• Journal of Advanced Marine Engineering and Technology
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• 제20권5호
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• pp.93-102
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• 1996

Laser-induced plume and laser-target interaction during pulsed laser deposition are demonstrated for a lead zirconate titanate (PZT). A KrF excimer laser (wavelength 248nm) was used and the laser was pulsed at 20Hz, with nominal pulse width of 20ns. The laser fluence was~$16J/cm^2,$ with 100mJ per pulse. The laser-induced plasma plume for nanosecond laser irradiation on PZT target has been investigated by optical emission spectra using an optical multichannel analyzer(OMA) and by direct observation of the plume using an ICCD high speed photography. OMA analysis showed two distinct ionic species with different expansion velocities of fast or slow according to their ionization states. The ion velocity of the front surface of the developing plume was about $10^7$cm/sec and corresponding kinetic energy was about 100eV. ICCD photograph showed another kind of even slower moving particles ejected from the target. These particles considered expelled molten parts of the target. SEM morphologies of the laser irradiated targets showed drastic melting and material removal by the laser pulse, and also showed the evidence of the molten particle ejection. The physics of the plasma(plume) formation and particle ejection has been discussed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.562-565
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• 2001

In this paper, novel device structures in order to realize ultra fast and ultra small silicon devices are investigated using ultra-high vacuum chemical vapor deposition(UHVCVD) and Excimer Laser Annealing (ELA). Based on these fundamental technologies for the deep sub-micron device, high speed and low power devices can be fabricated. These junction formation technologies based on damage-free process for replacing of low energy ion implantation involve solid phase diffusion and vapor phase diffusion. As a result, ultra shallow junction depths by ELA are analyzed to 10~20nm for arsenic dosage(2${\times}$10$\_$14//$\textrm{cm}^2$), exciter laser source(λ=248nm) is KrF, and sheet resistances are measured to 1k$\Omega$/$\square$ at junction depth of 15nm and realized sub-50nm n-MOSFET.

• 한국음향학회:학술대회논문집
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• 한국음향학회 1993년도 학술논문발표회 논문집 제12권 1호
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• pp.29-33
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• 1993

펄스레이저를 고체표면에 조사하면 광-음향효과에 의해 입사지점에서 음향파원이 형성되고 음향파원의 형태와 재료의 특성에 따라 여러 유형의 종파, 횡파 및 표면파의 음향에너지가 발생된다. 본 연구에서는 열탄성영역과 플라스마영역에서 종파와 횡파의 변위파형을 해석하여 모의실험을 수행하였다. 실험에서는 KrF엑시머레이저를 탄소강, 알루미늄, 황동에 조사하여 플라스마영역에서의 광-음향신호를 검출하였으며 이론과 비교하여 분석하였다.

• 한국광학회지
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• 제7권3호
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• pp.232-237
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• 1996

대기오염 원격측정용 LIDAR의 레이저광으로 사용하기 위해 반복율 500Hz급 엑시머 에리저를 개발하고 이의 고반복 에이저 출력특성, 레이저 가스의 유로구조와 CR특성을 조사하였다. 레이저 장치는 유선형의 가스유로, 주전극 직렬 UV 예비전리방식 등의 방법을 사용하고 컴팩트한 구조로 제작하여 가스 실용적을 10 liter 이하로 소형화하였다. KrF 레이저를 500Hz로 동작할 때의 최대출력은 53watt, 출력변동율은 .+-.6.7%, CR은 2.3, 방전체적은 2.0(H)*1.2(W)*56(L)=134$cm^{3}$ 이다. 이때 초기 출력에너지의 50%까지 출력이 감소할 때의 레이저가스의 수명은 3*$10^{6}$ shots이다.

• 한국레이저가공학회지
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• 제6권1호
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• pp.33-40
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• 2003

The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.20-20
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• 2010

The effect of excimer laser annealing on the structural and dielectric behaviors of $PbZr_{0.52}Ti_{0.48}O_3$ (PZT) thin films has been investigated. The amorphous PZT thin films were prepared on Pt/Ti/$SiO_2$/Si substrates by a sol-gel method. The PZT precursor was prepared from lead acetate, zirconium acetylacetonate, and titanium isopropoxide. The starting materials were dissolved in n-propanol and 1,3-propanediol. After, the amorphous PZT thin films were laser-annealed (using KrF excimer laser) as a function of the laser energy density and the number of laser pulse. Structural properties of PZT thin films are characterized by using X-ray diffraction (XRD) and scanning electron microscopy (SEM). The dielectric characterization was done on a RT66A test system and a Agilent 4294A impedance analyzer. The PZT thin films show that excimer laser irradiation drastically improved the crystallization and dielectric properties of the PZT thin films, depending on the energy density and the pulse number.

• 한국기계가공학회지
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• 제11권5호
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• pp.99-103
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• 2012

Presently, A glass is widely used in telecommunication system, optoelectronic devices and micro electro mechanical systems. Micro drilling of glass using the laser can save processing cost and improve the accuracy. This paper experiments micro drilling using KrF excimer laser on the pyrex glass of $500{\mu}m$ thickness. We have experiment to find out optimum laser machining conditions of micro drilling of glass and ablation depth and influence by processing parameter suc'h pulse repetition rate, energy density and number of pulses. Pulse repetition rate don't influence ablation depth at the micro drilling of pyrex glass. Energy density influence micro drilling of parallelism and maximum thickness that can be drilled. Ablation depth is most influenced by number of pulses.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.366-370
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• 1997

This paper descibes a micro groove machining process on the polyurethane biopolymer by KrF excimer laser. To investigate the etch charcteristics of polyurethane biopolymer quantitatively,laser system for ablation was installed with high precison moter and then polymer ablation experiment, in which paramteters were fluence,pulse repetition rate,numbers of pulses and assist gas, was carred out. In this experiment, we found out that the value of critical energy density for ablation is 30mJ/cmsup2/ and the etching rate is more dependent on the pulse number and fluence than any other pamameter. Finally, we machined micro grooves for fiexibility as width 300.mu.m depth 100.mu.m and port for micro-devices mounting as length 100.mu.m width 300.mu.m depth .mu.m on the outer wallof polyurethane biopolymer tube which is used as medical device.

• 한국세라믹학회지
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• 제39권12호
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• pp.1158-1163
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• 2002

2차 비선형 광특성을 유도하기 위한 UV 폴링용 Ge와 B가 첨가된 광민감성 광섬유를 제조하였다. 248 nm KrF 엑시머 레이저 조사에 의하여 수소처리 없이 장주기 격자를 형성할 수 있었다. 116 mJ/$cm^2$의 펄스 에너지와 10 Hz의 조사 빈도로 1분간 광민감성 광섬유에 레이저를 조사할 경우 -4 dB의 큰 band rejection 특성을 얻을 수 있었다. 제조된 광섬유의 광민감성은 장주기 격자쌍 방법을 이용하여 측정하였으며, 8.67 kJ/$cm^2$의 fluence로 KrF 엑시머 레이저를 조사할 경우 3.3${\times}10^{-3}$의 큰 코어 굴절률 변화를 얻었다. 또한 UV 폴링 시에 광섬유 코어에 고전압을 쉽게 인가할 수 있는 H자 형상의 광섬유를 인출조건의 최적호를 통하여 제조하였다.

• 대한기계학회논문집B
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• 제24권12호
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• pp.1582-1582
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• 2000

Rayleigh scattering and laser induced predissociative fluorescence are employed for capturing two-dimensional images of temperature and species concentration in a laminar nonpremixed flame of a diluted hydrogen jet. Rayleigh scattering cross-sections are experimentally obtained at 248nm. Dispersed LIPF spectra of OH and O₂ are also measured in a flame in order to confirm the excitation of single vibronic state of OH and O₂are excited on the P₁(8) line of the A ²∑+ (v＇=3) - X ²∏(v˝=0) band and R(17) line of the Schumann-Runge band B ³∑u- (v＇=0) - X ³∑g-∏(v˝=6), respectively. Fluorescence spectra of OH and Hot O₂ are captured and two-dimensional images of the hydrogen flame field are successfully visualized.