• Journal of Surface Science and Engineering
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• v.43 no.3
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• pp.159-164
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• 2010

Surface roughness of deposited or etched film strongly depends on ion bombardment. Relationships between ion bombardment variables and surface roughness are too complicated to model analytically. To overcome this, an empirical neural network model was constructed and applied to a deposition process of silicon nitride (SiN) films. The films were deposited by using a pulsed plasma enhanced chemical vapor deposition system in $SiH_4$-$NH_4$ plasma. Radio frequency source power and duty ratio were varied in the range of 200-800 W and 40-100%. A total of 20 experiments were conducted. A non-invasive ion energy analyzer was used to collect ion energy distribution. The diagnostic variables examined include high (or) low ion energy and high (or low) ion energy flux. Mean surface roughness was measured by using atomic force microscopy. A neural network model relating the diagnostic variables to the surface roughness was constructed and its prediction performance was optimized by using a genetic algorithm. The optimized model yielded an improved performance of about 58% over statistical regression model. The model revealed very interesting features useful for optimization of surface roughness. This includes a reduction in surface roughness either by an increase in ion energy flux at lower ion energy or by an increase in higher ion energy at lower ion energy flux.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.317-317
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• 2011

Enhanced ICRF (Ion Cyclotron Range of Frequency) ion heating of H-mode D(H) plasma will be tried in 2011 KSTAR experimental campaign. Minority heating is a main ion heating scheme in the ICRF. Its efficiency increases as the hydrogen minority ratio increases in deuterium plasmas. And it should be sustained at a lower level than the critical minority ratio. Consequently, it is important to elevate the critical ratio to maximize ion heating and it is possible by increasing the ion temperature or parallel wave number (k${\parallel}$) of the antenna. Increasing the k${\parallel}$ is not a good approach since the coupling efficiency decreases exponentially with regard to k${\parallel}$ as well. So the remaining method is to increase ion temperature by using NB (Neutral Beam). Ion heating fraction of NB increases as the electron temperature increases. Therefore, we will try to heat electron by using ECH together with NB ion heating before ICRF power injection. The ICRF heating efficiency will be compared with respect to several NB+ECH+ICRF heating combinations through several diagnostics such as XICS (Xray Imaging Crystal Spectroscopy), CES (Charge Exchange Spectroscopy) and neutron measurement. The theoretical background and the experimental results will be presented in more detail in the conference.

• Transactions on Electrical and Electronic Materials
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• v.9 no.5
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• pp.202-205
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• 2008

We have studied the liquid crystal (LC) orientation behavior on the organic hybrid overcoat layer with ion beam irradiation. Excellent LC alignments of the nematic liquid crystal (NLC) on the ion beam irradiated organic hybrid overcoat layers were observed in various intensities above 600 eV. Pretilt angles of the NLC on the organic hybrid overcoat layers for all ion beam energy intensities were observed from 0.2 to 0.5 degrees. Also, we used the atomic force microscopy (AFM) images for measuring the roughness of the organic hybrid overcoat layers with ion beam irradiation before and after. The surface of organic hybrid overcoat layers was leveled off by the ion beam irradiation. Finally, a good LC alignment thermal stability on the organic hybrid overcoat layer with ion beam irradiation can be achieved.

• Proceedings of the Korean Vacuum Society Conference
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• 1994.02a
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• pp.10-10
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• 1994

• Journal of environmental and Sanitary engineering
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• v.14 no.1
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• pp.42-53
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• 1999

A study on the synthesis of zeolite from coal fly ash from power plant was carried out to reduce environmental problems and reuse industrial waste. The synthesized zeolite was proved to be Zeolite 4A type by means of the XRD and SEM analysis, and then the synthesized zeolite was used as an absorbent to remove the $NH_4^+$ ions in the wastewater and water. In the ion exchange of single $NH_4^+$ ions by the natural zeolite and the synthesized zeolite, the ion exchange reached equilibrium within 10 min. and 1hr, respectively. The amount of ion exchanged $NH_4^+$ to the unit weight of natural zeolite and zeolite 4A were 1.09 and 3.54 meq/g respectively, and the amount of $NH_4$ ion exchanged by the synthesized zeolite was higher than by the natural zeolite. The ion exchange kinetics fitted very well to the Feundlich and Langmuir isotherm. The effects of coexisting cations on the ion-exchange properties of zeolites were studied in order to apply them to water treatment. In the bisolute-system of the $NH_4^+-K^+$ and $NH_4^+-Na^+$ systems, the ion exchange capacity was smaller than the single $NH_4^+$ ion system. The effects of coexisting cations on the ion exchange system by the natural zeolite and the synthesized zeolite were found to be $K^+>Na^+$ and $Na^+>K^+>>Mg^{2+}>Ca^{2+}$, respectively.

• Journal of Environmental Science International
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• v.24 no.1
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• pp.47-53
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• 2015

Removal characteristics of Cu(II) ions by solid-phase extractant immobilized D2EHPA and TBP in PVC were investigated. Cu(II) ion concentrations in the solution and removal capacity of Cu(II) ion according to operation time were compared. The lower the initial concentration of Cu(II) ion in aqueous solution was, the removal capacity of Cu(II) ion by solid-phase extractant was increased relatively. The bigger the initial concentration of Cu(II) ion was, the removal capacity of Cu(II) ion was increased relatively. The pseudo-second-order kinetics according to operation time was showed more satisfying results than the pseudo-first-order kinetics for the removal velocity of Cu(II) ion. The removal capacity of Cu(II) ion was 0.025 mg/g in aqueous solution of pH 2, but the removal capacity of Cu(II) ion was increased to 0.33 mg/g mg/g in aqueous solution of pH 4 according to increasing pH.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• v.4 no.3
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• pp.185-193
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• 2000

A water treatment agent with antimicrobial activity(Ag-Os) was created by exchanging silver ion($Ag^{+}$) on calcined oyster shell powder. The desorption of the exchanged silver ion was negligible, thereby indicating a stable antimicrobial water treatment agent. The sterilization effect of Ag-Os on underwater microorganisms was then investigated. An MIC (Minimum Inhibitory Concentration) test result indicated that Ag-Os had an excellent sterilization effect on G-germs, such as Escherichia coli and Pseudomonas aeruginosa. Most germs were annihilated with an Ag-Os concentration of 200 ppm and contact time of 60 minutes. The sterilization effect was mainly dependent on the contact time. The zeta potential of the Ag-Os powder adsorbed on sand was measured relative to the concentration of exchanged silver ion. As the concentration of the exchanged silver ion increased, the surface charge density of the anions on the surface of the Ag-Os powder adsorbed on sand also increased. Accordingly, this result indicated that a higher silver ion than ion exchange capacity was present on the particle surface due to adsorption. Consequently, this increased concentration of exchanged silver ion would appear to significantly enhance the sterilization power.

• Applied Science and Convergence Technology
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• v.25 no.6
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• pp.108-115
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• 2016

Even if ion pumps are widely and mostly used in ultra-high vacuum (UHV) conditions, virtually every existing ion pump has its maximum pumping speed around 1E-6 mbar (1E-4 Pa). Discharge intensity in the ion pump Penning cell is defined as the current divided by pressure (I/P). This quantity reflects the rate of cathode bombardment by ions, which underlies all of the various pumping mechanisms that occur in ion pumps (chemisorption on sputtered material, ion burial, etc.), and therefore is an indication of pumping speed. A study has been performed to evaluate the influence of magnetic fields and cell dimensions on the ion pump discharge intensity and consequently on the pumping speed at different pressures. As a result, a combination of parameters has been developed in order to design and build an ion pump with the pumping speed peak shifted towards lower pressures. Experimental results with several different test set-ups are presented and a prototype of a new 200 l/s ion pump with the maximum pumping speed in the 1E-8 mbar (1E-6 Pa) is described. A model of the system has also been developed to provide a framework for understanding the experimental observations.

• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.474-477
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• 1996

The solid state cesium ion beam sputter deposition system has been developed for negative carbon ion beam deposition. The negative carbon ion beams are effectively produced by cesium ion bombardment. The C-ion beam current and deposition energy can be independently controlled for the deposition of a-D films. This system is very compact, reliable and high flux without any gas discharge or plasma and has been successfully used in the studies of the ion beam deposited amorphous diamond(a-D)

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1104-1108
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• 2004

A Study has been made of surface modification of various polymers by ion implantation to change the optical transmittance property at ultraviolet ray (UV, $200\sim400nm$). The substrates were PC (Polycarbonate), PET(Polyethyleneteraphtalate) and PP (Polypropylene). The effects of ion implantation on the change of optical transmittance were investigated in relation to ion species, implantation energies and ion fluences. The N, Ar, Kr, Xe ion implantation performed at ion energies from 20 to 50keV. The fluences ranged from $5\times10^{15}$ to $7\times10^{16}ions/cm^2$. UV/Vis transmittance spectroscopy, FT-IR and XPS were used to investigate optical transmittance, chemical structure and surface chemical state of irradiated polymer. Surface color was changed from the yellow to the dark brown and the transmittance of UV ray in the range UV-A($320\sim400nm$) decreased more than 80% after ion implantation.