• 제목/요약/키워드: KOVAR

검색결과 17건 처리시간 0.027초

가습된 $N_2$/H$_2$혼합가스 분위기에서의 Kovar 산화 거동 (The Oxidation of Kovar in Humidified $N_2$/H$_2$ Atmosphere)

  • 김병수;김민호;김상우;최덕균;손용배
    • 마이크로전자및패키징학회지
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    • 제8권2호
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    • pp.1-7
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    • 2001
  • 저열팽창성 금속인 Kovar표면을 유리와 접합하기에 적합한 spinel을 주상으로 하는 균일한 산화막을 형성할 수 있도록 $N_2/H_2$$H_2O$가 첨가된 분위기에서의 산화 거동에 대하여 조사하였다. Kovar 산화는 확산에 의해 지배되는 공정이며, 이때 산화 활성화 에너지는 31.61 kacl/mol 이었다. $600^{\circ}C$에서 열처리한 결과 spinel을 주상으로 하는 0.5 $mu extrm{m}$ 이하의 연속적이고 균일한 외부 산화막을 얻을 수 있었다. TEM 분석 결과 격자 상수가 7.9 $\AA$인 spinel 임을 확인할 수 있었다. 그러므로, 가습된 $N_2/H_2$분위기에서 산화한 Kovar는 유리와 접합에 적용 가능할 것으로 판단된다.

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The Effect of Kovar(Fe-29Ni-l7Co) Oxidation Atmosphere on the Kovar-to-Glass Seal

  • Kim, Buoung-Soo;Kim, Min-Ho;Park, Duck-Kyun;Son, Yong-Bei
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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    • pp.111-111
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    • 2000
  • In order to form a uniform oxidation layer and spinel crystalline phase that has been help strong bonding in Kovar(Fe-29Ni-17Co)-to-glass sealing, the humidified nitrogen and nirtogen/hydrogen mixture was used as an oxidation atmosphere. Kovar oxidation was diffusion-controlled reaction and the activation energy was 25~32 kcal/mol at $600~900^{\circ}C.$ After oxidation at $600^{\circ}C, $ the oxidation layer was under 1 $\mu\textrm{m}$ thickness and crystalline phase was spinel which was found to be suitable for the Kovar-to-glass sealing. The Kovar-to-glass seal was carried out at $1010^{\circ}C$ and humidified nitrogen/hydrogen mixture atmosphere. Sealing properties were tested by Leak tester and SEM.

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가습된 질소 분위기에서의 Kovar(Fe-29Ni-17Co)산화 (The Oxidation of Kovar(Fe-29Ni-17Co) in Humidified nitrogen)

  • 김병수;김민호;김상우;최덕균;손용배
    • 한국세라믹학회지
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    • 제36권11호
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    • pp.1228-1234
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    • 1999
  • In order to form a uniform oxidation layer and spinel crystalline phase that was supposed to help strong bonding in Kovar(Fe-29Ni-17Co)to-glass sealing the humidified nitrogen (2.3%H2O/N2) was used as an oxidation atmosphere. Kovar oxidation was diffusion-contolled and the activation energy was 2.51 kcal/mol at 600-900$^{\circ}C$ After oxidation at 600$^{\circ}C$ the oxidation layer was under 1$\mu\textrm{m}$ thickness and crystalline phase was spinel which was found to be suitable for the Kovar-to-glass sealing.

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LTCC/Kovar 간의 Brazing 특성 연구 (Study on the Brazing Characteristics of LTCC/Kovar)

  • 이우성;조현민;임욱;유찬세;이영신;강남기
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2000년도 추계 기술심포지움 논문집
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    • pp.57-57
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    • 2000
  • 본 논문에서는 MCM 및 패키지의 Lid로 사용되는 합금인 Kovar (Fe-Ni-Co alloy) 와 LTCC (Low Temperature Co-fired Ceramics) 간의 Brazing 특성을 연구하였다. 기존에 사용되고 있는 알루미나 패키지의 경우, 주로 80$0^{\circ}C$ 이상의 온도에서 Brazing을 실시하고 있으며, 조성은 Ag-Cu 계열을 사용하고 있다. 하지만, LTCC 의 경우, 소결온도가 85$0^{\circ}C$ 내외로서 기존의 방법을 그대로 적용하기는 어려움이 있다. 또한 Brazing 특성에 따른 접착 강도는 Brazing Alloy 의 영향뿐만 아니라 LTCC 와 전도체 전극사이의 Metallization 에 크게 영향을 받는다. 따라서, 본 논문에서는 Brazing Alloy의 종류 (Ag-Cu, Au-Sn) 및 Brazing 조건에 따른 Brazing 특성뿐만 아니라, 전도체 전극내 유리질 함량에 따른 Brazing 특성을 평가하여 LTCC/Kovar 간의 최적의 Brazing 조건을 구현하고자 하였다.

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코바강의 탄소첨가량에 따른 강도에 미치는 영향 (The Effect on the Strength According to Carbon Content of Kovar Steel)

  • 최병희;최병기
    • 한국안전학회지
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    • 제25권3호
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    • pp.28-33
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    • 2010
  • Ni alloy steel is able to use during long time because of good acid and corrosion resistance. So, it's research has focused on developing the alternative alloy which is economically feasible. Recently, consumption of Kovar steel is gradually increased in field of the jet engine and the gas turbine because of its low thermal expansive characteristics. The specimens of Kovar steel(29%Ni-17%Co) contain 0.00%C, 0.03%C, 0.06%C, 0.10%C and 0.20%C, respectively. Ingots are manufactured by VIM(vacuum induction melting furnace) and then specimens are made by automatic hot rolling after heat treatment. Strength of Kovar steel according to carbon contents is estimated by hardness, tensile and impact test. Hardness of the 0.20%C specimen is more improved approximately 14.4% than one of base metal. Its strength increases 32.4% of a base metal, and its impact energy is also enhance 11.5%.

적층형 셀과 아연도금층을 이용한 고온고압 합성다이아몬드의 압력변화에 따른 물성 연구 (Property of the HPHT Diamonds Using Stack Cell and Zn Coating with Pressure)

  • 신운;송오성
    • 한국세라믹학회지
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    • 제49권2호
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    • pp.167-172
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    • 2012
  • Fine diamond powders are synthesized with a 420 ${\phi}$ cubic press and stack-cell composed of Kovar ($Fe_{54}Ni_{29}Co_{17}$) (or Kovar+7 ${\mu}m$-thick Zn electroplated) alloy and graphite disks. The high pressure high temperature (HPHT) process condition was executed at $1500^{\circ}C$ for 280 seconds by varying the nominal pressure of 5.7~10.6 GPa. The density of formation, size, shape, and phase of diamonds are determined by optical microscopy, field emission scanning electron microscopy, thermal gravimetric analysis-differential thermal ammnlysis (TGA-DTA), X-ray diffraction (XRD), and micro-Raman spectroscopy. Through the microscopy analyses, we found that 1.5 ${\mu}m$ super-fine tetrahedral diamonds were synthesized for Zn coated Kovar cell with whole range of pressure while ~3 ${\mu}m$ super-fine diamond for conventional Kovar cell with < 10.6 GPa. Based on $750^{\circ}C$ exothermic reaction of diamonds in TGA-DTA, and characteristic peaks of the diamonds in XRD and micro-Raman analysis, we could confirm that the diamonds were successfully formed with the whole pressure range in this research. Finally, we propose a new process for super-fine diamonds by lowering the pressure condition and employing Zn electroplated Kovar disks.

저열팽창성 Fe-29%Ni-17%Co 코바 합금의 고온 변형 거동에 미치는 B 첨가의 영향 (The Effect of B addition on the High Temperature Behavior of Low Thermal Expansion Fe-29%Ni-17%Co Kovar Alloy)

  • 권성희;박종혁;김문철;이기안
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2008년도 춘계학술대회 논문집
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    • pp.491-492
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    • 2008
  • The effect of B on the hot ductility of Fe-29Ni-17Co Kovar alloy and the mechanism of high temperature deformation behavior were investigated. Hot-tensile test was carried out at the temperature range of $900^{\circ}C-1200^{\circ}C$. Optical microscopy and scanning electron microscopy were used to investigate the microstructure and fracture during hot deformation. The hot ductility of Kovar alloy was drastically increased with the addition of Boron. The improvement of hot ductility results from the grain boundary migration mainly due to the dynamic recrystallization at lower temperature range($900^{\circ}C$).

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Fe-Ni-Co 코바 합금의 고온변형거동에 미치는 합금원소(Mn, Mo, B) 첨가의 영향 (Effect of Alloying Elements(Mn, Mo, B) on the High Temperature Deformation Behavior of Low Thermal Expansion Fe-Ni-Co Alloy)

  • 이기안;윤애천;박중철;남궁정;김문철
    • 소성∙가공
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    • 제17권4호
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    • pp.240-248
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    • 2008
  • The effect of alloying elements(Mn, S, Mo, B) on the high temperature deformation behavior of Fe-29%Ni-17%Co (Kovar) alloy were investigated. And the effect of high temperature oxidation on the hot ductility was also studied. The hot ductility of Kovar alloy was drastically increased with the addition of Mn and lowering of S content. It has been found that the brittle intergranular fracture at high temperature cracking is closely associated with the FeS sulfide along the grain boundary. When Mn was added, the type of sulfide was changed to MnS from FeS and ductile intergranular fracture and transgranular fracture were promoted. The formation of oxide layer was found to have minimized the hot ductility of the Kovar alloy significantly. Grain boundary micro-cracks in the internal oxide region were noted following deformation due to high temperature, one of which acting as a notch that caused the poor hot workability of the oxidized specimen. The addition of Mo to the Kovar alloy could also retard the decrease in the hot ductility of the oxidized specimen through the prevention of notching due to internal oxidation. Hot ductility was remarkably improved by the addition of Boron. The improvement of hot ductility results from the grain boundary migration mainly due to the dynamic recrystallization at lower temperature range ($900{\sim}1000^{\circ}C$).