• 대한전기학회:학술대회논문집
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• 대한전기학회 1988년도 전기.전자공학 학술대회 논문집
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• pp.328-331
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• 1988

Sealed Interface Local Oxidation (SILO) technology has been investigated using a nitride/oxide/nitride three-layered sandwich structure. P-type silicon substrate was either nitrided by rapid thermal processing, or silicon nitride was deposited by LPCVD method. A three-layered sandwich structure was patterned either by reactive ion etch (RIE) mode or by plasma mode. Sacrificial oxidation conditions were also varied. Physical characterization such as cross-section analysis of field oxide, and electrical characterization such as gate oxide integrity, junction leakage and transistor behavior were carried out. It was found that bird's beak was nearly zero or below 0.1um, and the junction leakages in plasma mode were low compared to devices of the same geometry patterned in RIE mode, and gate oxide integrity and transistor behavior were comparable. Conclusively, SILO process is compatible with conventional local oxidation process.

• Journal of Electrochemical Science and Technology
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• 제7권3호
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• pp.206-213
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• 2016

Transition metal oxide-based electrodes for lithium ion batteries have recently attracted much attention because of their high theoretical capacity. Here we report the electrochemical behavior of cobalt oxide nanorods as anodes, prepared by a template-free, one-step electrochemical deposition of cobalt nanorods, followed by an oxidation process. The as-deposited cobalt has a slightly convex columnar structure, and controlled thermal oxidation produces cobalt oxides of different Co/O ratios, while the original shape is largely preserved. As an anode in a rechargeable lithium battery, the Co/O ratio has a strong effect on initial capacity and cycling stability. In particular, the one-dimensional Co@Co_xO_y core shell structure obtained from a mild heat-treatment results in superior cycling stability.

• 태양에너지
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• 제16권2호
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• pp.87-96
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• 1996

아르곤-산소분위기에서 텅스텐산화물 표적을 사용한 rf 마그네트론 스파타링 방법으로 전기적 착색 텅스텐산화물 박막이 ITO가 피복된 유리기판 위에 제작되었다. 사파타링에 의한 제작 조건 중 특히 기판온도가 막의 화학적 안정성에 미치는 영향이 연구되었다. 박막은 리듐퍼코로라이트와 황산 전해질 속에서 전기화학적으로 이온의 주입과 추출 과정이 반복되었으며 또한 착색성을 나타내었다. 착색성을 나타낸 텅스텐 산화물박막들 중에서 기판 온도가 $150^{\circ}C$에서 제작된 막의 내구성이 가장 안정되었다.

• Archives of Pharmacal Research
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• 제23권4호
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• pp.407-412
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• 2000

The presence of the nitric oxide synthase (NOS) enzyme from Salmonella typhimurium (S. typhimurium) was identified by measuring radiolabeled L-$[^3H]$citrulline and NO, and Western blot analysis. NOS was partially purified by both Mono Q ion exchange and Superose 12HR size exclusion column chromatography, sequentially. The molecular weight of NOS was estimated to be 93.3 kDa by Western blot analysis. The enzyme showed a significant dependency on the typical NOS cofactors; an apparent Km for L-arginine of 34.7 mM and maximum activity between $37^{\circ}C$ and $43^{\circ}C$. The activity was inhibited by NOS inhibitors such as aminoguanidine and $N^{G}$ $N^{G}$-dimethyl-L-arginine. taken together, partially purified NOS in S. typhimurium is assumed to be a different isoform of mammalian NOSs.OSs.

• 전자공학회논문지A
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• 제33A권4호
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• pp.112-120
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• 1996

With the MOsES (mask oxide sidewall etch scheme)process which uses the conventional i-line stepper and isotropic wet etching, CMOSFET's with fine gate pattern of 0.1.mu.m CMOSFET device, the screening oxide is deposited before the low energy ion implantation for source/drain extensions and two step sidewall scheme is adopted. Through the characterization of 0.1.mu.m CMOSFET device, it is found that the screening oxide deposition sheme has larger capability of suppressing the short channel effects than two step sidewall schem. In cse of 200.angs.-thick screening oxide deposition, both NMOSFET and PMOSFET maintain good subthreshold characteristics down to 0.1.mu.m effective channel lengths, and show affordable drain saturation current reduction and low impact ionization rates.

• Bulletin of the Korean Chemical Society
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• 제27권4호
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• pp.489-494
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• 2006

Goethite, hematite, magnetite and synthesized iron oxide are used as catalysts for Fenton-type oxidation of phenol. The synthesized iron oxides were characterized by X-ray diffraction (XRD), BET, X-ray photoelectron spectroscopy (XPS), and electron paramagnetic resonance (EPR). The catalytic activity of these materials is classified according to the observed rate of phenol oxidation. The effectiveness of the catalysts followed the sequence: ferrous ion > synthesized iron oxide >> magnetite hematite > goethite. According to these results, the most effective iron oxide catalyst had the structure similar to natural hematite. The surface oxidation state of the catalyst was between magnetite and hematite (+2.5 ~ +3.0). Phenol degraded completely in 40 min at neutral pH (pH = 7). Soluble ferric and ferrous ions were not detected in the filtrate from Fenton reaction solution by AAS. The formation of hydroxyl radicals was confirmed by EPR.

• 한국전기전자재료학회논문지
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• 제17권6호
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• pp.608-614
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• 2004

The gel polymer electrolyte was prepared by radical polymerization using tetra(ethylene glycol) diacrylate and tri(ethylene glycol) dimethacrylate to investigate affect of the number of ethylene oxide. The gel polymer electrolyte showed good electrochemical stability up to 4.5 V vs. Li/Li and high ionic conductivity at various temperatures. The lithium-ion polymer batteries with the gel polymer electrolyte, tetra(ethylene glycol) diacrylate- and tri(ethylene glycol) dimethacrylate-based, also represented good electrochemical performances such as rate capability, low-temperature performances and cycleability. However, the cell with tri(ethylene glycol) dimethacrylate, which has three ethylene oxide, showed better electrochemical performance.

• Environmental Engineering Research
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• 제10권2호
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• pp.45-53
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• 2005

Metal oxide particles with mole ratio of aluminum: titanium of 1:1 were synthesized by a sol-gel method. Langmuir (a) and Freundlich (b) adsorption isotherms of dissolved lead [Pb(Ⅱ)] ion on the metal oxide particles containing aluminum and titanium were determined as follows, respectively,(a) , (b) at pH 6where, correlation coefficients (R2) of Langmuir and Freundlich adsorption isotherms were 0.95 and 0.96, respectively.The overall adsorption rate of Pb(Ⅱ) on the metal oxide particles containing aluminum and titanium was determined by a differential bed reactor. The overall adsorption rate at pH 6 was as a following equation.at pH 6

• 전기화학회지
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• 제16권3호
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• pp.169-176
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• 2013

현재 이차전지에서 사용중인 양극활물질은 구조 안정성이 높은 층상구조(Layered Structure)의 리튬 금속 산화물(Solid State Lithium Oxide Compounds)이 주로 사용된다. 최근에는 리튬이차전지의 성능향상을 위해서 음극활물질과 전해질 사이의 계면뿐만 아니라, 양극활물질과 전해질 사이의 계면에 관한 연구가 활발히 진행되고 있으며, 이러한 계면의 연구를 위해서는 음극활물질 뿐만 아니라, 양극활물질의 표면에 관한 연구도 선행적으로 이루어져야 하는 상황이다. 대표적인 리튬금속 산화물질인 니켈산리튬($LiNiO_2$)과 코발트산리튬($LiCoO_2$)은 서로 매우 유사한 구조를 갖는 층상구조의 양극활물질이다. 코발트산리튬이 다양한 실험적, 이론적 연구가 진행된 반면에, 니켈산 리튬은 실험적 연구에 비해서 이론적 연구가 부족하다. 따라서, 본 연구에서는 니켈산리튬의 X-선 회절계 측정 결과(XRD data)에 나오는9개의 표면 방향을 범밀도함수이론(Density Functional Theory)을 이용하여 니켈산리튬 표면의 표면 에너지를 계산하였다. 니켈산리튬의 X-선 회절계 측정 결과(XRD data)에서는 (003), (104), (101), (110) 결정 등등이 순차적으로 주요하게 존재하는 것으로 확인되었다. 그러나 시뮬레이션을 이용한 각각의 표면 에너지 계산 결과, X-선 회절계 측정 결과와 다른 순서로 안정한 표면 에너지가 나타나는 결과를 얻었다. 따라서 에너지적으로 안정한 표면이자, X-선 회절계에서 주요하게 나타나는 (104)와 (101) 방향의 니켈산리튬 표면이 많이 노출되어 Li 이온의 충방전시 리튬의 삽입 탈리에 영향을 줄 것으로 예상된다.

• 마이크로전자및패키징학회지
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• 제16권4호
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• pp.29-32
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• 2009

기공의 밀도가 높은 다공성 실리콘 산화물 박막이 GaAs 기판 상에 형성이 되었다. 다공성 실리콘 산화막을 형성하기 위해서 자기조립 형태로 배열하는 블록공중합체를 사용하였다. GaAs 기판 상에 화학기상증착 (CVD)을 이용하여 실리콘 산화막을 형성하였다. 폴리스티렌 (PS) 바탕에 벌집 형태로 배열된 폴리메틸메타아크릴레이트 (PMMA)가 주기적으로 배열되어 있는 나노패턴 박막을 형성하였고 PMMA를 아세트 산으로 제거하여 PS만 남아있는 나노크기의 마스크를 형성하였다. 형성된 PS 나노패턴의 지름은 15 nm, 박막의 두께는 40 nm 였으며 이를 건식 식각용 마스크로 사용하여 화학반응성식각 (RIE) 을 진행하였고 PS의 나노패턴이 산화막 기판상에 전사되도록 하였다. 식각 시간을 조절하여 산화막에 형성된 기공이 GaAs 표면까지 연결되도록 하였고 이는 불산으로 산화막을 제거하여 확인하였다. 식각시간은 90초에서 110초였으며 산화막 상에 나노패터닝된 기공이 형성되는 식각 시간은 90초에서 100초 사이였다. 형성된 나노 패터닝된 산화막 기공의 지름은 20~22 nm였고 식각 시간에 따라서 조절이 가능함을 확인할 수 있었다.