• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1993.11a
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• pp.134-136
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• 1993

Microelectronic fabrication technology .is based on the use of lithsgraphy to create small linewidths and patterns that make up ULSI. In previous papers, we discussed the theoretically calculated values such as ion range, ion concentration,ion transmission coefficient and the defocused ion beam-induced characteristics in a-Se$_{75}$Ge$_{25}$. In this paper, the typical Monte Carlo (MC) simulation results and p개cedures for the focused ion beam lithography were presented. The interaction and scattering of ions with the resist depend on the beam energy, impact parameter arid resist parameters. For ion exposure simulations, the quantity of interest is the spatial distribution of energy deposited by ions in the resist due to interaction phenomena with resist ions.s.s.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.192-192
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• 2011

Hyperthermal ion scattering experiments were conducted with low kinetic energy (<35 eV) cesium ion beams to analyze the UV-photolyzed water-ice films. Neutral molecules (X) on the surface were detected as cesium-molecule ion clusters ($CsX^+$) which were formed through a Reactive Ion Scattering (RIS) process. Ionic species on the surface were desorbed from the surface via a low energy sputtering (LES) process, and were analyzed [1]. Using these methods, the thermal stability of hydronium ion ($H_3O^+$) that was produced by UV light was examined. As the thermal stability of $H_3O^+$ is related with the reaction, $H_3O^+$ + OH + $e^-$ (or $OH^-$) ${\rightarrow}$ $2H_2O$, which is similar or same with the reverse reaction of the auto-ionization of water, the result from this work would be helpful to understand the auto-ionization of $H_2O$ in water-ice that has not been well-understood yet. However, as $H_3O^+$ was not detected through a LES method, the titration experiment of $H_3O^+$ with methylamine ($CH_3NH_2$, MA), MA + $H_3O^+\;{\rightarrow}\;MAH^+$ + $H_2O$, was conducted. In this case, the presence of $MAH^+$ indicates that of $H_3O^+$ in the ice. Thus the pristine ice was photolyzed with UV light for a few minutes and this photolyzed ice was remained at the certain temperature for minutes without UV light. Then MA was adsorbed on that surface so that the population of $H_3O^+$ was found. From the calibration experiments, the relation of $MAH^+$ and $H_3O^+$ was found, so that the thermal stability of $H_3O^+$ can be investigated [2].

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.93-96
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• 1996

We developed three dimensional Monte carlo ion implantation simulator which simulate distributions of impurities under the ion implantation on the tilted multi-layered layer. Our simulation reveals three dimensional shadow effect and sidewall scattering effect due to the geometrical shapes. For the evaluation of the developed three dimensional Monte carlo ion implantation simulator, calculations with 100,000 ions have been performed for the island and hole structures with a thin oxide of 100$\AA$ and nitride of 2000$\AA$. The simulation results showed that the distribution of ion decreases near the conner of the hole structure covered with a nitride layer and increases near the conner for the island structure open to oxide. Moreover, three dimensional distributions of ions were obtained with varying incident energy, tilt and rotation angle, mask depth and three-dimensional structure geometry.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.95.1-95.1
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• 2010

Transparent conducting ZnO films were deposited to apply DSSC Substrate on glass substrates at $500^{\circ}C$ by ionbeam-assisted deposition. Crystallinity, microstructure, surface roughness, chemical composition, electrical and optical properties of the films were investigated as a function of deposition parameters such as ion energy, and substrate temperature. The microstructure of the polycrystalline ZnO films on the glass substrate were closely related to the oxygen ion energy, arrival ratio of oxygen to Zinc Ion bombarded on the growing surface. The main effect of energetic ion bombardment on the growing surface of the film may be divided into two categories; 1) the enhancement of adatom mobility at low energetic ion bombardment and 2) the surface damage by radiation damage at high energetic ion bombardment. The domain structure was obtained in the films deposited at 300 eV. With increasing the ion energy to 600 eV, the domain structure was changed into the grain structure. In case of the low energy ion bombardment of 300 eV, the microstructure of the film was changed from the grain structure to the domain structure with increasing arrival ratio. At the high energy ion bombardment of 600 eV, however, the only grain structure was observed. The electrical properties of the deposited films were significantly related to the change of microstructure. The films with the domain structure had larger carrier concentration and mobility than those with the grain structure, because the grain boundary scattering was reduced in the large size domains compared with the small size grains. The optical transmittance of ZnO films was dependent on a surface roughness. The ZnO films with small surface roughness, represented high transmittance in the visible range because of a decreased light surface scattering. By varying the ion energy and arrival ratio, the resistivity and optical transmittance of the films were varied from $1.1{\times}10^{-4}$ to $2.3{\times}10^{-2}{\Omega}cm$ and from 80 to 87%, respectively. The ZnO film deposited at 300 eV, and substrate temperature of $500^{\circ}C$ had the resistivity of $1.1{\times}10^{-4}{\Omega}cm$ and optical transmittance of 85% in visible range. As a result of experiments, we provides a suggestition that ZnO thin Films can be effectively used as the DSSC substrate Materials.

• Journal of the Korean Electrochemical Society
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• v.14 no.1
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• pp.9-15
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• 2011

The composite membranes comprising of sulfonated polymers as matrix and ionic liquids as ion-conducting medium in replacement of water are studied to investigate the effect of annealing of the sulfonated polymers. The polymeric membranes are prepared on recast Nafion containing the ionic liquid, 1-ethyl-3-methylimidazolium tetrafluoroborate ($EMIBF_4$). The composite membranes are characterized by thermogravitational analyses, ion conductivity and small-angle X-ray scattering. The composite membranes annealed at $190^{\circ}C$ for 2 h after the fixed drying step showed better ionic conductivity, but no significant increase in thermal stability. The mean Bragg distance between the ionic clusters, which is reflected in the position of the ionomer peak (small-angle scattering maximum), is larger in the annealed composite membranes containing $EMIBF_4$ than the non-annealed ones. It might have been explained to be due to the different level of ion-clustering ability of the hydrophilic parts (i.e., sulfonic acid groups) in the non- and annealed polymer matrix. In addition, the ionic conductivity of the membranes shows higher for the annealed composite membranes containing $EMIBF_4$. It can be concluded that the annealing of the composite membranes containing ionic liquids due to an increase in ion-clustering ability is able to bring about the enhancement of ionic conductivity suitable for potential use in proton exchange membrane fuel cells (PEMFCs) at medium temperatures ($150-200^{\circ}C$) in the absence of external humidification.

• Proceedings of the Korean Vacuum Society Conference
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• 2001.02a
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• pp.92-92
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• 2001

• Proceedings of the Korean Vacuum Society Conference
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• 1997.07a
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• pp.155-155
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• 1997

• Proceedings of the Korean Vacuum Society Conference
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• 1995.06a
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• pp.155-155
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• 1995

• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.256-256
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• 2008

• Journal of the Korean Society of Combustion
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• v.23 no.1
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• pp.1-7
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• 2018

The effect of LII interference on the measurement of LIF signals from PAH in a diffusion flame has been investigated. Argon-ion laser at 488 nm was vertically or horizontally polarized, and irradiated to the centerline of the flame at varying flame height. Signals from PAH-rich regions measured at 515 nm were mostly LIF signals, however, signals from soot-rich regions were determined to be mixed with Mie scattering signals and/or LII signals. Signals measured 1 mm above the excitation height were mostly LII signals from soot particles. The results show that a quantitative determination of the LIF's contribution to the measured signals would be difficult as long as the experimental setup described here is used for the regions where PAHs and soot particles exist together.