• Applied Science and Convergence Technology
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• v.23 no.6
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• pp.357-365
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• 2014

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

• Journal of the Korean institute of surface engineering
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• v.48 no.4
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• pp.179-184
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• 2015

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.

• Nuclear Engineering and Technology
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• v.54 no.10
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• pp.3587-3594
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• 2022

A distributed high-speed data acquisition and monitoring system for the RF negative ion source at Huazhong University of Science and Technology (HUST) is developed, which consists of data acquisition, data forwarding and data processing. Firstly, the data acquisition modules sample physical signals at high speed and upload the sampling data with corresponding absolute-time labels over UDP, which builds the time correlation among different signals. And a special data packet format is proposed for the data upload, which is convenient for packing or parsing a fixed-length packet, especially when the span of the time labels in a packet crosses an absolute second. The data forwarding modules then receive the UDP messages and distribute their data packets to the real-time display module and the data storage modules by PUB/SUB-pattern message queue of ZeroMQ. As for the data storage, a scheme combining the file server and MySQL database is adopted to increase the storage rate and facilitate the data query. The test results show that the loss rate of the data packets is within the range of 0-5% and the storage rate is higher than 20 Mbps, both acceptable for the HUST RF negative ion source.

• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.129-134
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• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• Clean Technology
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• v.27 no.2
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• pp.174-181
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• 2021

This study analyzed the groundwater quality characteristics according to the main source of pollution and quarter (season) by using data from the pollution exclusive monitoring network in the Gyeongsangnam-do area for five years (2013-2017). The main source of pollution was the industrial complex areas, waste mines, and sewage treatment facilities. The analysis items were field measurement items (water temperature, pH, electrical conductivity, dissolved oxygen, oxide reduction potential), positive ions, and negative ions. Water temperature and pH did not vary significantly according to the main source of pollution. In industrial complex areas, the value of electrical conductivity was the highest, and dissolved oxygen value was the lowest. The mean concentration of positive and negative ions was the largest in industrial complex areas, followed by sewage treatment facilities and waste mines. It was shown that the concentration of sodium ion was the highest in industrial complex areas and calcium ion in waste mines and sewage treatment facilities. The concentration of bicarbonate ion was the highest in all main sources of pollution. Water temperature, pH, and concentrations of cations and anions did not vary significantly from quarter to quarter. Of the water quality types, the Na-HCO₃ type accounted for the highest proportion, but the Na-Cl type, which has a high possibility of external contamination, accounted for about 20% of the total data in the pollution exclusive monitoring network.

• Journal of Electrical Engineering and Technology
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• v.1 no.3
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• pp.359-365
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• 2006

Since the start of the KSTAR (Korea Superconducting Tokamak Advanced Research) project, Instrumentation and Control (I&C) of the Neutral Beam Test Facility (NB-TF) has been striving to answer diverse requests arising from various facets during the project's development and construction phases. Hard-wired electrical circuits have been designed, tested, fabricated, and finally installed to the relevant parts of the system. In relation to the vacuum system I&C, controlling functions for the rotary pumps, a Roots pump, two turbomolecular pumps, and four cryosorption pumps have been constructed. I&C for the ion source operation are the temperature and flow rate signal monitoring, Langmuir probe signal measurements, gradient grid current measurements, and arc detector circuit. For the huge power system to be monitored or safely operated, many temperature measurement functions have also been implemented for the beam line components like the neutralizer, bending magnet, ion dump, and calorimeter. Nearly all of the control and probe signals between the NB test stand and the control room were made to be transmitted through the optical cables. Failures of coolant flow or beam line vacuum pressure were made to be safely blocked from influencing the system by an appropriate interlock circuit that will shut down the extraction voltage application to the system or prevent damages to the vacuum components. Preliminary estimation of the beam power through the calorimetric measurement shows that 87.9% of the total power of the 60kV/18A beam with 200 seconds duration is absorbed by the calorimeter surface. Most of these I&C results would be highly appropriate for the construction of the main NBI facility for the KSTAR national fusion research project.

• Journal of the Korean Chemical Society
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• v.39 no.12
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• pp.902-909
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• 1995

Detection limit as well as calibration curves on organophosphorus pesticide(dimethoate, diazinon, parathion-methyl, fenitrothion, malathion) and BHCs were measured for evaluation of utility on qualitative or quantitative analysis of pesticides with ion Trap mass spectrometer and quadrupole mass spectrometer. As ionization source, EI and CI were adopted for qualitative analysis of pesticides by comparison of each fragmentation pattern. At the same time, the utility as trace analysis techniques through scan or selected ion monitoring(SIM) mode was evaluated. With ion trap for all pesticides, detection limit(DL, 1 ${\mu}L$ injection) on scan mode was ranged 0.008∼0.225 ng at signal to noise ratio 3. With quadrupole DL on scan mode was ranged 0.23∼3.1 ng over 0.032∼0.68 ng on SIM mode. The calibration curve with ion trap generated good linearity over 0.99 as correlation coefficient. As clean up procedure, Bio Beads S-X3 was used for the separation of oils from five organophosphorous pesticides in flour extractant showing more than 80% as recovery at most cases. In case of BHCs in jinseng with Florisil column, the recovery of pesticides has been 60% to 90%.

• Journal of Biosystems Engineering
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• v.42 no.4
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• pp.350-357
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• 2017

Purpose: In-situ monitoring of water quality is fundamental to most environmental applications. The high cost and long delays of conventional laboratory methods used to determine water quality, including on-site sampling and chemical analysis, have limited their use in efficiently managing water sources while preventing environmental pollution. The objective of this study was to develop an on-site water monitoring system consisting mainly of an Arduino board and a sensor array of multiple ion selective electrodes (ISEs) to measure the concentration of $NO_3$ ions. Methods: The developed system includes a combination of three ISEs, double-junction reference electrode, solution container, sampling system consisting of three pumps and solenoid valves, signal processing circuit, and an Arduino board for data acquisition and system control. Prior to each sample measurement, a two-point normalization method was applied for a sensitivity adjustment followed by an offset adjustment to minimize the potential drift that could occur during continuous measurement and standardize the response of multiple electrodes. To investigate its utility in on-site nitrate monitoring, the prototype was tested in a facility where drinking water was collected from a water supply source. Results: Differences in the electric potentials of the $NO_3$ ISEs between 10 and $100mg{\cdot}L^{-1}$ $NO_3$ concentration levels were nearly constant with negative sensitivities of 58 to 62 mV during the period of sample measurement, which is representative of a stable electrode response. The $NO_3$ concentrations determined by the ISEs were almost comparable to those obtained with standard instruments within 15% relative errors. Conclusions: The use of the developed on-site nitrate monitoring system based on automatic sampling and two-point normalization was feasible for detecting abrupt changes in nitrate concentration at various water supply sites, showing a maximum difference of $4.2mg{\cdot}L^{-1}$ from an actual concentration of $14mg{\cdot}L^{-1}$.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.1
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• pp.28-33
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• 2016

Batteries are used for main power engine in the fields such as mobiles, electric vehicles and unmanned submarines, for starter and lamp driver in general automotive, for emergency electric source in ship. These days, lead-acid and the lithium ion batteries are increasingly used in the fields of the secondary battery, and the lead-acid battery has a low price and safety comparatively, The lithium ion battery has a high energy density, excellent output characteristics and long life, whereas it has the risk of explosion by reacting with moisture in the air. But Recently, due to the development of waterproof, fireproof, dustproof technology, lithium batteries are widely used, particularly, because their usages are getting wider enough to be used as a power source for hybrid ship and electric propulsion ship, it is necessary to manage more strictly. Hybrid ship has power supply units connected to the packets to produce more than 500kWh large power source, and therefore, A number of the communication modules and wires need to implement the wire inspection and monitor system(WIIMS) that allows monitoring server to transmit detecting voltage, current and temperature data, which is required for the management of the batteries. This paper implements a low price type wireless inspection and monitoring system(WILIMS) of the lithium ion battery for hybrid vessels using BLE wireless communication modules and power line modem( PLM), which have the advantages of low price, no electric lines compared to serial communication inspection systems(SCIS). There are state of charge(SOC), state of health(SOH) in inspection parts of batteries, and proposed system will be able to prevent safety accidents because it allows us to predict life time and make a preventive maintenance by checking them at regular intervals.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.2
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• pp.140-147
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• 2017

This paper describes the design and implementation of previously developed PMU (Power Monitoring Unit) for LiPB (Lithium-ion Polymer Battery) that is electric propulsion used as unmanned aerial vehicle's power source. Improved PMU provides stable voltage and current to various sensors and elctric motors necessary during flight. Voltage and current monitoring function that is measured by improved PMU more precisely be enhanced and the monitoring channel and temperature sensor is added. To verify the improved performance of the equipment, it is integrated to electric propulsion system of unmanned aerial vehicle. PMU is calibrated through the ground test. And PMU's performance is checked through the flight test.