• Proceedings of the Korean Institute of Landscape Architecture Conference
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• 2023.10a
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• pp.36-38
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• 2023

• Journal of the Korean Vacuum Society
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• v.3 no.1
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• pp.117-121
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• 1994

SrTiO3(100) 단결정을 3keV 아르곤이온으로 에칭하면 표면원소의 산화 상태가 환원되고 표면의 거칠기가 증가하는 것이 XPS와 SEM으로 측정되었다. 그러나 3keV의 산소이온으로 에칭하면 표면원소 의 화학적 상태도 변하지 않고 표면도 평탄한 상태로 계속 유지된다. 산소 이온에 의하여 에칭된 SrTiO3 기판상에 off-axis rf 스퍼트링 방법으로 성장된 YBa2Cu3Ox 박막이 아르곤 이온에 의하여 에칭 된 SrTiO3 기판상에 성장된 YBa2Cu3Ox 박막보다 높은 Tc,zero and Jc를 보여주었다. 이논문은 YBCO초전 도 박막의 성장과 전자공학적 활용을 위한 리토그라피 공정에서 이온밀링 공정의 조건은 매우 주의하여 선택되어야 함을 보여준다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.2
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• pp.126-129
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• 2006

We investigated an optimized condition of the capacitor threshold voltage implantation(capacitor $V_T$ Implant) in planar P-MOS DRAM Cell. Several samples with different condition of the capacitor $V_T$ Implant were prepared. It appeared that for the capacitor $V_T$ Implant of $BF_2\;2.0{\times}l0^{13}\;cm^{-2}$ 15 KeV, refresh time is three times larger than that of the sample, in which capacitor $V_T$ Implant is in $BF_2\;1.0{\times}l0^{13}\;cm^{-2}$ 15 KeV. Raphael simulation revealed that the lowed maximum electric field and lowed minimum depletion capacitance ($C_{MIN}$) under the capacitor resulted in well refresh characteristics.

• Nuclear Engineering and Technology
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• v.7 no.3
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• pp.223-226
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• 1975

The relative detection efficiency of ${\gamma}$-ray full-energy Peaks was obtained by a pair-point method using the $^{56}$ Co source whose ${\gamma}$-ray relative emission rates were well measured. Three Ge(Li) detectors with active volumes of 43.8cc, 32.6cc, and 6cc were calibrated over the ${\gamma}$-ray energy energy range 800-5, 500keV.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.1
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• pp.8-11
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• 2002

Ni, Si and $SiO_2$ films were implanted by 350 keV B $i_{+}$ ions at room temperature with fluences of 1$\times$10$^{16}$ and 2$\times$10$^{16}$ ions/c $m^2$ The depth distributions of implanted B $i^{+}$ ions in Ni, Si and $SiO_2$ films were by investigated by Rutherford backscattering. The results show that the depth distributions of implanted B $i^{+}$ ions into Ni, Si and $SiO_2$ films have obeyed nearly Gaussian distributions. The maximum difference between experimental and calculated values is less than 18 % for mean projected range. Experimental range straggling deviated significantly from calculated value. The possible reasons are discussed.sed.d.

• Journal of the Korean Vacuum Society
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• v.4 no.2
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• pp.183-188
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• 1995

고에너지(50-200KeV)로 가속된 이온을 모재표면에 물리적으로 투입하므로써 표면의 조성 및 조직을 변화시키는 공정인 이온주입기술을 이용하여 경량고강도소재로 각광받고 있는 AI2218 합금의 재식성 향상을 연구하였다. 질소이온주입은 DuoPIGatron 이온원을 사용하여 가속전압 100KeV, 조사량 $1{\times}10^{17}ions/\textrm{cm}^2$~$5{\times}10^{17}ions/\textrm{cm}^2$의 조건으로 행하였으며 AI합금의 열화를 방지하기 위하여 시편온도를 $60^{\circ}C$이하로 유지하였다. 질소이온 주입재의 재식성 평가를 위하여 3.5% NaCI 용액에서 양극분극시험 및 5% NaCI 용액에서 염수분무시험을 행하였다. Auger Electron Spectroscopy와 Transmission Electron Microscopy을 이용하여 표면의 질화물형성 여부를 조사하였으며, Scanning Electron Microscopy을 이용하여 부식된 표면을 관찰하였다. AI2218합금에 질소이온을 주입한 결과 표면에 미세한 AIN 석출물을 형성하였으며 이러한 질화물형성에 의해 공식(pitting)발생을 억제하고 부식전류밀도를 감소시켜 내식성이 향상되었다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.2
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• pp.9-9
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• 2001

Nano-scale의 게이트 길이를 가지는 MOSFET소자는 접합 깊이가 20∼30㎚정도로 매우 얕은 소스/드레인 확장 영역을 필요로 한다. 본 연구에서는 $As₂^ +$ 이온의 10keV이하의 낮은 에너지 이온 주입과 RTA(rapid thermal annealing)공정을 적용하여 20㎚이하의 얕은 접합 깊이와 1.O㏀/□ 이하의 낮은 면저항 값을 가지는 $n ^+$-p접합을 구현 하였다. 이렇게 형성된 $n^ +$-p 접합을 nano-scale MOSFET소자 제작에 적용 시켜서 70㎚의 게이트 길이를 가지는 NMOSFET을 제작하였다. 소스/드레인 확장 영역을 $As₂^ +$ 5keV의 이온 주입으로 형성한 100㎚의 게이트 길이를 가지는 NMOSFET의 경우, 60mV의 낮은 $V_ T$(문턱 전압감소) 와 87.2㎷의 DIBL (drain induced barrier lowering) 특성을 확인하였다. $10^20$$㎝^ -3$이상의 도핑 농도를 가진 abrupt한 20㎚급의 얕은 접합, 그리고 이러한 접합이 적용된 NMOSFET소자의 전기적 특성들은 As₂/sup +/의 낮은 에너지의 이온 주입 기술이 nano-scale NMOSFET소자 제작에 적용될 수 있다는 것을 제시한다.

• Publications of The Korean Astronomical Society
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• v.15 no.spc1
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• pp.73-83
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• 2000

X-ray astronomy deals with measurements of the electromagnetic radiation in the energy range of $E\~0.1-100 keV (\lambda\~0.12-120{\AA})$. The wavelength of X-ray is comparable to the size of atoms, so that the photons in the X-ray range are usually produced and absorbed by the atomic processes. Since the launch of the first X-ray astronomy satellite 'Uhuru' in 1970, technological advances in a launch capability and a detection capability make X-ray astronomy one of the most rapidly evolving fields of astronomical research. Particularly, a spectral resolving power $E/{\Delta}E$ has been increased by an order of 2 - 3 (in the energy range of 0.1 - 10 keV) during the past 30years. In this paper, I briefly review a developing process of the resolving power and spectroscopic techniques. Then I describe important emission/absorption lines in X-ray astronomy, as well as diagnostics of gas property with line parameters.

• Journal of Radiation Protection and Research
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• v.26 no.3
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• pp.177-181
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• 2001

The conversion efficiency of a cesium iodine coated micro-channel plate is studied. We use the EGS4 code to transport photons and generated electrons until their energies become less than 1keV and 10keV respectively. Among the generated electrons, the emission from the secondary electrons located within the escape depth of 56nm from the photo-converter boundary is estimated by integrating the product of the secondary electrons with a probability depending only on their geometric locations. The secondary electron emission from the generated electrons of energy higher than 100eV is estimated by the 'universal yield curve'. The sum of these provides an estimate for the secondary electron yield and we show that results of applying this algorithm agree with known experimental results. Using this algorithm, we computed secondary electron emissions from a micro-channel plate used in a gas electron multiplier detector that is currently being developed at Korea Atomic Energy Research Institute.

• Journal of the Korean Society of Radiology
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• v.4 no.3
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• pp.27-31
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• 2010

Spatial resolution is determined by the performance of x-ray optics used in the x-ray imaging system. A zone plate was designed for obtaining a high spatial resolution image at x-ray energy of 8.5keV. A spatial resolution of 80 nm was estimated by the ray tracing when an x-ray tube of tungsten targe was used instead of synchrotron radiation. The designed zone plate of outermost zone width of 40nm was successfully fabricated by the electron-beam lithography.