• Korean Journal of Materials Research
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• v.20 no.10
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• pp.550-554
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• 2010

This work presents a fabrication procedure to make large-area, size-tunable, periodically different shape metal arrays using nanosphere lithography (NSL) combined with ashing and annealing. A polystyrene (PS, 580 ${\mu}m$) monolayer, which was used as a mask, was obtained with a mixed solution of PS in methanol by multi-step spin coating. The mask morphology was changed by oxygen RIE (Reactive Ion Etching) ashing and temperature processing by microwave heating. The Au or Pt deposition resulted in size tunable nano patterns with different morphologies such as hole and dots. These processes allow outstanding control of the size and morphology of the particles. Various sizes of hole patterns were obtained by reducing the size of the PS sphere through the ashing process, and by increasing the size of the PS sphere through annealing treatment, which resulted in tcontrolling the size of the metallic nanoparticles from 30 nm to 230 nm.

• International Journal of Internet, Broadcasting and Communication
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• v.10 no.3
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• pp.104-108
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• 2018

Lithium-ion batteries have been used in energy storage systems (ESS), electric vehicles (EVs), etc. due to their high safety, fast charging and long lifecycle. This paper aims to improve the convenience of users by changing the wired battery stack used in the battery pack, wirelessly using RFID, reducing the internal volume of the battery pack, reducing the size of the battery pack. In this paper, we propose a battery management system which can provide the flexibility of battery pack expansion and maintenance by using lithium ion battery, battery management system (BMS) and wireless communication for light weight of 1Kw small battery pack. Also, by flexibly arranging the cell layout inside the battery pack and designing to reduce the size of the outer shape of the battery pack.

• Proceedings of the KIPE Conference
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• 2007.07a
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• pp.347-349
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• 2007

Charge equalization scheme for HEV lithium-ion battery system is proposed in this paper, where all the primary windings with in parallel bi-directional switches are coupled in series to provide the equalizing energy from the whole battery string to the specific under charged cells. Moreover, to realize minimized size of equalization circuit employing the proposed cell balancing scheme, the optimal power rating design rule according to equalization time and SOC distribution of imbalance is proposed. A prototype of HEV lithium-ion battery system of four cells shows the outstanding charge equalization performance while maintaining greatly reduced size of cell balancing circuit.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Journal of the Semiconductor & Display Technology
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• v.5 no.1 s.14
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• pp.45-49
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• 2006

In this paper, a new method that monitors the quantity of particles using ion-counter in vacuum environment is introduced. In-situ particle monitoring (ISPM) system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. The ion-counter applied by positive voltage detects only positive charged particles. Therefore the particles to be detected should be in known charge state for further data analysis. ion-counter is installed at the exhaust line of process equipment where the pressure loss is structurally low. ISPM system performance has been verified with SMPS (Scanning Mobility Particle Sizer) system. The correlation coefficient is above 0.98 at the particle size range of $20{\sim}300nm$ in diameter with identified charge distribution under $0.1{\sim}10.0$ Torr.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.19-23
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• 2005

In order to develop a high brightness ion source using plasma, the ion beam extraction system with an aperture of $100{\mu}m$ in diameter has been designed and constructed. It is observed that over 500nA of He ion beam current can be extracted. With such an optimized condition, $\~10^3\;A/cm^2sr$ beam brightness can be measured by emittance scanner, which is believed to be a promising result for developing next generation FIB.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.30-34
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• 2005

This paper describes the design and manufacturing of a focused-ion-beam machining system which can make small features of nano size. We use a SIMION simulator in order to obtain the design data of an ion column. The simulation result shows that the focal length of ion beam decreases as the applied voltage of object lens increases. Finally, we obtained the good images of a mesh of 50 micrometers by using the adjustment of applied voltage, acceleration power, and dimension of each elements.

• Computers and Concrete
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• v.10 no.3
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• pp.219-229
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• 2012

Carbonation is a widespread degradation of concrete and may be coupled with more severe degradations. An experimental investigation was carried out to study the effect of carbonation on chloride ion diffusion of concrete. The characteristic of concrete after carbonation was measured, such as carbonation depth, strength and pore structure. Results indicated that carbonation depth has a good linear relation with square root of carbonate time, and carbonation can improve compressive strength, but lower flexural strength. Results about pore structure of concrete before and after carbonation have shown that carbonation could cause a redistribution of the pore sizes and increase the proportion of small pores. It also can decrease porosities, most probable pore size and average pore diameters. Chloride ion diffusion of concrete after carbonation was studied through natural diffusion method and steady state migration testing method respectively. It is supposed that the chloride ion concentration of carbonation region is higher than that of the sound region because of the separation of fixed salts, and chloride ion diffusion coefficient was increased due to carbonation action evidently.

• Transactions of Materials Processing
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• v.14 no.5 s.77
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• Journal of Electrochemical Science and Technology
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• v.6 no.3
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• pp.75-80
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• 2015

We introduce a new synthesis method to prepare small TiO₂ nanoparticles with a narrow particle size distribution, which is achieved by electron beam (E-beam) irradiation. The effects of E-beam irradiation on the synthesis of TiO₂ nanoparticles and the electrochemical performance of TiO₂ nanoparticles as alternative anode materials for Li-ion batteries are investigated. The TiO₂ nanoparticles induced by E-beam irradiation present better cycling performance and rate capability than the TiO₂ nanoparticles synthesized by normal hydrolysis reaction. The better electrochemical performance is attributed to small particle size and narrow particle size distribution, resulting in the large surface area that provides innumerable reaction sites and short diffusion length for Li⁺ through TiO₂ nanoparticles.