• Journal of the Korean Vacuum Society
• /
• v.19 no.3
• /
• pp.161-168
• /
• 2010

The ISO standard specifies the diameter of the gas introducing tube to be definitely 1/10 of the chamber inner diameter of the standard test dome which is used for evaluating the performance of vacuum pumps. Because the inner diameter of the test chamber should not be less than the intake diameter of the vacuum pump, the tube diameter would be even 100 mm if fitting to a very large vacuum pump. Though such a thick tube can be accommodated in a large test dome, it is worthful to investigate whether a thicker tube is helpful or adverse for making more accurate measurements. In this paper it is discussed if there is an optimum tube diameter by comparing the isotropicity of particles emanating from the tube and that of particles entering the orifice.