4 mask process architecture with optimized wet etchants and dry etching process was applicable to various devices such as notebook, monitor and TV.

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Research of the TFT-LCD Photosensitive Resist Thickness

  • Zhang, Mi;Xue, Jian She;Wang, Wei;Park, Chun-Bae;Koh, Jai-Wan;Zhang, Zhi-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1269-1271
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    • 2008
  • We find some array mura are caused by S/D bridge or channel open in 4 mask process. The gray tone PR thickness non-uniformity is the main reason of these defects. By the adjustment of exposure and dry etch parameters, S/D bridge and channel open ratio drops by 10.87%.

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투과형 LCD mask를 이용한 실시간 Lithography

  • Pi, Seong-Hun;Jang, Yu-Jin;An, Seung-Eon;Gang, Byeong-Hyeon;Kim, Gang-Hyeon;Park, Byeong-Ho;Kim, Nam-Hui;Yeom, Min-Su;Seong, Man-Yeong;Kim, Gyu-Tae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2003.08a
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    • pp.183-183
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    • 2003
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Development of High Aperture Ratio 2.1” QVGA LTPS (Low Temperature Poly Si) LCD Using SLS (Sequential Lateral Solidification) Technology

  • Kang, Myung-Koo;Lee, Joong-Sun;Park, Jong-Hwa;Zhang, Lintao;Joo, Seung-Yong;Kim, Chul-Ho;Kim, Il-Kon;Kim, Sung-Ho;Park, Kyung-Soon;Yoo, Chun-Ki;Kim, Chi-Woo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1033-1034
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    • 2005
  • High resolution 2.1” QVGA LTPS LCD (190ppi) having high aperture ratio of 65% could be successfully developed using state-of-the-art SLS technology and active/gate storage structure. Cost effective P-MOS 6-Mask structure was used. Full gate and transmission gate circuits are integrated in the panel. The high aperture ratio was obtained by using active/gate capacitance structure, which can reduce storage capacitance area. The aperture ratio was increased to 65% from 49% of conventional gate/data capacitance structure. The brightness was increased from 180cd to 270cd without any degradation of optical properties such as contrast ratio, flicker or crosstalk.

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High efficient Transflective TFT-LCD by tRGB-rW Sub-Pixel Rendering

  • Lin, L.;Liang, B.J.;Huang, C.M.;Lin, H.C.;Chen, Y.N.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.1613-1617
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    • 2006
  • The total light efficiencies of the novel 1.9" transflective tRGB-t/rW and tRGB-rW TFT LCDs are calculated and they are implemented by the traditional 7-mask ${\alpha}$-Si processing. Then, the two vehicles are turned on with the appropriate Sub-Pixel Rendering White (SPRW) algorithms, so they can exhibit the extra luminance without the original visual resolution loss. Their outstanding optical properties are approved by measuring the contrast ratio (C.R.) and the NTSC ratio. Because they utilize the light resource very effectively and efficiently, they are very suitable for the dark indoor and the bright outdoor environments.

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Symmetric-viewing liquid crystal display with alternating alignment layers in an inverse-twisted-nematic configuration

  • Na, Jun-Hee;Li, Hongmei;Park, Seung-Chul;Lee, Sin-Doo
    • Journal of Information Display
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    • v.12 no.4
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    • pp.191-194
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    • 2011
  • A symmetric-viewing inverse-twisted-nematic (ITN) liquid crystal display (LCD) with alternating alignment layers was developed using a stamping-assisted rubbing (SAR) technique. A patterned layer of a fluorinated acrylate polymer was transferred onto the first rubbed vertical-alignment layer prepared on a substrate by stamping. The fluorinated acrylate polymer provided a protective layer covering the first rubbed alignment layer during the second rubbing process, which promoted the vertical alignment of the LC molecules. The LC cell in the ITN geometry with two orthogonally rubbed alignment layers showed symmetric-viewing characteristics with fourfold symmetry. The SAR technique was shown to be a mask-free alignment method of producing multidomains for symmetric-viewing LCDs.

A Study on the Optical Correlation Characteristics for the fSDF/POF, BPOF Spatial Matched Filters (fSDF/POF, BPOF 공간 정합 필터의 광 상관 특성에 관한 연구)

  • Seok Hee Jeon
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.7
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    • pp.48-55
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    • 1992
  • In this paper, fSDF/POF, BPOF spatial matched filters are designed and implemented by CGH. The correlation characteristics for the suggested filters are analyzed for the distorted input images. Input patterns are obtained from the out-of-plane aircraft images by gradually rotating it, and then used for SDF training images. Modified version of LCD is used for a real-time input device of an optical correlator, and CGH-based fSDF filters are fabricated on film mask for spatial matched filter in order to recognize the distorted images. Total optical corrlator system size is effectively reduced to 148.8 cm by using lens combinations. Computer simulations and experimental results show that the suggested phase filters have nearly uniform correlation characteristics and have good classification capabilities between two classes.

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