The Effect of Kovar(Fe-29Ni-l7Co) Oxidation Atmosphere on the Kovar-to-Glass Seal

In order to form a uniform oxidation layer and spinel crystalline phase that has been help strong bonding in Kovar(Fe-29Ni-17Co)-to-glass sealing, the humidified nitrogen and nirtogen/hydrogen mixture was used as an oxidation atmosphere. Kovar oxidation was diffusion-controlled reaction and the activation energy was 25~32 kcal/mol at $600~900^{\circ}C.$ After oxidation at $600^{\circ}C, $ the oxidation layer was under 1 $\mu\textrm{m}$ thickness and crystalline phase was spinel which was found to be suitable for the Kovar-to-glass sealing. The Kovar-to-glass seal was carried out at $1010^{\circ}C$ and humidified nitrogen/hydrogen mixture atmosphere. Sealing properties were tested by Leak tester and SEM.