• Title/Summary/Keyword: Ion guide

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Development of a General Occupational Safety and Health (OSH) Guide for Maintenance in Etching, Deposition, and Ion Implantation Facilities (반도체 공정 설비 정비 작업 안전보건 가이드: 증착, 식각, 이온주입)

  • Kyung Ehi Zoh;Taek-hyeon Han;Jae-jin Moon;Ingyun Jung;Yeong Woo Hwang;Seyoung Kwon;Kyung-yoon Ko;Mingun Lee;Jaepil Chang;Dong-Uk Park
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.34 no.2
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    • pp.125-133
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    • 2024
  • Objectives: The aim of this study is to develop a comprehensive Occupational Safety and Health (OSH) guide for maintenance tasks in semiconductor processing, specifically focusing on etching, deposition, and ion implantation processes. Methods: The development of the OSH guide involved a literature review, consultations with industry experts, and field investigations. It concentrates on Maintenance Work (MW) operations in these specialized areas. Results: The result is a detailed OSH guide tailored to MW in etching, deposition, and ion implantation facilities within semiconductor processing. This guide is structured to assist maintenance workers through pre-, during and post-MW phases, ensuring easy comprehension and adherence to safety protocols. It highlights the necessity of safety and health measures throughout the MW process to protect personnel. The guide is enriched with real-life scenarios and visual aids, including cartoons and photographs, to aid in the understanding and implementation of safety and health principles. Conclusions: This OSH guide is designed to enhance the protection of workers engaged in maintenance activities in the electronics sector, particularly in semiconductor manufacturing. It aims to improve compliance with safety and health standards in these high-risk environments.

Glass optical waveguides made by electric-field-assisted $Cs^+-Na^+$ ion exchange (전기장에 의한 $Cs^+-Na^+$ 이온교환으로 제작된 유리 광도파로)

  • 김영철;원영희;조두진
    • Korean Journal of Optics and Photonics
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    • v.9 no.2
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    • pp.86-91
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    • 1998
  • Multimode planar waveguides have been fabricated by an electric-field assisted ion exchange in soda-lime glass substrates. Measurements of the mode indices have been made and the index profiles modeled on modified Fermi function are explained by a comparative analysis with the concentration profiles obtained using an electron probe X-ray micro analyzer. The analytical measurements showed that no more than 95% of sodium ions were replaced by the cesium ions. We established formulas for guide depth, mobility, and refractive index change, given the applied electric field, the diffusion temperature, and the time. We have verified the linear relations in the formulas not only between guide and root of diffusion time but also between guide depth and the applied electric filed experimentally.

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Solid-Electrolyte Interphase in the Spinel Cathode Exposed to Carbonate Electrolyte in Li-Ion Battery Application: An ab-initio Study

  • Choe, Dae-Hyeon;Gang, Jun-Hui;Han, Byeong-Chan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.169-169
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    • 2017
  • Due to key roles for the electrochemical stability and charge capacity the solid-electrolyte interphase (SEI) has been extensively studied in anodes of a Li-ion battery cell. There is, however, few of investigation for cathodes. Using first-principles based calculations we describe atomic-level process of the SEI layer formation at the interface of a carbonate electrolyte and $LiMn_2O_4$ spinel cathode. Furthermore, using beyond the conventional density functional theory (DFT+U) calculations we examine the work function of the cathode and frontier orbitals of the electrolyte. Based on the results we propose that proton transfer at the interface is an essential mechanism initiating the SEI layer formation in the $LiMn_2O_4$. Our results can guide a design concept for stable and high capacity Li-ion battery cell through screening an optimum electrolyte fine-tuned energy band alignment for a given cathode.

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A Study on the Advanced Policy Directions of the U-Echo City Implementation (U-Echo City 구축(構築)의 고도화(高度化) 정책방안(政策方案) 연구(硏究))

  • Oh, Jong-Woo;Oh, Sung-Hoon
    • 한국디지털정책학회:학술대회논문집
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    • 2007.06a
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    • pp.325-332
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    • 2007
  • The purpose of this study is to get a politic advanced idea to operate a pro-environment based u-city through the overcome problems on the construction policy for the even areal distribution, and the development for the model structure of the high level. Advanced pro-environmental ubiquitous urban construction becomes an example of the practical level linked by the national agenda as uKorea policy. The Idea of the national land informal ion systems transforms to enhance or to guide the national strategic industry to implement balanced development as grand objectives of the national land due to the factor that 'the economic development 5 years plan' altered to 'the national land 5 years plan'. Therefore, ubiquitous echo city construct ion becomes realized as static spatial informal ion construct ion and dynamic mobile based ubiquitous lives operable by the information infrastructure and IT839 policy items operation. For the synergy effects through this task, it requires a strong empowerment of the information industries and a new growing core engine of the national economy through the policy of the mutual satisfaction on the spat io-temporal information and the pro-environment information systems.

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Renal Tubular Acidosis (신세뇨관 산증)

  • Park, Hye-Won
    • Childhood Kidney Diseases
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    • v.14 no.2
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    • pp.120-131
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    • 2010
  • Renal tubular acidosis (RTA) is a metabolic acidosis due to impaired excretion of hydrogen ion, or reabsorption of bicarbonate, or both by the kidney. These renal tubular abnormalities can occur as an inherited disease or can result from other disorders or toxins that affect the renal tubules. Disorders of bicarbonate reclamation by the proximal tubule are classified as proximal RTA, whereas disorders resulting from a primary defect in distal tubular net hydrogen secretion or from a reduced buffer trapping in the tubular lumen are called distal RTA. Hyperkalemic RTA may occur as a result of aldosterone deficiency or tubular insensitivity to its effects. The clinical classification of renal tubular acidosis has been correlated with our current physiological model of how the nephron excretes acid, and this has facilitated genetic studies that have identified mutations in several genes encoding acid and base ion transporters. Growth retardation is a consistent feature of RTA in infants. Identification and correction of acidosis are important in preventing symptoms and guide approved genetic counseling and testing.

Determination of Copper in Uniformly-Doped Silicon Thin Films by Isotope-Dilution Inductively Coupled Plasma Mass Spectrometry

  • Park, Chang;Cha, Myeong;Lee, Dong
    • Bulletin of the Korean Chemical Society
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    • v.22 no.2
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    • pp.205-209
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    • 2001
  • Uniformly-doped silicon thin films were fabricated by ion beam sputter deposition. The thin films had four levels of copper dopant concentration ranging between 1 ${\times}$1019 and 1 ${\times}$ 1021 atoms/cm3 . Concentrations of Copper dopants were determined by the isotope dilution inductively coupled plasma mass spectrometry (ICP-MS) to provide certified reference data for the quantitative surface analysis by secondary ion mass spectrometry (SIMS). The copper-doped thin films were dissolved in a mixture of 1 M HF and 3 M HNO3 spiked with appropriate amounts of 65 Cu. For an accurate isotope ratio determination, both the detector dead time and the mass discrimination were appropriately corrected and isobaric interference from SiAr molecular ions was avoided by a careful sample pretreatment. An analyte recovery efficiency was obtained for the Cu spiked samples to evaluate accuracy of the method. Uncertainty of the determined copper concentrations, estimated following the EURACHEM Guide, was less than 4%, and detection limit of this method was 5.58 ${\times}$ 1016 atoms/cm3.

Individual Charge Equalization Converter Using Selective Two Current Paths for Series Connected Li-ion Battery Strings

  • Kim, Chol-Ho;Park, Hong-Sun;Moon, Gun-Woo
    • Proceedings of the KIPE Conference
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    • 2008.06a
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    • pp.274-276
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    • 2008
  • This paper proposes an individual charge equalization converter using selective two current paths for series connected lithium-ion battery strings. In the proposed equalizer, a central equalization converter acting as a controllable current source is sequentially connected in parallel with individual batteries through an array of cell selection switches. A flyback converter with a modified rectifier realizes a controllable current source. A central equalization converter is shared by every battery cells through the cell selection switch, instead of a dedicated charge equalizer for each cell. With this configuration, although the proposed equalizer has one dc-dc converter, individual charge equalization can be effectively achieved for the each cell in the strings. Furthermore, since the proposed equalizer would not allocate the separated dc-dc converter to each cell, such that the implementation of great size reduction and low cost can be allowed. In this paper, an optimal power rating design guide is also employed to obtain a minimal balancing size while satisfying equalization requirements. A prototype for eight lithium-ion battery cells is optimally designed and implemented. Experimental results verify that the proposed equalization method has good cell balancing performance showing small size, and low cost.

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Explaining the Drift Behavior of Caffeine and Glucosamine After Addition of Ethyl Lactate in the Buffer Gas of an Ion Mobility Spectrometer

  • Fernandez-Maestre, Roberto;Velasco, Andres Reyes;Hill, Herbert H.
    • Bulletin of the Korean Chemical Society
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    • v.35 no.4
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    • pp.1023-1028
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    • 2014
  • Protonated caffeine ($CH^+$) and glucosamine ($GH^+$) overlapped in an analysis with ion mobility spectrometryquadrupole mass spectrometry. Ethyl lactate vapor (L) at different concentrations from 0 to 22 mmol $m^{-3}$ was added as a buffer gas modifier to separate these signals. The drift times of $CH^+$ and $GH^+$ increased with L concentration. The drift time increase was associated to clustering equilibria of $CH^+$ and $GH^+$ with one molecule of L and the equilibrium of $GH^+$ was more displaced to the formation of $GLH^+$ than that of $GLH^+$. $GH^+$ clustered more to L than $CH^+$ because $GLH^+$ formed more stable hydrogen bonds (26.30 kcal/mol) than $GLH^+$ (24.66 kcal/mol) and the positive charge in $GH^+$ was more sterically accessible than in $CH^+$. The aim of this work was to use theoretical calculations to guide the selection of a buffer gas modifier for IMS separations of two compounds that overlap in the mobility spectra and predict this separation, simplifying that empirical process.

Simultaneous Determination of Asperosaponins and Iridoid Glycosides from Dipsaci Radix by Using LC-ESI-MS Spectrometry (속단(Dipsaci Radix) 중 Asperosaponins 및 Iridoid glycosides의 LC-ESI-MS에 의한 동시분석)

  • Cho, Hwang-Eui;Son, In-Seop;Kim, Sun-Cheun;Son, Kun-Ho;Woo, Mi-Hee;Moon, Dong-Cheul
    • Korean Journal of Pharmacognosy
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    • v.43 no.2
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    • pp.137-146
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    • 2012
  • Dipsaci Radix (Dipsacaceae) has been used as a tonic, an analgesic, anti-inflammatory and anti-complement agents in traditional herbal medicine for the therapy of low back pain, knee pain, rheumatic arthritis, traumatic hematoma, and bone fractures. A high-performance liquid chromatography-electrospray ionization-mass spectrometric method (HPLC-ESI-MS) was developed for the simultaneous quantitation method of the five compounds from the herbal drug: asperosaponin VI and asperosaponin XII (terpene glycosides), sweroside, loganin and dipsacus A(iridoid glycosides). HPLC separation of the analytes was achieved on a C18 column ($150{\times}2.0$ mm i.d., 5 ${\mu}m$) using the aqueous methanol containing 5 mM ammonium acetate with gradient flow of the mobile phase. Detection of the analytes was performed by positive ion electrospray ionization, and selected ion monitoring was used for data acquisition using m/z corresponding molecular adduct ion, $[M+NH_4]^+$ and $[M+H]^+$. Calibration graphs showed good linearity ($r^2$=0.9997) over the wide range of the analytes; intra- and inter-day precisions (RSD, %) were within 9.1% and the accuracy between 94.0-111.0%. Recoveries of the analytes through the assay procedure were in the range of 93.7-110.8%. Analytical results of the herbal drugs of Dipsaci Radix (17 samples) show wide distribution of the five marker compounds and clear difference of the species from Phlomidis Radix (4 samples). The developed method would provide a practical guide for the quality control of the herbal drug.